Electromechanical microsystem comprising an active element having a structured core layer

    公开(公告)号:US11716907B2

    公开(公告)日:2023-08-01

    申请号:US16717866

    申请日:2019-12-17

    CPC classification number: H10N30/87 B81B7/0006

    Abstract: A MicroElectroMechanical System is provided, with an active element configured to carry out an electromechanical function, the active element including, from an upper face to a lower face substantially parallel to the upper face, an active layer, a core layer, and a retention layer, the active layer being configured to, under the effect of a first electric signal, go into a mechanically stressed state, configured to generate a bending of the active element in a direction perpendicular to a front face thereof, and vice versa, the active layer, the core layer, and the retention layer being arranged so that a neutral axis, associated with an elongation of zero in a case of bending of the active element, is located in a volume of one or the other of the core layer and of the retention layer, and the core layer further includes at least 20% recesses in its volume.

    Pyroelectric detection device with rigid membrane

    公开(公告)号:US11262246B2

    公开(公告)日:2022-03-01

    申请号:US16591970

    申请日:2019-10-03

    Abstract: Pyroelectric detection device, including at least: a substrate; a membrane arranged on the substrate; a pyroelectric detection element arranged on the membrane or forming at least one part of the membrane, and including at least one portion of pyroelectric material arranged between first and second electrodes; a cavity passing through the substrate, emerging opposite a part of the membrane which forms a bottom wall of the cavity, and including side edges formed by the substrate; an element for stiffening the membrane arranged in the cavity, partially filling the cavity, made integral with the side edges of the cavity at at least two distinct anchoring regions, and arranged against the membrane.

Patent Agency Ranking