公开(公告)号：US20060278334A1

公开(公告)日：2006-12-14

申请号：US11423164

申请日：2006-06-09

Applicant: Bernd Heinz ,  Cem Yavaser

Inventor： Bernd Heinz ,  Cem Yavaser

IPC: B32B37/00 ,  B32B38/04 ,  B32B37/26

CPC classification number: G11B7/26 ,  B29C65/1406 ,  B29C65/1496 ,  B29C65/4845 ,  B29C65/521 ,  B29C66/1122 ,  B29C66/32 ,  B29C66/452 ,  B29C66/71 ,  B29C66/712 ,  B29C66/723 ,  B29K2033/12 ,  B29K2069/00 ,  B29L2017/005 ,  B32B37/1284 ,  B32B37/18 ,  B32B2310/0831 ,  B32B2429/02

Abstract: In a method for manufacturing an optical storage medium a first 1 and a second circular substrate 2 are being provided and being joined by means of a W curable resin forming an intermediate bonding layer. Then said two bonded substrates are being illuminated with UV light with the exception of the very outer edge of the bonded disc. Afterwards said two bonded disks are being spun and thereby a removal of unwanted resin (adhesive) from the outer edge takes place.

Abstract translation: 在光存储介质的制造方法中，通过形成中间接合层的W固化树脂，设置第1和第2圆形基板2并连接。 然后，除了粘合盘的非常外边缘之外，用UV光照射两个粘合的基底。 之后说两个粘结盘被旋转，从而从外边缘去除不想要的树脂（粘合剂）。

公开(公告)号：US20070105400A1

公开(公告)日：2007-05-10

申请号：US11269911

申请日：2005-11-08

Applicant: Bernd Heinz ,  Cem Yavaser ,  Thomas Pfaff ,  Josef Steinkeller

Inventor： Bernd Heinz ,  Cem Yavaser ,  Thomas Pfaff ,  Josef Steinkeller

IPC: B05C13/02 ,  H01L21/31

CPC classification number: G03F7/168 ,  B05D1/005 ,  B05D3/067 ,  G03F7/162 ,  G11B7/266

Abstract: It is shown a method and apparatus for distributing a viscous liquid over a surface of a substrate with high homogeneity in a defined area, e. g. on a semiconductor wafer or a data storage media, by conditioning the liquid on the substrate thermally in a first step and exposing it to UV radiation in two further steps, locally specific before or during the spin coating process.

Abstract translation: 示出了一种用于在确定的区域中以高均匀性分布粘性液体到基底表面上的方法和装置，例如， G。 在半导体晶片或数据存储介质上，通过在第一步骤中热调节衬底上的液体并将其暴露于另外两个步骤中的UV辐射，在旋转涂覆过程之前或期间是局部特异性的。

公开(公告)号：US20090324806A1

公开(公告)日：2009-12-31

申请号：US12028195

申请日：2008-02-08

Applicant: Cem Yavaser ,  Bernd Heinz

Inventor： Cem Yavaser ,  Bernd Heinz

IPC: B05D5/12

CPC classification number: B05D1/005 ,  B05D1/26 ,  G11B7/266

Abstract: A method for dispensing a viscous liquid onto a rotating, disk-shaped substrate comprises the steps of Positioning the tip of a nozzle for dispensing said viscous liquid at a first distance relative to a surface of said substrate during start of the dispensing, thereby allowing the viscous liquid (4) to make a controlled first contact with the substrate. Then the gap between said nozzle and the surface of said substrate is increased to a second distance during dispensing. Accordingly, an apparatus for dispensing a viscous liquid comprises a nozzle with a tip for dispensing said viscous liquid and means for changing the distance between said nozzle and the surface of said substrate.

