Optical and electromechanical resonator

    公开(公告)号:US10564092B2

    公开(公告)日:2020-02-18

    申请号:US16145806

    申请日:2018-09-28

    摘要: The invention is an electromechanical resonator, comprising a fixed portion and an oscillator oscillating at a resonant frequency and comprising a fluidic channel. The channel defines a fluidic circuit, can receive a fluid, and can be deformed at the resonant frequency. The resonator includes a waveguide, defining a photonic circuit, guiding a light wave between an input and an output of the waveguide and being able to be deformed at the resonant frequency. The waveguide input can be connected to a light source and the waveguide output can be connected to a photodetector able to form a signal representative of the light wave propagated by the waveguide towards the photodetector, the light wave being modulated at a frequency dependent on the resonant frequency. A variation in a mass of the fluid, inducing a variation in the resonant frequency, may be detected via the signal formed by the photodetector.

    METHOD FOR PRODUCING GE-CORE BASED WAVEGUIDES

    公开(公告)号:US20190177836A1

    公开(公告)日:2019-06-13

    申请号:US16213402

    申请日:2018-12-07

    摘要: A method for producing a waveguide including a germanium-based core and a cladding is provided, the method including a step of “low temperature” depositing of a shell after forming the core by engraving, such that the deposition temperature is less than 780° C., followed by a step of “high temperature” depositing of a thick encapsulation layer. The shell and the encapsulation layer at least partially form the cladding of the waveguide. Optionally, a step of annealing under hydrogen at a “low temperature”, less than 750° C., precedes the deposition of the shell. These “low temperature” annealing and depositing steps advantageously make it possible to avoid a post-engraving alteration of the free surfaces of the core during the forming of the cladding which is less germanium-rich.

    OPTICAL AND ELECTROMECHANICAL RESONATOR
    6.
    发明申请

    公开(公告)号:US20190101488A1

    公开(公告)日:2019-04-04

    申请号:US16145806

    申请日:2018-09-28

    摘要: The invention is an electromechanical resonator, comprising a fixed portion (10) and an oscillator (20, 60), the oscillator being able to oscillate at a resonant frequency (f), the oscillator comprising: a fluidic channel (25), defining a fluidic circuit, produced in the oscillator (20, 60), and intended to receive a fluid (4), the fluidic channel being able to be deformed at the resonant frequency, under the effect of the oscillation of the oscillator; the resonator being characterized in that it also includes: a waveguide (26), defining a photonic circuit, produced in the oscillator (20, 60), and intended to guide a light wave (7) between an input (26in) and an output (26out) of the waveguide, the waveguide (26) being able to be deformed at the resonant frequency (f), under the effect of the oscillation of the oscillator; the input (26in) of the waveguide being able to be connected to a light source (6), the output of the waveguide being able to be connected to a photodetector (8), so that the photodetector is able to form a signal (S) representative of the light wave propagated by the waveguide towards the photodetector, the light wave being modulated at a modulation frequency (w) dependent on the resonant frequency (f); such that when under the effect of a variation (δm) in a mass (m) of the fluid (4), inducing a variation (δf) in the resonant frequency, the variation (δm) in mass may be detected via the signal formed by the photodetector.

    PIN structure semiconductor optical receiver
    7.
    发明授权
    PIN structure semiconductor optical receiver 有权
    PIN结构半导体光接收机

    公开(公告)号:US09166091B2

    公开(公告)日:2015-10-20

    申请号:US13922566

    申请日:2013-06-20

    摘要: A PIN structure semiconductor optical receiver includes first and second electrical contact layers and an intrinsic layer disposed between them. The intrinsic layer includes a stud having a stud axis and a stud cross-section. The first and second contact layers have dimensions in a plane perpendicular to the stud axis that are greater than the stud's cross-section. These layers are also elongated and have longitudinal axes offset angularly relative to each other to minimize facing areas of said electrical contact layers.

    摘要翻译: PIN结构半导体光接收器包括第一和第二电接触层和设置在它们之间的本征层。 本征层包括具有螺柱轴和螺柱横截面的螺柱。 第一和第二接触层在垂直于螺柱轴线的平面中具有大于螺柱横截面的尺寸。 这些层也是细长的并且具有相对于彼此成角度地偏移的纵轴,以使所述电接触层的面对面积最小化。