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1.发明申请公开(公告)号：US20210114865A1
公开(公告)日：2021-04-22
申请号：US16348004
申请日：2017-11-09
Inventor： Loic JOET , Audrey BERTHELOT
IPC: B81B3/00
Abstract: Disclosed is a hinged MEMS and/or NEMS device with out-of-plane movement including a first portion and a second portion that is hinged so as to be able to rotate with respect to the first portion about an axis of rotation contained in a first mean plane of the device. The device also includes a hinging element that connects the first portion and the second portion and that is stressed flexurally and a sensing element that extends between the first portion and the second portion and that deforms during the movement of the second portion. Finally, the device includes two blades that extend perpendicularly to the mean plane of the hinge device and parallel to the axis of rotation, the blades being placed between the hinging element and the sensing element and connecting the first portion and the second portion and being stressed torsionally during the movement of the second portion.
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公开(公告)号：US20150293155A1
公开(公告)日：2015-10-15
申请号：US14687501
申请日：2015-04-15
Inventor： Loic JOET , Franck BADETS , Guillaume JOURDAN , Patrice REY
CPC classification number: G01R17/105 , B81B7/008 , G01R19/0084
Abstract: A measurement circuit for a sensor, the measurement circuit includes at least one detection branch including at least a first series of at least one dipole and a second series of at least one dipole, the series being connected in parallel and connected at their inputs to a common input terminal, each series of dipole being connected to a distinct output terminal, and an electronic circuit including a bias circuit configured to apply a bias current to the detection branch from the input terminal, and a read circuit configured to impose on each output terminal the same potential referred to as the “reference potential”; the electronic circuit including a determination circuit for determining variations in impedances of each series of dipole of the detection branch on the basis of the current applied to each output terminal by the read circuit so as to keep the potentials equal.
Abstract translation: 一种用于传感器的测量电路，所述测量电路包括至少一个检测支路，所述至少一个检测支路至少包括至少一个偶极子的第一系列和至少一个偶极子的第二系列，所述串联并联并且在其输入端连接到 公共输入端子，每个偶极子系列连接到不同的输出端子，以及电子电路，包括被配置为从输入端子向检测支路施加偏置电流的偏置电路，以及被配置为施加在每个输出端子上的读取电路 相同的潜力被称为“参考潜力”; 该电子电路包括用于基于由读取电路施加到每个输出端子的电流来确定检测支路的每个偶极子的阻抗的变化的确定电路，以便保持电位相等。
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3.发明申请MEMS AND/OR NEMS DYNAMIC PRESSURE SENSOR WITH IMPROVED PERFORMANCES AND MICROPHONE COMPRISING SUCH A SENSOR 审中-公开具有改进性能的MEMS和/或NEMS动态压力传感器和包含这种传感器的麦克风公开(公告)号：US20160277847A1
公开(公告)日：2016-09-22
申请号：US15072495
申请日：2016-03-17
Inventor： Loic JOET
CPC classification number: H04R19/04 , G01L9/08 , H04R7/04 , H04R7/24 , H04R17/02 , H04R19/005 , H04R2201/003
Abstract: Dynamic pressure sensor of MEMS and/or NEMS type comprising a support and a rigid sensitive element anchored to the support by at least one anchoring zone, said sensitive element comprising a parallel first and a second face intended to be subjected to different pressures, said sensitive element being capable of having an out-of-plane displacement with respect to the support in a detection direction under the effect of a pressure difference, the pressure sensor also comprising a detector of a force applied to the sensitive element by the pressure difference.
Abstract translation: MEMS和/或NEMS类型的动态压力传感器包括支撑件和通过至少一个锚固区域锚固到支撑件的刚性敏感元件，所述敏感元件包括平行的第一和第二面，用于经受不同的压力，所述敏感元件 元件能够在压力差的作用下在检测方向上具有相对于支撑件的平面外位移，压力传感器还包括通过压力差施加到敏感元件的力的检测器。
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公开(公告)号：US20240377431A1
公开(公告)日：2024-11-14
申请号：US18690135
申请日：2022-09-06
Inventor： Theo MIANI , Loic JOET
IPC: G01P15/097 , B81B3/00 , G01P15/08 , G01V7/00
Abstract: A microelectromechanical accelerometer includes a support, at least one mass suspended by suspension means relative to the support and configured to move in the plane of the accelerometer, means for measuring the displacement of the seismic mass including at least one first vibrating beam of nanometric cross-section, and first electrostatic coupling means between the seismic mass and said at least one first vibrating beam configured to ensure a mechanical decoupling between the first vibrating beam and the seismic mass. At rest, the first electrostatic coupling means generates traction on the first vibrating beam, so that under the effect of acceleration the state of strain of the first vibrating beam is modified.
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公开(公告)号：US20200317505A1
公开(公告)日：2020-10-08
申请号：US16840552
申请日：2020-04-06
Inventor： Patrice REY , Loic JOET , Thierry VERDOT
Abstract: Hinge for a micromechanical and/or nanomechanical structure comprising a support, a movable part in an out-of-plane direction, said hinge allowing for the out-of-plane displacement of the movable part, the hinge comprising two torsion beams extending along the axis of rotation of the hinge, two bending elements mechanically connecting the movable part and the support and comprising at least one pair of a first and of a second beam parallel with each other and extending in a plane perpendicular to the axis of rotation, the first beam being connected to the support and the second beam being connected to the movable part, the first and second beams being connected to one another by a first connecting element at a longitudinal end, the two beams extending in the same direction from the first connecting element.