Abstract translation: 用于将粘性液体分配到旋转的盘形基底上的方法包括以下步骤：在开始分配期间，相对于所述基底的表面在第一距离处定位用于分配所述粘性液体的喷嘴的尖端，从而允许 粘性液体（4）以便与衬底进行受控的第一接触。 然后，所述喷嘴和所述基板的表面之间的间隙在分配期间增加到第二距离。 因此，用于分配粘性液体的装置包括具有用于分配所述粘性液体的末端的喷嘴和用于改变所述喷嘴和所述基板表面之间的距离的装置。

公开(公告)号：US20070154649A1

公开(公告)日：2007-07-05

申请号：US11614283

申请日：2006-12-21

Applicant: Bernd Heinz ,  Cem Yavaser ,  Thomas Pfaff

Inventor： Bernd Heinz ,  Cem Yavaser ,  Thomas Pfaff

IPC: C08F2/38 ,  B05D5/06

CPC classification number: B29C65/521 ,  B29C65/14 ,  B29C65/1406 ,  B29C65/1487 ,  B29C65/4845 ,  B29C65/76 ,  B29C66/001 ,  B29C66/1122 ,  B29C66/452 ,  B29C66/72321 ,  B29C66/73161 ,  B29C66/82661 ,  B29C2035/0827 ,  B29K2105/243 ,  B29L2017/005 ,  B32B37/025 ,  B32B37/12 ,  B32B2038/0076 ,  B32B2309/68 ,  B32B2310/0831 ,  B32B2429/02 ,  C09J5/02 ,  C09J2400/228 ,  G11B7/24018 ,  G11B7/26

Abstract: A method for bonding of disk shaped substrates comprises the steps of providing a first and a second substrate, applying a liquid adhesive to a first bonding surface and a second surface, irradiating the lacquered surface of at least one of the substrates with UV light for increasing the viscosity of the lacquer, joining the substrates in vacuum, irradiating the joined disk with UV light for increasing the viscosity of the lacquer in between the joined disks, placing the disk onto a rotatable chuck, rotating the disc with a rotation speed preferably >500rpm, and finally separating the 2 substrates to leave the full bonding layer on one of the substrates.

Abstract translation: 一种用于接合盘形基底的方法包括以下步骤：提供第一和第二基底，将液体粘合剂施加到第一粘合表面和第二表面，用UV光照射至少一个基底的涂漆表面以增加 漆的粘度，在真空中接合基片，用紫外光照射接合盘，以增加接合的盘之间的漆的粘度，将盘放在可旋转卡盘上，以优选> 500rpm的转速旋转盘 ，最后分离2个基板，使其中一个基板上的完全粘合层留下。

公开(公告)号：US20050269028A1

公开(公告)日：2005-12-08

申请号：US11128891

申请日：2005-05-13

Applicant: Thomas Eisenhammer ,  Bernd Heinz ,  Roger Loow ,  Cem Yavaser

Inventor： Thomas Eisenhammer ,  Bernd Heinz ,  Roger Loow ,  Cem Yavaser

IPC: B08B3/02 ,  B29C65/52 ,  B29D17/00 ,  B32B37/12 ,  B32B38/16 ,  G11B7/26 ,  B32B31/00

CPC classification number: G11B7/26 ,  B08B3/02 ,  B08B2203/0229 ,  B08B2220/01 ,  B29C37/04 ,  B29C65/1406 ,  B29C65/48 ,  B29C65/4845 ,  B29C65/52 ,  B29C65/521 ,  B29C66/03 ,  B29C66/45 ,  B29C66/71 ,  B29C66/712 ,  B29C66/723 ,  B29C2035/0827 ,  B29D17/005 ,  B29K2033/12 ,  B29K2069/00 ,  B29L2009/00 ,  B29L2017/003 ,  B29L2017/005 ,  B32B37/12 ,  B32B38/162 ,  B32B2429/02

Abstract: A method and device for manufacturing a disc-shaped workpiece comprises the steps of producing a first and second disc-shaped substrate, applying an adhesive on at least one of the flat sides of said first and second substrates, bonding said substrates to form said disc-shaped workpiece and removing an excess of adhesive at the outer rim of the disc shaped workpiece by means of a liquid while rotating the workpiece on a rotating table. The liquid is being dispensed by a supply system comprising one or severeal nozzles, used liquid is collected by a suction device.

