FORCE DETECTION DEVICE
    1.
    发明申请

    公开(公告)号:US20180045587A1

    公开(公告)日:2018-02-15

    申请号:US15549708

    申请日:2016-04-08

    CPC classification number: G01L1/18 G01L9/04 H01L29/84

    Abstract: A force detection device includes: a substrate that includes a power supply wire, a reference wire, a first output wire, a second output wire and first to fourth mesa gauges extending along a first direction; and a force transmission block connected to the substrate. A pair of the first and second mesa gauges and a pair of the third and fourth mesa gauges are connected in parallel to each other between the power supply wire and the reference wire. The first output wire is connected between the first and second mesa gauges. The second output wire is connected between the third and fourth mesa gauges. A contact area of the force transmission block with a first pair of the first and fourth mesa gauges is different from a contact area of the force transmission block with a second pair of the second and third mesa gauges.

    FORCE DETECTION DEVICE
    2.
    发明申请

    公开(公告)号:US20180024014A1

    公开(公告)日:2018-01-25

    申请号:US15546729

    申请日:2016-04-04

    Abstract: A force detection device includes: a substrate; and a force transmission block. The substrate includes: a mesa gauge arranged on a principal plane of the substrate and providing a bridge circuit; a connection region arranged on the principal plane; and a sealing portion surrounding all around the mesa gauge and connected to the force transmission block. The mesa gauge includes: a first mesa gauge extending in a first direction; and a second mesa gauge extending in a second direction and spaced apart from the first mesa gauge. The connection region electrically connects the one end of the first mesa gauge and the one end of the second mesa gauge.

    FORCE DETECTION APPARATUS
    3.
    发明申请

    公开(公告)号:US20170102274A1

    公开(公告)日:2017-04-13

    申请号:US15128453

    申请日:2015-03-24

    CPC classification number: G01L1/18 G01L9/0054 G01L9/0055 G01L9/06

    Abstract: A force detection apparatus includes a substrate and a force transmission block. The substrate includes: a high-sensitive mesa gauge that is provided on a main surface, extends in a first direction to produce a relatively large change of an electric resistance in accordance with compressive stress, and includes a top surface; a low-sensitive mesa gauge that is provided on the main surface, extends in a second direction to produce a relatively small change of an electric resistance, and includes a top surface; and a mesa lead that is provided on the main surface, extends in a third direction, and includes a top surface. The force transmission block contacts the top surface of the high-sensitive mesa gauge and the top surface of the low-sensitive mesa gauge, and is non-contact with at least a part of the top surface of the mesa lead.

Patent Agency Ranking