-
公开(公告)号：US11694869B2
公开(公告)日：2023-07-04
申请号：US17115656
申请日：2020-12-08
发明人： Adam Faust , Yosef Basson , Guy Eytan , Yonathan David
IPC分类号： H01J37/20 , H01L21/683 , H01L21/67 , G01N27/04 , H01J37/28
CPC分类号： H01J37/20 , G01N27/041 , H01J37/28 , H01L21/67259 , H01L21/6831
摘要： A method, a non-transitory computer readable medium and a device. The method may include (a) introducing a voltage difference between an absolute value of a negative pole of the electrostatic chuck and an absolute value of a positive pole of the electrostatic chuck, the introducing occurs while the wafer is supported by the electrostatic chuck and is contacted by one or more conductive contact pins of the electrostatic chuck; (b) monitoring, by an electrostatic sensor that comprises a sensing element, a charge at a point of measurement located at a front side of the wafer, at different points of time that follow a start of the introducing of the voltage difference, to provide monitoring results; and (c) determining an electrical parameter of the contact between the wafer and the electrostatic chuck, based on the monitoring results.
-
公开(公告)号：US20190090335A1
公开(公告)日：2019-03-21
申请号：US15708974
申请日：2017-09-19
发明人： Guy Eytan , Emil Weisz , Samuel Ives Nackash , Albert Karabekov
摘要： A computer program product and a method for dissipation of an electrical charge stored in a region of an object. The method may include (a) sensing, by at least one sensor, an electrical charging status of the region of the object, while the object is located within a vacuum chamber and while a gaseous pressure within the vacuum chamber is below a certain vacuum pressure threshold; and (b) performing, based on the charging status of the given region, an electrical charge dissipation process that comprises increasing the gaseous pressure within the vacuum chamber to be within a given gaseous pressure range that facilitates a dissipation, by breakdown, of the electrical charge stored in the region of the object to the vacuum chamber.
-
公开(公告)号：US20220181115A1
公开(公告)日：2022-06-09
申请号：US17115656
申请日：2020-12-08
发明人： Adam Faust , Yosef Basson , Guy Eytan , Yonathan David
IPC分类号： H01J37/20 , H01L21/683 , H01L21/67 , G01N27/04 , H01J37/28
摘要： A method, a non-transitory computer readable medium and a device. The method may include (a) introducing a voltage difference between an absolute value of a negative pole of the electrostatic chuck and an absolute value of a positive pole of the electrostatic chuck, the introducing occurs while the wafer is supported by the electrostatic chuck and is contacted by one or more conductive contact pins of the electrostatic chuck; (b) monitoring, by an electrostatic sensor that comprises a sensing element, a charge at a point of measurement located at a front side of the wafer, at different points of time that follow a start of the introducing of the voltage difference, to provide monitoring results; and (c) determining an electrical parameter of the contact between the wafer and the electrostatic chuck, based on the monitoring results.
-
公开(公告)号：US11189451B2
公开(公告)日：2021-11-30
申请号：US17110167
申请日：2020-12-02
发明人： Itay Asulin , Ofer Yuli , Lavy Shavit , Yoram Uziel , Guy Eytan , Natan Schlimoff , Igor Krivts (Krayvitz) , Jacob Levin , Israel Avneri
摘要： A charged particle beam source that may include an emitter that has a tip for emitting charged particles; a socket; electrodes; a filament that is connected to the electrodes and to the emitter; electrodes for providing electrical signals to the filament; a support element that is connected to the emitter; and a support structure that comprises one or more interfaces for contacting only a part of the support element while supporting the support element.
-
公开(公告)号：US11049704B1
公开(公告)日：2021-06-29
申请号：US16879105
申请日：2020-05-20
发明人： Irit Ruach-Nir , Michal Eilon , Guy Eytan , Magen Yaacov Schulman , Sven Ruhle , Manuel Radek , Igor Krivts (Krayvitz)
摘要： A cleanliness monitor, an evaluation system and a method. The cleanliness monitor may include: a first vacuum chamber, a second vacuum chamber, a molecule collector, a release unit, a mass spectrometer, a manipulator that may be configured to move the molecule collector from the first position to the second position, and an analyzer. The mass spectrometer may have a line of sight to an inner space of the second vacuum chamber. The mass spectrometer may be configured to monitor the inner space of the second vacuum chamber and to generate detection signals that are indicative of a content of the inner space of the second vacuum chamber. A first subset of the detection signals may be indicative of a presence of the at least subset of released organic molecules. The analyzer may be configured to determine, based on the detection signals, the cleanliness of at least one out of (a) the first vacuum chamber, and (b) a tested vacuum chamber. The tested vacuum chamber is fluidly coupled to the first vacuum chamber.