Abstract translation: 用于制造盘形工件的方法和装置包括以下步骤：制造第一和第二盘形基底，在所述第一和第二基底的至少一个平坦侧面上施加粘合剂，粘合所述基底以形成所述盘 形状的工件，并且通过液体在盘形工件的外缘处去除多余的粘合剂，同时在旋转工作台上旋转工件。 液体由包括一个或严重喷嘴的供应系统分配，所使用的液体由抽吸装置收集。

公开(公告)号：US07491452B2

公开(公告)日：2009-02-17

申请号：US11203360

申请日：2005-08-12

Applicant: Hoa Van Do ,  Bernd Heinz ,  Yoshihiro Ikeda ,  Kentaro Takano ,  Min Xiao

Inventor： Hoa Van Do ,  Bernd Heinz ,  Yoshihiro Ikeda ,  Kentaro Takano ,  Min Xiao

IPC: G11B5/66

CPC classification number: G11B5/667 ,  G11B5/65 ,  G11B5/656 ,  G11B5/66 ,  G11B5/7325

Abstract: A perpendicular magnetic recording disk has a granular Co-based ferromagnetic alloy recording layer (RL) with oxides of a selected metal (Ta or Nb) and a reduced-thickness exchange-break layer (EBL) between the RL and the soft magnetic underlayer (SUL). A perpendicular magnetic recording system that includes the disk, the write head and the read head, has an improved ability to write to the RL because of the reduced-thickness EBL.

Abstract translation: 垂直磁记录盘具有在RL和软磁性底层之间具有所选金属（Ta或Nb）和减薄厚度交换破坏层（EBL）的氧化物的粒状Co基铁磁合金记录层（RL） SUL）。 由于厚度较薄的EBL，包括盘，写头和读头的垂直磁记录系统具有提高写入RL能力。

公开(公告)号：US06860977B2

公开(公告)日：2005-03-01

申请号：US10703217

申请日：2003-11-06

Applicant: Bernd Heinz ,  Martin Dubs ,  Thomas Eisenhammer ,  Pius Grunenfelder ,  Walter Haag ,  Stanislav Kadlec ,  Siegfried Krassnitzer

Inventor： Bernd Heinz ,  Martin Dubs ,  Thomas Eisenhammer ,  Pius Grunenfelder ,  Walter Haag ,  Stanislav Kadlec ,  Siegfried Krassnitzer

IPC: C23C14/35 ,  G11B7/26 ,  H01J37/34

CPC classification number: H01J37/3408

Abstract: A workpiece is manufactured using a magnetron source that has an optimized yield of sputtered-off material as well as service life of the target. Good distribution values of the layer on the workpiece are obtained that are stable over the entire target service life, and a concave sputter face in a configuration with small target-to-workpiece distance is combined with a magnet system to form the magnetron electron trap in which the outer pole of the magnetron electron trap is stationary and an eccentrically disposed inner pole with a second outer pole part is rotatable about the central source axis.

Abstract translation: 使用具有优化的溅射材料产量以及靶的使用寿命的磁控管源来制造工件。 获得在整个目标使用寿命上稳定的工件上的良好的分布值，并且具有小的目标到工件距离的构造中的凹形溅射面与磁体系统组合以形成磁控管电子阱 其中磁控管电子阱的外极是静止的，并且具有第二外极部分的偏心设置的内极可以围绕中心源轴线旋转。

公开(公告)号：US20090106968A1

公开(公告)日：2009-04-30

申请号：US12256543

申请日：2008-10-23

Applicant: Bernd Heinz

Inventor： Bernd Heinz

IPC: B23P17/00 ,  H01L21/677

CPC classification number: H01L21/67184 ,  H01L21/67751 ,  H01L21/68764 ,  H01L21/68771 ,  Y10T29/49

Abstract: For vacuum treatment of workpieces by a multitude of distinct processing stations (P11-P1n, P21-P2m) the processing stations are grouped in two groups (I and II). The workpieces are handled towards and from the processing stations of the first group (I) simultaneously, whereat the workpieces are treated by the processing stations of the second group (II) in a selectable individual sequence.

