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公开(公告)号：US20190304742A1
公开(公告)日：2019-10-03
申请号：US16364894
申请日：2019-03-26
发明人： Luyang Han , Joerg Fober , Stefan Meyer , Wolfgang Berger
IPC分类号： H01J37/26 , H01J37/244
摘要： An electron beam microscope includes an energy-sensitive detector to detect backscattered electrons and a signal processor for processing detection signals of the detector. The signal processor includes an analog amplifier. The signal processor also includes a window comparator having a signal input connected to an output of the analog amplifier. A signal generated at an output of the signal processor is generated based on a signal provided at an output the window comparator. The window comparator is configured to output a predetermined signal only if the amplified signal supplied to its signal input is less than or equal to an upper threshold and greater than or equal to a lower threshold.
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公开(公告)号：US11092702B1
公开(公告)日：2021-08-17
申请号：US16570440
申请日：2019-09-13
发明人： Jörg Fober , Judith Kimling , Wolfgang Berger , Stefan Meyer , Björn Gamm
IPC分类号： H01J37/244 , G01T1/29 , G01T7/00 , G01T1/28
摘要： A particle beam system is configured to perform a method which includes: preventing at least one of generation of induced particles and incidence of the induced particles onto a detection area of a detector configured to output a detection signal; generating a residual signal by processing the detection signal outputted during the preventing using a control value; adjusting, based on the residual signal, the control value so that the residual signal takes a value within a predetermined limited residual-signal target range; directing a primary particle beam onto an object while allowing generation of the induced particles due to the primary particle beam and incidence of the induced particles onto the detection area; generating a result signal by processing the detection signal outputted during the directing using the control value.
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公开(公告)号：US20160178543A1
公开(公告)日：2016-06-23
申请号：US14972589
申请日：2015-12-17
IPC分类号： G01N23/225 , G01N23/203
CPC分类号： G01N23/2208 , G01N23/203 , G01N23/223 , G01N23/225 , G01N23/2251 , G01N23/2252 , G01N23/2254 , H01J37/244 , H01J2237/2441 , H01J2237/2446
摘要： Described herein is a method for analyzing an object using a particle beam apparatus, for example an electron beam apparatus and/or an ion beam apparatus, or using an x-ray beam device and a particle beam apparatus or an x-ray beam device, by means of which the method is carried out. In the method, information about the object is loaded from a data memory into a control device. Furthermore, a group of detection units from the multiplicity of detection units is identified using the information loaded into the control device. A first detector segment is formed from the group of detection units using the control device. Interaction particles and/or interaction radiation, which is/are detected, is/are generated by guiding a particle beam onto the object and scanning the object using the particle beam, where a detector segment signal is read from the detector segment.
摘要翻译： 本文描述了使用粒子束装置，例如电子束装置和/或离子束装置，或者使用x射线束装置和粒子束装置或X射线束装置来分析物体的方法， 通过该方法进行该方法。 在该方法中，关于对象的信息从数据存储器加载到控制设备中。 此外，使用加载到控制装置中的信息来识别来自多个检测单元的一组检测单元。 使用控制装置的一组检测单元形成第一检测器段。 通过将粒子束引导到物体上并使用粒子束扫描物体来生成被检测的相互作用粒子和/或相互作用辐射，其中从检测器段读取检测器段信号。
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公开(公告)号：US11328896B2
公开(公告)日：2022-05-10
申请号：US16398817
申请日：2019-04-30
发明人： Wolfgang Berger , Simon Diemer
摘要： The disclosure relates to a sample carrier for accommodating a microscopic sample for examination or processing in a microscope system. The sample carrier is accommodatable in an accommodating device, such that the sample carrier in the accommodated state assumes a defined orientation relative to the accommodating device. The sample carrier has an individual sample carrier identifier and is designed to communicate with the microscope system and in the process to communicate the individual sample carrier identifier to the microscope system, such that a sample accommodated on the sample carrier is trackable.
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公开(公告)号：US20170038321A1
公开(公告)日：2017-02-09
申请号：US15298689
申请日：2016-10-20
IPC分类号： G01N23/22 , G01N23/223 , G01N23/203 , G01N23/225
CPC分类号： G01N23/2208 , G01N23/203 , G01N23/223 , G01N23/225 , G01N23/2251 , G01N23/2252 , G01N23/2254 , H01J37/244 , H01J2237/2441 , H01J2237/2446
摘要： Described herein is a method for analyzing an object using a particle beam apparatus, for example an electron beam apparatus and/or an ion beam apparatus, or using an x-ray beam device and a particle beam apparatus or an x-ray beam device, by means of which the method is carried out. In the method, information about the object is loaded from a data memory into a control device. Furthermore, a group of detection units from the multiplicity of detection units is identified using the information loaded into the control device. A first detector segment is formed from the group of detection units using the control device. Interaction particles and/or interaction radiation, which is/are detected, is/are generated by guiding a particle beam onto the object and scanning the object using the particle beam, where a detector segment signal is read from the detector segment.
