公开(公告)号：US10910193B2

公开(公告)日：2021-02-02

申请号：US16356539

申请日：2019-03-18

Applicant: EL-MUL TECHNOLOGIES LTD.

Inventor： Eli Cheifetz ,  Amit Weingarten ,  Semyon Shopman ,  Silviu Reinhorn ,  Dmitry Shur

IPC: H01J37/244 ,  H01J37/22 ,  H01J37/26

Abstract: An electron detector assembly configured for detecting electrons emitted from a sample irradiated by an electron beam, including a scintillator configured with a scintillator layer formed with a scintillating surface. The scintillator layer emits light signals corresponding to impingement of electrons upon the scintillating surface. A light guide plate is coupled to the scintillator layer and includes a peripheral surface. One or more silicon photomultiplier devices are positioned upon the peripheral surface, wherein one or more silicon photomultiplier devices are arranged perpendicularly or obliquely relative to the scintillating surface. The silicon photomultiplier device is configured to yield an electrical signal from an electron impinging upon the scintillator surface.

公开(公告)号：US10236155B2

公开(公告)日：2019-03-19

申请号：US15253905

申请日：2016-09-01

Applicant: EL-MUL TECHNOLOGIES LTD.

Inventor： Eli Cheifetz ,  Amit Weingarten ,  Semyon Shofman ,  Silviu Reinhorn

IPC: H01J37/24 ,  H01J37/244

Abstract: An electron detector assembly configured for detecting electrons emitted from a sample irradiated by an electron beam, comprising a scintillator including a scintillator layer, the scintillator layer emitting light signals corresponding to impingement of electrons thereupon, a light guide plate coupled to the scintillator layer and comprising a peripheral surface, and a single or plurality of silicon photomultiplier devices positioned upon the peripheral surface and arranged perpendicularly or obliquely relative to the scintillating surface, the silicon photomultiplier device being configured to yield an electrical signal from an electron impinging upon the scintillator layer.

公开(公告)号：US11656371B1

公开(公告)日：2023-05-23

申请号：US17342636

申请日：2021-06-09

Applicant: EL-MUL TECHNOLOGIES LTD.

Inventor： Jonathan Garel ,  Amit Weingarten ,  Semyon Shofman ,  Alexander Kadyshevitch

IPC: G01T1/20

CPC classification number: G01T1/20185

Abstract: An ion detection system for detecting incident ions including an ion-to-electron converter for converting incident ions to secondary electrons, an accelerating assembly including at least one of an electric field and a magnetic field for acceleration and transfer of the secondary electrons to a scintillator, the scintillator for converting the accelerated secondary electrons to an initial flux of photons, a photon channeling assembly including a first photon channel and a second photon channel, wherein the photon channeling assembly is configured for separating the initial flux of photons into at least a first photon flux channeled into the first photon channel and a second photon flux channeled into the second photon channel, and at least one photodetector for detecting at least one of a first optical signal generated at the first photon channel, and a second optical signal generated at the second photon channel.

公开(公告)号：US11536604B1

公开(公告)日：2022-12-27

申请号：US16888856

申请日：2020-06-01

Applicant: EL-MUL TECHNOLOGIES LTD.

Inventor： Jonathan Garel ,  Amit Weingarten ,  Semyon Shofman ,  Alexander Kadyshevitch

IPC: G01J1/44 ,  H01J43/08 ,  H01J43/28 ,  H01J37/244 ,  H01J37/28

Abstract: An in-vacuum light sensor system, including a light sensor assembly comprising a photocathode configured for converting an impinging photon to a photoelectron, a semiconductor diode configured for multiplying the photoelectron impinging thereon, and a housing including vacuum-compatible materials configured for being placed in a vacuum chamber. The housing is configured for housing the photocathode and the semiconductor diode and for propagation of the photoelectron from the photocathode to the semiconductor diode. An electrical biasing subassembly is configured for electrically biasing at least the photocathode and the semiconductor diode, and the vacuum chamber is configured for positioning the light sensor apparatus therein.

公开(公告)号：US20150034822A1

公开(公告)日：2015-02-05

申请号：US14378098

申请日：2013-02-12

Applicant: EL-MUL TECHNOLOGIES LTD.

Inventor： Silviu Reinhorn ,  Eli Cheifetz ,  Amit Weingarten

IPC: H01J37/28

CPC classification number: H01J37/28 ,  G01N23/04 ,  H01J37/244 ,  H01J2237/221 ,  H01J2237/2443 ,  H01J2237/2445 ,  H01J2237/2446 ,  H01J2237/26 ,  H01J2237/2802 ,  H01J2237/2806

Abstract: A STEM system is disclosed wherein an imaging system is used to image the electron scatter pattern plane of the HAADF detector onto a two-dimensional array detector. A data acquisition system stores and processes the data from the two-dimensional array detector. For each illumination pixel of the STEM, one frame of data is generated and stored Each frame includes data of all scattered angles and can be analyzed in real time or in off-line at any time after the scan. A method is disclosed for detecting electrons emitted from a sample by detecting electrons scattered from the sample and generating plurality of corresponding signals, each signal indicative of scattering angle of a scattered electron; generating a plurality of signal groups, each signal group being a collection of signals of a user selected scattering angle.

Abstract translation: 公开了一种STEM系统，其中使用成像系统将HAADF检测器的电子散射图形平面成像到二维阵列检测器上。 数据采集​​系统存储和处理来自二维阵列检测器的数据。 对于STEM的每个照明像素，生成和存储一帧数据每帧包括所有散射角的数据，并且可以在扫描之后的任何时间实时或离线分析。 公开了一种通过检测从样品散射的电子并产生多个对应信号来检测从样品发射的电子的方法，每个信号指示散射电子的散射角; 产生多个信号组，每个信号组是用户选择的散射角的信号的集合。