Abstract translation: 对于多个不同的处理站（P11-P1n，P21-P2m）对工件进行真空处理，处理站分为两组（I和II）。 同时处理来自第一组（I）的处理站的工件，其中工件由可选择的单独序列中的第二组（II）的处理站处理。

公开(公告)号：US07524570B2

公开(公告)日：2009-04-28

申请号：US11251142

申请日：2005-10-13

Applicant: Qing Dai ,  Bernd Heinz ,  Yoshihiro Ikeda ,  Mary Frances Minardi ,  Kentaro Takano

Inventor： Qing Dai ,  Bernd Heinz ,  Yoshihiro Ikeda ,  Mary Frances Minardi ,  Kentaro Takano

IPC: G11B5/667

CPC classification number: G11B5/732 ,  G11B5/667

Abstract: A perpendicular magnetic recording disk has a soft magnetic underlayer (SUL) that has high corrosion resistance as well as high moment. The material of the SUL is an alloy comprising Co, Fe, X, and Y; where X is Ta or Nb, Y is Zr or Hf, and the combined amount of X and Y present in the alloy is between about 10 and 20 atomic percent. The atomic ratio of Co to Fe in the alloy is between about 90:10 to 10:90, preferably between about 25:75 and 35:65. The SUL may be a single-layer SUL or a multilayer SUL formed of multiple soft magnetic layers separated by an interlayer film or films.

Abstract translation: 垂直磁记录盘具有高耐蚀性和高力矩的软磁性底层（SUL）。 SUL的材料是包括Co，Fe，X和Y的合金; 其中X是Ta或Nb，Y是Zr或Hf，合金中存在的X和Y的组合量在约10和20原子％之间。 合金中Co与Fe的原子比为约90:10至10:90，优选约25:75至35:65。 SUL可以是由层间膜或膜分离的多个软磁层形成的单层SUL或多层SUL。

公开(公告)号：US07482071B2

公开(公告)日：2009-01-27

申请号：US11135750

申请日：2005-05-24

Applicant: Hoa Van Do ,  Bernd Heinz ,  Yoshihiro Ikeda ,  Kentaro Takano ,  Min Xiao

Inventor： Hoa Van Do ,  Bernd Heinz ,  Yoshihiro Ikeda ,  Kentaro Takano ,  Min Xiao

IPC: G11B5/66

CPC classification number: G11B5/65 ,  G11B5/656 ,  G11B5/66 ,  G11B5/667 ,  G11B5/732

Abstract: A perpendicular magnetic recording disk has an improved recording layer of a granular CoPtCr-based ferromagnetic alloy with inter-granular material made up of one or more oxides of Cr and one or more oxides of one or more of a segregant of Si, Ta, Ti, B, Nb or Hf, wherein the amount of oxygen present in the recording layer is greater than about 22 atomic percent and less than about 35 atomic percent. The amount of oxygen in the recording layer is substantially greater than the amount required for the stoichiometric oxide or oxides of the segregant or segregants, and a substantial portion of the oxygen present in the recording layer is present in the inter-granular material. The recording layer exhibits high signal-to-noise ratio (SNR), a coercivity Hc greater than about 5000 Oe and a nucleation field Hn greater (more negative) than about −1500 Oe.

Abstract translation: 垂直磁记录盘具有改进的基于CoPtCr的铁磁性合金的记录层，其具有由一种或多种Cr的一种或多种氧化物和一种或多种Si，Ta，Ti分离的一种或多种氧化物构成的颗粒间材料 ，B，Nb或Hf，其中存在于记录层中的氧的量大于约22原子％且小于约35原子％。 记录层中的氧气量基本上大于分离器或分离器的化学计量氧化物或氧化物所需的量，并且记录层中存在的大部分氧气存在于颗粒间材料中。 记录层显示出高的信噪比（SNR），矫顽力Hc大于约5000Oe，成核场Hn大于（大于负））大于约-1500Oe。