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Patent Agency Ranking
6.发明申请公开(公告)号：US20180362333A1
公开(公告)日：2018-12-20
申请号：US16008578
申请日：2018-06-14
Inventor： Federico MASPERO , Loic JOET
CPC classification number: B81B3/0062 , B81B2201/0235 , G01P15/125 , G01P2015/0822
Abstract: Microelectromechanical and/or nanoelectromechanical device comprising a support and at least one moveable element so as to be able to be displaced translationally with respect to the support, a means (G1) for translationally guiding said element, said guiding means (G1) comprising two rigid arms (6), a rotating articulation (12, 10) between each arm (6, 8) and the moveable element (4) and a rotating articulation (10, 14) between each arm (6, 8) and the support, the guiding means (G1) also comprising a coupling articulation (18) between the two arms having at least rotating articulation, said rotating articulations having axes of rotation at least parallel with each other such that during a translational displacement of the moveable element (4) the arms (6, 8) pivot with respect to each other in opposite directions, the rotating articulations being made by torsionally deformable beams.
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7.发明申请CAPACITIVE MICROELECTRONIC AND/OR NANOELECTRONIC DEVICE WITH INCREASED COMPACTNESS 有权具有增加的紧凑性的电容性微电子和/或纳米电子器件公开(公告)号：US20150338246A1
公开(公告)日：2015-11-26
申请号：US14720282
申请日：2015-05-22
Inventor： Philippe ROBERT , Loic JOET
CPC classification number: G01D5/2417 , B81B3/0021 , B81B2201/033 , B81B2203/051 , B81C1/00134 , G01P15/125 , G01P2015/0814 , H01G5/14 , H01G5/16
Abstract: A device with a mobile element extending along a given plane comprising at least one first, one second and one third layers extending in planes parallel to the given plane, with the first layer forming a support, the second layer comprising all or a portion of the mobile element and means for suspending the mobile element with respect to the support and the third layer comprising all or a portion of the capacitive means of which the capacitance varies according to the relative position of the mobile element with respect to the support, said capacitive means comprising at least one mobile electrode integral with one of the faces of the mobile element parallel to the given plane, and at least one fixed electrode with respect to the support, with the fixed and mobile electrodes being arranged at least partially in the same plane parallel to the given plane and at least partially above and/or below the mobile element.
Abstract translation: 一种具有沿着给定平面延伸的移动元件的装置，包括在与所述给定平面平行的平面中延伸的至少一个第一，第二和第三层，所述第一层形成支撑件，所述第二层包括全部或一部分 移动元件和用于使移动元件相对于支撑件悬挂的装置，并且第三层包括根据移动元件相对于支撑件的相对位置电容变化的电容装置的全部或一部分，所述电容装置 包括与所述移动元件的平行于所述给定平面的所述面中的一个一体化的至少一个移动电极以及相对于所述支撑件的至少一个固定电极，所述固定电极和所述移动电极至少部分地布置在同一平面内 到达给定平面并且至少部分地在移动元件上方和/或下方。
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公开(公告)号：US20210292158A1
公开(公告)日：2021-09-23
申请号：US17206752
申请日：2021-03-19
Inventor： Samer DAGHER , Loic JOET
Abstract: A microelectromechanical microphone including a microphone unit made from a first substrate, the microphone unit including a movable element capable of being displaced under the effect of a pressure difference and a device for measuring the displacement of the movable element, a cover made from a second substrate, the cover having a first recess, first device for electrically connecting the measurement device to a control unit, the microphone unit and the cover delimiting between them a vacuum space housing the measurement device and a first cavity, from the first recess, partly closed by the movable element, the vacuum space and the first cavity being insulated in a sealed manner from each other, the microphone including a device for mechanically transmitting the displacement of the movable element to the measurement device and a sealed insulation element through which the transmission device passes.
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公开(公告)号：US20200271733A1
公开(公告)日：2020-08-27
申请号：US16761590
申请日：2018-11-06
Inventor： Guillaume JOURDAN , Bertrand DELAET , Loic JOET
IPC: G01R33/022 , G01R33/028
Abstract: A magnetic field gradient sensor includes a support and a structure having at least a first and a second mobile element, at least one magnetic sensor, each magnetic sensor being mechanically secured to one of the first and/or second mobile elements so as to be able to apply a mechanical force to the structure in the presence of a magnetic field gradient, a coupler for coupling between the first and second mobile elements so that the structure can be moved in at least one balanced mechanical mode in the presence of a magnetic field gradient, and a sensor for measuring the movement of the structure at least in balanced mode.
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10.发明申请公开(公告)号：US20190308873A1
公开(公告)日：2019-10-10
申请号：US16466432
申请日：2017-12-06
Inventor： Loic JOET
Abstract: A device transmits a movement and a force between a first zone and a second zone which are insulated from one another in a sealed manner. The device includes a planar support, a transmission element that is rotatably movable with respect to the support by a pivot joint having an axis of rotation that is parallel to a plane of the support, an opening in the support through which the transmission element passes and level with which the pivot joint is positioned. The transmission element includes at least one first transmission arm on one side of the plane of the support and one second transmission arm on the other side of the plane of the support, and sealed insulation positioned in the opening, such that it insulates the first zone from the second zone in a sealed manner and allows the rotational movement of the transmission element.
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