-
公开(公告)号：US10716197B2
公开(公告)日：2020-07-14
申请号：US15708974
申请日：2017-09-19
发明人： Guy Eytan , Emil Weisz , Samuel Ives Nackash , Albert Karabekov
摘要： A computer program product and a method for dissipation of an electrical charge stored in a region of an object. The method may include (a) sensing, by at least one sensor, an electrical charging status of the region of the object, while the object is located within a vacuum chamber and while a gaseous pressure within the vacuum chamber is below a certain vacuum pressure threshold; and (b) performing, based on the charging status of the given region, an electrical charge dissipation process that comprises increasing the gaseous pressure within the vacuum chamber to be within a given gaseous pressure range that facilitates a dissipation, by breakdown, of the electrical charge stored in the region of the object to the vacuum chamber.
-
公开(公告)号：US20220199370A1
公开(公告)日：2022-06-23
申请号：US17129747
申请日：2020-12-21
发明人： Asaf Gutman , Irit Ruach-Nir , Kfir Luria , Sven Ruhle , Guy Eytan
IPC分类号： H01J37/32
摘要： A reactive particles supply system that may include an adjustable gas supply unit that is arranged to supply gas and to set a gas condition, a reactive particles supply unit that may be arranged to receive the gas, and an adjustable reactive particles output unit that may include a reactive particles input, a second reactive particles output, and a reactive particles path. The second reactive particles output is configured to output reactive particles towards an opening of a vacuumed chamber. The adjustable reactive particles output unit is arranged to mechanically configure at least one element of the reactive particles path according to the reactive particles condition.
-
公开(公告)号：US20210175040A1
公开(公告)日：2021-06-10
申请号：US17110167
申请日：2020-12-02
发明人： Itay Asulin , Ofer Yuli , Lavy Shavit , Yoram Uziel , Guy Eytan , Natan Schlimoff , Igor Krivts (Krayvitz) , Jacob Levin , Israel Avneri
摘要： A charged particle beam source that may include an emitter that has a tip for emitting charged particles; a socket; electrodes; a filament that is connected to the electrodes and to the emitter; electrodes for providing electrical signals to the filament; a support element that is connected to the emitter; and a support structure that comprises one or more interfaces for contacting only a part of the support element while supporting the support element.
-
公开(公告)号：US10910204B2
公开(公告)日：2021-02-02
申请号：US16576588
申请日：2019-09-19
发明人： Irit Ruach-Nir , Michal Eilon , Guy Eytan , Magen Yaacov Schulman
摘要： A cleanliness monitor for monitoring a cleanliness of a vacuum chamber. The cleanliness monitor may include a mass spectrometer, a molecule aggregation and release unit and an analyzer. The molecule aggregation and release unit is configured to (a) aggregate, during an aggregation period, organic molecules that are present in the vacuum chamber and (b) induce, during a release period, a release of a subset of the organic molecules towards the mass spectrometer. The mass spectrometer is configured to monitor an environment within the vacuum chamber and to generate detection signals indicative of a content of the environment; wherein a first subset of the detection signals is indicative of a presence of the subset of the organic molecules. The analyzer is configured to determine the cleanliness of the vacuum chamber based on the detection signals.
-
公开(公告)号：US20200013603A1
公开(公告)日：2020-01-09
申请号：US16576588
申请日：2019-09-19
摘要： A cleanliness monitor for monitoring a cleanliness of a vacuum chamber. The cleanliness monitor may include a mass spectrometer, a molecule aggregation and release unit and an analyzer. The molecule aggregation and release unit is configured to (a) aggregate, during an aggregation period, organic molecules that are present in the vacuum chamber and (b) induce, during a release period, a release of a subset of the organic molecules towards the mass spectrometer. The mass spectrometer is configured to monitor an environment within the vacuum chamber and to generate detection signals indicative of a content of the environment; wherein a first subset of the detection signals is indicative of a presence of the subset of the organic molecules. The analyzer is configured to determine the cleanliness of the vacuum chamber based on the detection signals.
-
-
-
-
-
-
-
-
-
搜索结果
19 条记录 (耗时 0.016 秒)
