公开(公告)号：US20060278334A1

公开(公告)日：2006-12-14

申请号：US11423164

申请日：2006-06-09

Applicant: Bernd Heinz ,  Cem Yavaser

Inventor： Bernd Heinz ,  Cem Yavaser

IPC: B32B37/00 ,  B32B38/04 ,  B32B37/26

CPC classification number: G11B7/26 ,  B29C65/1406 ,  B29C65/1496 ,  B29C65/4845 ,  B29C65/521 ,  B29C66/1122 ,  B29C66/32 ,  B29C66/452 ,  B29C66/71 ,  B29C66/712 ,  B29C66/723 ,  B29K2033/12 ,  B29K2069/00 ,  B29L2017/005 ,  B32B37/1284 ,  B32B37/18 ,  B32B2310/0831 ,  B32B2429/02

Abstract: In a method for manufacturing an optical storage medium a first 1 and a second circular substrate 2 are being provided and being joined by means of a W curable resin forming an intermediate bonding layer. Then said two bonded substrates are being illuminated with UV light with the exception of the very outer edge of the bonded disc. Afterwards said two bonded disks are being spun and thereby a removal of unwanted resin (adhesive) from the outer edge takes place.

Abstract translation: 在光存储介质的制造方法中，通过形成中间接合层的W固化树脂，设置第1和第2圆形基板2并连接。 然后，除了粘合盘的非常外边缘之外，用UV光照射两个粘合的基底。 之后说两个粘结盘被旋转，从而从外边缘去除不想要的树脂（粘合剂）。

公开(公告)号：US20070105400A1

公开(公告)日：2007-05-10

申请号：US11269911

申请日：2005-11-08

Applicant: Bernd Heinz ,  Cem Yavaser ,  Thomas Pfaff ,  Josef Steinkeller

Inventor： Bernd Heinz ,  Cem Yavaser ,  Thomas Pfaff ,  Josef Steinkeller

IPC: B05C13/02 ,  H01L21/31

CPC classification number: G03F7/168 ,  B05D1/005 ,  B05D3/067 ,  G03F7/162 ,  G11B7/266

Abstract: It is shown a method and apparatus for distributing a viscous liquid over a surface of a substrate with high homogeneity in a defined area, e. g. on a semiconductor wafer or a data storage media, by conditioning the liquid on the substrate thermally in a first step and exposing it to UV radiation in two further steps, locally specific before or during the spin coating process.

Abstract translation: 示出了一种用于在确定的区域中以高均匀性分布粘性液体到基底表面上的方法和装置，例如， G。 在半导体晶片或数据存储介质上，通过在第一步骤中热调节衬底上的液体并将其暴露于另外两个步骤中的UV辐射，在旋转涂覆过程之前或期间是局部特异性的。

公开(公告)号：US20050269028A1

公开(公告)日：2005-12-08

申请号：US11128891

申请日：2005-05-13

Applicant: Thomas Eisenhammer ,  Bernd Heinz ,  Roger Loow ,  Cem Yavaser

Inventor： Thomas Eisenhammer ,  Bernd Heinz ,  Roger Loow ,  Cem Yavaser

IPC: B08B3/02 ,  B29C65/52 ,  B29D17/00 ,  B32B37/12 ,  B32B38/16 ,  G11B7/26 ,  B32B31/00

CPC classification number: G11B7/26 ,  B08B3/02 ,  B08B2203/0229 ,  B08B2220/01 ,  B29C37/04 ,  B29C65/1406 ,  B29C65/48 ,  B29C65/4845 ,  B29C65/52 ,  B29C65/521 ,  B29C66/03 ,  B29C66/45 ,  B29C66/71 ,  B29C66/712 ,  B29C66/723 ,  B29C2035/0827 ,  B29D17/005 ,  B29K2033/12 ,  B29K2069/00 ,  B29L2009/00 ,  B29L2017/003 ,  B29L2017/005 ,  B32B37/12 ,  B32B38/162 ,  B32B2429/02

Abstract: A method and device for manufacturing a disc-shaped workpiece comprises the steps of producing a first and second disc-shaped substrate, applying an adhesive on at least one of the flat sides of said first and second substrates, bonding said substrates to form said disc-shaped workpiece and removing an excess of adhesive at the outer rim of the disc shaped workpiece by means of a liquid while rotating the workpiece on a rotating table. The liquid is being dispensed by a supply system comprising one or severeal nozzles, used liquid is collected by a suction device.

