Abstract:
In Charge Coupled Apparatus laterally graded distributions of immobile charge are disposed under the electrodes and, optionally, between the electrodes to enhance the desired unidirectionality of charge transfer and, optionally, to enable the gap regions between electrodes to act as active storage sites in the information channel. A graded distribution of immobile charge under an electrode provides a built-in electric field in the desired direction of charge propagation so that fieldenhanced charge transfer, and concomitant improved speed, is effected. A graded distribution of immobile charge in a gap between electrodes provides a built-in, suitably asymmetric potential well in the gap. This built-in potential well in the gap can be used as a temporary storage site for charge carriers (much like any other potential well in a CCD) to enable one-phase operation and more compact devices.
Abstract:
The specification describes processes using ion implantation for preparing silicon diode array targets for video camera tubes. Bulk silicon prepared in the conventional way has sufficient nonuniformity over the target area to produce contrast patterns in the video output. This effect can be eliminated by initially preparing high resistivity bulk material and implanting the bulk impurities to obtain the desired bulk resistivity. Advantageous procedures for implanting the diodes are also described.