PACKAGE STRUCTURE AND MANUFACTURING METHOD THEREOF

    公开(公告)号:US20240266245A1

    公开(公告)日:2024-08-08

    申请号:US18431780

    申请日:2024-02-02

    IPC分类号: H01L23/367 H01L21/48

    CPC分类号: H01L23/3675 H01L21/4878

    摘要: The embodiments of the disclosure provides a package structure and a manufacturing method thereof, the package structure includes: a die, including a substrate and a device layer, wherein the substrate has a front side and a back side opposite to each other in a first direction perpendicular to a main surface of the die, and the device layer is at the front side of the substrate; a thermal interface material layer, on the back side of the substrate; and a thermal dissipation component, attached to the die through the thermal interface material layer, the die further includes at least one of a heat dissipation filling structure and a substrate recess, the heat dissipation filling structure is embedded in the substrate and has an exposed part exposed at a sidewall of the substrate; the substrate recess is recessed from the back side of the substrate towards the device layer.