Abstract translation: 用于制造盘形工件的方法和装置包括以下步骤：制造第一和第二盘形基底，在所述第一和第二基底的至少一个平坦侧面上施加粘合剂，粘合所述基底以形成所述盘 形状的工件，并且通过液体在盘形工件的外缘处去除多余的粘合剂，同时在旋转工作台上旋转工件。 液体由包括一个或严重喷嘴的供应系统分配，所使用的液体由抽吸装置收集。

公开(公告)号：US20090324806A1

公开(公告)日：2009-12-31

申请号：US12028195

申请日：2008-02-08

Applicant: Cem Yavaser ,  Bernd Heinz

Inventor： Cem Yavaser ,  Bernd Heinz

IPC: B05D5/12

CPC classification number: B05D1/005 ,  B05D1/26 ,  G11B7/266

Abstract: A method for dispensing a viscous liquid onto a rotating, disk-shaped substrate comprises the steps of Positioning the tip of a nozzle for dispensing said viscous liquid at a first distance relative to a surface of said substrate during start of the dispensing, thereby allowing the viscous liquid (4) to make a controlled first contact with the substrate. Then the gap between said nozzle and the surface of said substrate is increased to a second distance during dispensing. Accordingly, an apparatus for dispensing a viscous liquid comprises a nozzle with a tip for dispensing said viscous liquid and means for changing the distance between said nozzle and the surface of said substrate.

Abstract translation: 用于将粘性液体分配到旋转的盘形基底上的方法包括以下步骤：在开始分配期间，相对于所述基底的表面在第一距离处定位用于分配所述粘性液体的喷嘴的尖端，从而允许 粘性液体（4）以便与衬底进行受控的第一接触。 然后，所述喷嘴和所述基板的表面之间的间隙在分配期间增加到第二距离。 因此，用于分配粘性液体的装置包括具有用于分配所述粘性液体的末端的喷嘴和用于改变所述喷嘴和所述基板表面之间的距离的装置。

公开(公告)号：US20070154649A1

公开(公告)日：2007-07-05

申请号：US11614283

申请日：2006-12-21

Applicant: Bernd Heinz ,  Cem Yavaser ,  Thomas Pfaff

Inventor： Bernd Heinz ,  Cem Yavaser ,  Thomas Pfaff

IPC: C08F2/38 ,  B05D5/06

CPC classification number: B29C65/521 ,  B29C65/14 ,  B29C65/1406 ,  B29C65/1487 ,  B29C65/4845 ,  B29C65/76 ,  B29C66/001 ,  B29C66/1122 ,  B29C66/452 ,  B29C66/72321 ,  B29C66/73161 ,  B29C66/82661 ,  B29C2035/0827 ,  B29K2105/243 ,  B29L2017/005 ,  B32B37/025 ,  B32B37/12 ,  B32B2038/0076 ,  B32B2309/68 ,  B32B2310/0831 ,  B32B2429/02 ,  C09J5/02 ,  C09J2400/228 ,  G11B7/24018 ,  G11B7/26

Abstract: A method for bonding of disk shaped substrates comprises the steps of providing a first and a second substrate, applying a liquid adhesive to a first bonding surface and a second surface, irradiating the lacquered surface of at least one of the substrates with UV light for increasing the viscosity of the lacquer, joining the substrates in vacuum, irradiating the joined disk with UV light for increasing the viscosity of the lacquer in between the joined disks, placing the disk onto a rotatable chuck, rotating the disc with a rotation speed preferably >500rpm, and finally separating the 2 substrates to leave the full bonding layer on one of the substrates.

Abstract translation: 一种用于接合盘形基底的方法包括以下步骤：提供第一和第二基底，将液体粘合剂施加到第一粘合表面和第二表面，用UV光照射至少一个基底的涂漆表面以增加 漆的粘度，在真空中接合基片，用紫外光照射接合盘，以增加接合的盘之间的漆的粘度，将盘放在可旋转卡盘上，以优选> 500rpm的转速旋转盘 ，最后分离2个基板，使其中一个基板上的完全粘合层留下。