公开(公告)号：US10541266B2

公开(公告)日：2020-01-21

申请号：US14829238

申请日：2015-08-18

申请人： California Institute of Technology

发明人： Frank Greer ,  Todd J. Jones ,  Shouleh Nikzad ,  Michael E. Hoenk

IPC分类号： H01L27/146

摘要： High-quality surface coatings, and techniques combining the atomic precision of molecular beam epitaxy and atomic layer deposition, to fabricate such high-quality surface coatings are provided. The coatings made in accordance with the techniques set forth by the invention are shown to be capable of forming silicon CCD detectors that demonstrate world record detector quantum efficiency (>50%) in the near and far ultraviolet (155 nm-300 nm). The surface engineering approaches used demonstrate the robustness of detector performance that is obtained by achieving atomic level precision at all steps in the coating fabrication process. As proof of concept, the characterization, materials, and exemplary devices produced are presented along with a comparison to other approaches.

公开(公告)号：US20160273958A1

公开(公告)日：2016-09-22

申请号：US15019863

申请日：2016-02-09

申请人： California Institute of Technology

发明人： Michael E. Hoenk ,  John J. Hennessy ,  Shouleh Nikzad ,  April D. Jewell

IPC分类号： G01J1/02 ,  H01L31/102 ,  G01T1/20 ,  H01L27/146 ,  G01N23/22 ,  H01L31/107 ,  H01L27/148

CPC分类号： G01T1/2018 ,  G01T1/244 ,  G01T1/2985 ,  H01L27/14621 ,  H01L27/14643 ,  H01L27/14685 ,  H01L27/148 ,  H01L31/02165 ,  H01L31/102 ,  H01L31/107

摘要： A filter for electromagnetic radiation including one or more dielectric spacer regions and one or more reflective regions integrated on a semiconductor substrate, the semiconductor substrate including a semiconductor photodetector, such that the filter transmits ultraviolet radiation to the semiconductor photodetector, the ultraviolet radiation having a range of wavelengths, and the filter suppresses transmission of electromagnetic radiation, having wavelengths outside the range of wavelengths, to the semiconductor photodetector.

摘要翻译： 一种用于电磁辐射的滤光器，包括一个或多个电介质间隔物区域和集成在半导体衬底上的一个或多个反射区域，所述半导体衬底包括半导体光电检测器，使得所述过滤器向半导体光电检测器透射紫外线辐射，所述紫外线辐射具有范围 的波长，并且滤波器抑制具有波长范围外的波长的电磁辐射的传输到半导体光电检测器。

公开(公告)号：US10078142B2

公开(公告)日：2018-09-18

申请号：US15019863

申请日：2016-02-09

申请人： California Institute of Technology

发明人： Michael E. Hoenk ,  John J. Hennessy ,  Shouleh Nikzad ,  April D. Jewell

IPC分类号： G01T1/20 ,  H01L31/107 ,  H01L31/102 ,  G01T1/24 ,  G01T1/29 ,  H01L27/146 ,  H01L27/148

CPC分类号： G01T1/2018 ,  G01T1/244 ,  G01T1/2985 ,  H01L27/14621 ,  H01L27/14643 ,  H01L27/14685 ,  H01L27/148 ,  H01L31/02165 ,  H01L31/102 ,  H01L31/107

摘要： A filter for electromagnetic radiation including one or more dielectric spacer regions and one or more reflective regions integrated on a semiconductor substrate, the semiconductor substrate including a semiconductor photodetector, such that the filter transmits ultraviolet radiation to the semiconductor photodetector, the ultraviolet radiation having a range of wavelengths, and the filter suppresses transmission of electromagnetic radiation, having wavelengths outside the range of wavelengths, to the semiconductor photodetector.

公开(公告)号：US20160005786A1

公开(公告)日：2016-01-07

申请号：US14829238

申请日：2015-08-18

申请人： California Institute of Technology

发明人： Frank Greer ,  Todd J. Jones ,  Shouleh Nikzad ,  Michael E. Hoenk

IPC分类号： H01L27/146

CPC分类号： H01L27/14685 ,  H01L27/1462 ,  H01L27/1464

摘要： High-quality surface coatings, and techniques combining the atomic precision of molecular beam epitaxy and atomic layer deposition, to fabricate such high-quality surface coatings are provided. The coatings made in accordance with the techniques set forth by the invention are shown to be capable of forming silicon CCD detectors that demonstrate world record detector quantum efficiency (>50%) in the near and far ultraviolet (155 nm-300 nm). The surface engineering approaches used demonstrate the robustness of detector performance that is obtained by achieving atomic level precision at all steps in the coating fabrication process. As proof of concept, the characterization, materials, and exemplary devices produced are presented along with a comparison to other approaches.

摘要翻译： 提供高质量的表面涂层以及结合分子束外延原子精度和原子层沉积的技术，以制造这种高质量的表面涂层。 根据本发明提出的技术制成的涂层被证明能够形成在近紫外（155nm-300nm）的世界记录检测器量子效率（> 50％）的硅CCD检测器。 使用的表面工程方法证明了通过在涂层制造过程中的所有步骤实现原子级精度而获得的检测器性能的鲁棒性。 作为概念证明，产生的表征，材料和示例性设备与其他方法的比较一起呈现。