摘要翻译： 本文描述了使用粒子束装置，例如电子束装置和/或离子束装置，或使用x射线束装置和粒子束装置或X射线束装置来分析物体的方法， 通过该方法进行该方法。 在该方法中，关于对象的信息从数据存储器加载到控制设备中。 此外，使用加载到控制装置中的信息来识别来自多个检测单元的一组检测单元。 使用控制装置的一组检测单元形成第一检测器段。 通过将粒子束引导到物体上并使用粒子束扫描物体来生成被检测的相互作用粒子和/或相互作用辐射，其中从检测器段读取检测器段信号。
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公开(公告)号：US09535020B2
公开(公告)日：2017-01-03
申请号：US14972589
申请日：2015-12-17
IPC分类号： G01N23/00 , G01N23/225 , G01N23/203
CPC分类号： G01N23/2208 , G01N23/203 , G01N23/223 , G01N23/225 , G01N23/2251 , G01N23/2252 , G01N23/2254 , H01J37/244 , H01J2237/2441 , H01J2237/2446
摘要： Described herein is a method for analyzing an object using a particle beam apparatus, for example an electron beam apparatus and/or an ion beam apparatus, or using an x-ray beam device and a particle beam apparatus or an x-ray beam device, by means of which the method is carried out. In the method, information about the object is loaded from a data memory into a control device. Furthermore, a group of detection units from the multiplicity of detection units is identified using the information loaded into the control device. A first detector segment is formed from the group of detection units using the control device. Interaction particles and/or interaction radiation, which is/are detected, is/are generated by guiding a particle beam onto the object and scanning the object using the particle beam, where a detector segment signal is read from the detector segment.
摘要翻译： 本文描述了使用粒子束装置，例如电子束装置和/或离子束装置，或使用x射线束装置和粒子束装置或X射线束装置来分析物体的方法， 通过该方法进行该方法。 在该方法中，关于对象的信息从数据存储器加载到控制设备中。 此外，使用加载到控制装置中的信息来识别来自多个检测单元的一组检测单元。 使用控制装置的一组检测单元形成第一检测器段。 通过将粒子束引导到物体上并使用粒子束扫描物体来生成被检测的相互作用粒子和/或相互作用辐射，其中从检测器段读取检测器段信号。
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公开(公告)号：US08766219B2
公开(公告)日：2014-07-01
申请号：US14022875
申请日：2013-09-10
CPC分类号： H01J37/26 , H01J37/244 , H01J37/256 , H01J37/28 , H01J2237/22
摘要： A method of operating a particle beam microscopy. A particle beam is scanned across a scanning region of a surface of the object. Particles are detected by a detector system for a plurality of impingement locations of the primary beam within the scanning region. A detector system generates detector signals which represent for each of the impingement locations an intensity of the detected particles. Material data of the interaction regions are calculated depending on the detector signals and depending on topography data, which represent a topography of the object surface in the scanning region.
摘要翻译： 一种操作粒子束显微镜的方法。 在物体的表面的扫描区域上扫描粒子束。 用于扫描区域内主波束的多个冲击位置的检测器系统检测颗粒。 检测器系统产生检测器信号，其针对每个冲击位置表示检测到的颗粒的强度。 取决于检测器信号并且取决于表示扫描区域中的物体表面的形貌的地形数据来计算相互作用区域的材料数据。
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公开(公告)号：US11158485B2
公开(公告)日：2021-10-26
申请号：US16818806
申请日：2020-03-13
发明人： Andreas Schmaunz , Wolfgang Berger
IPC分类号： H01J37/26 , H01J37/22 , H01J37/14 , G01N23/2251 , H01J37/147 , H01J37/20 , H01J37/244 , H01J37/28
摘要： A particle beam device comprises a first particle beam column for providing a first particle beam and a second particle beam column for providing a second particle beam. Operating the particle beam device may include: supplying the second particle beam with second charged particles onto an object using the second particle beam column, loading a value of a control parameter into a control unit from a database or calculating the value of the control parameter in the control unit, setting an objective lens excitation of a first objective lens of the first particle beam column using the value of the control parameter, detecting second interaction particles using a particle detector. The second interaction particles may emerge from an interaction of the second particle beam with the object when the second particle beam is incident on the object.
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公开(公告)号：US20190341223A1
公开(公告)日：2019-11-07
申请号：US16398817
申请日：2019-04-30
发明人： Wolfgang Berger , Simon Diemer
摘要： The disclosure relates to a sample carrier for accommodating a microscopic sample for examination or processing in a microscope system. The sample carrier is accommodatable in an accommodating device, such that the sample carrier in the accommodated state assumes a defined orientation relative to the accommodating device. The sample carrier has an individual sample carrier identifier and is designed to communicate with the microscope system and in the process to communicate the individual sample carrier identifier to the microscope system, such that a sample accommodated on the sample carrier is trackable.
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10.发明授权公开(公告)号：US10460904B2
公开(公告)日：2019-10-29
申请号：US15886269
申请日：2018-02-01
发明人： Wolfgang Berger
IPC分类号： H01J37/22 , G01N15/14 , G01N23/225 , G01T1/16 , H01J37/18 , H01J37/244 , H01J37/28
摘要： The system described herein relates to an imaging device for imaging an object in a particle beam apparatus and/or for imaging a structural unit of a particle beam apparatus, and to a particle beam apparatus having such an imaging device. The imaging device has an illumination unit having a first switching state and a second switching state for illuminating the object and/or the structural unit with illumination light, where, in the first switching state, the illumination light comprises only light of a first spectral range and where, in the second switching state, the illumination light comprises only light of a second spectral range. The imaging device has a control unit for switching the illumination unit into the first switching state or into the second switching state, and a camera unit for imaging the object and/or the structural unit.
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