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公开(公告)号：US20210335569A1
公开(公告)日：2021-10-28
申请号：US17369746
申请日：2021-07-07
IPC分类号： H01J37/244 , H01J37/28
摘要： A scanning electron microscope and a method for evaluating a sample, the method may include (a) illuminating the sample with a primary electron beam, (b) directing secondary electrons emitted from the sample and propagated above a first scintillator, towards an upper portion of the first scintillator, wherein the first scintillator and a second scintillator are positioned between the sample and a column electrode of the column; wherein the first scintillator is positioned above the second scintillator; (c) detecting the secondary electrons by the first scintillator; (d) directing backscattered electrons emitted from the sample towards a lower portion of the second scintillator; and (e) detecting the backscattered electrons by the second scintillator.
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公开(公告)号：US20190090335A1
公开(公告)日：2019-03-21
申请号：US15708974
申请日：2017-09-19
发明人： Guy Eytan , Emil Weisz , Samuel Ives Nackash , Albert Karabekov
摘要： A computer program product and a method for dissipation of an electrical charge stored in a region of an object. The method may include (a) sensing, by at least one sensor, an electrical charging status of the region of the object, while the object is located within a vacuum chamber and while a gaseous pressure within the vacuum chamber is below a certain vacuum pressure threshold; and (b) performing, based on the charging status of the given region, an electrical charge dissipation process that comprises increasing the gaseous pressure within the vacuum chamber to be within a given gaseous pressure range that facilitates a dissipation, by breakdown, of the electrical charge stored in the region of the object to the vacuum chamber.
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公开(公告)号：US11646173B2
公开(公告)日：2023-05-09
申请号：US17369746
申请日：2021-07-07
IPC分类号： H01J37/244 , H01J37/28
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/2443 , H01J2237/2445 , H01J2237/2448 , H01J2237/24475
摘要： A scanning electron microscope and a method for evaluating a sample, the method may include (a) illuminating the sample with a primary electron beam, (b) directing secondary electrons emitted from the sample and propagated above a first scintillator, towards an upper portion of the first scintillator, wherein the first scintillator and a second scintillator are positioned between the sample and a column electrode of the column; wherein the first scintillator is positioned above the second scintillator; (c) detecting the secondary electrons by the first scintillator; (d) directing backscattered electrons emitted from the sample towards a lower portion of the second scintillator; and (e) detecting the backscattered electrons by the second scintillator.
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公开(公告)号：US20170004951A1
公开(公告)日：2017-01-05
申请号：US14788788
申请日：2015-07-01
发明人： Emil Weisz , Mordechai Rozen
IPC分类号： H01J37/18
CPC分类号： H01J37/18 , H01J37/185 , H01J2237/182 , H01J2237/28
摘要： According to an embodiment of the invention there may be provided a system that may include a specimen chamber, an exchange chamber, a pressure monitor; and a controller. The exchange chamber may be configured to (i) receive a specimen when an exchange chamber pressure maintained within the exchange chamber is at a first pressure level, (ii) reduce the exchange chamber pressure to be lower than a specimen vapor pressure. The pressure monitor may be configured to perform, during a measurement period, at least one measurement of the exchange chamber pressure. The exchange chamber may be configured to stop a reduction of the exchange chamber pressure during the measurement period.
摘要翻译： 根据本发明的实施例，可以提供一种系统，其可以包括样本室，交换室，压力监视器; 和控制器。 交换室可以被配置为（i）当保持在交换室内的交换室压力处于第一压力水平时，（ii）将交换室压力降低到低于样本蒸汽压力的情况下接收样本。 压力监视器可以被配置为在测量周期期间执行交换室压力的至少一个测量。 交换室可以被配置为在测量期间停止减小交换室压力。
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公开(公告)号：US10716197B2
公开(公告)日：2020-07-14
申请号：US15708974
申请日：2017-09-19
发明人： Guy Eytan , Emil Weisz , Samuel Ives Nackash , Albert Karabekov
摘要： A computer program product and a method for dissipation of an electrical charge stored in a region of an object. The method may include (a) sensing, by at least one sensor, an electrical charging status of the region of the object, while the object is located within a vacuum chamber and while a gaseous pressure within the vacuum chamber is below a certain vacuum pressure threshold; and (b) performing, based on the charging status of the given region, an electrical charge dissipation process that comprises increasing the gaseous pressure within the vacuum chamber to be within a given gaseous pressure range that facilitates a dissipation, by breakdown, of the electrical charge stored in the region of the object to the vacuum chamber.
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公开(公告)号：US09583307B2
公开(公告)日：2017-02-28
申请号：US14788788
申请日：2015-07-01
发明人： Emil Weisz , Mordechai Rozen
CPC分类号： H01J37/18 , H01J37/185 , H01J2237/182 , H01J2237/28
摘要： According to an embodiment of the invention there may be provided a system that may include a specimen chamber, an exchange chamber, a pressure monitor; and a controller. The exchange chamber may be configured to (i) receive a specimen when an exchange chamber pressure maintained within the exchange chamber is at a first pressure level, (ii) reduce the exchange chamber pressure to be lower than a specimen vapor pressure. The pressure monitor may be configured to perform, during a measurement period, at least one measurement of the exchange chamber pressure. The exchange chamber may be configured to stop a reduction of the exchange chamber pressure during the measurement period.
摘要翻译： 根据本发明的实施例，可以提供一种系统，其可以包括样本室，交换室，压力监视器; 和控制器。 交换室可以被配置为（i）当保持在交换室内的交换室压力处于第一压力水平时接收样品，（ii）将交换室压力降低到低于样品蒸汽压力。 压力监视器可以被配置为在测量周期期间执行交换室压力的至少一个测量。 交换室可以被配置为在测量期间停止减小交换室压力。
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