- 专利标题： Sensor integrated metal dielectric filters for solar-blind silicon ultraviolet detectors
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申请号： US15019863申请日： 2016-02-09
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公开(公告)号： US10078142B2公开(公告)日： 2018-09-18
- 发明人: Michael E. Hoenk , John J. Hennessy , Shouleh Nikzad , April D. Jewell
- 申请人： California Institute of Technology
- 申请人地址： US CA Pasadena
- 专利权人： California Institute of Technology
- 当前专利权人： California Institute of Technology
- 当前专利权人地址： US CA Pasadena
- 代理机构： Gates & Cooper LLP
- 主分类号： G01T1/20
- IPC分类号： G01T1/20 ; H01L31/107 ; H01L31/102 ; G01T1/24 ; G01T1/29 ; H01L27/146 ; H01L27/148
摘要：
A filter for electromagnetic radiation including one or more dielectric spacer regions and one or more reflective regions integrated on a semiconductor substrate, the semiconductor substrate including a semiconductor photodetector, such that the filter transmits ultraviolet radiation to the semiconductor photodetector, the ultraviolet radiation having a range of wavelengths, and the filter suppresses transmission of electromagnetic radiation, having wavelengths outside the range of wavelengths, to the semiconductor photodetector.
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