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公开(公告)号：US20210335569A1
公开(公告)日：2021-10-28
申请号：US17369746
申请日：2021-07-07
IPC分类号： H01J37/244 , H01J37/28
摘要： A scanning electron microscope and a method for evaluating a sample, the method may include (a) illuminating the sample with a primary electron beam, (b) directing secondary electrons emitted from the sample and propagated above a first scintillator, towards an upper portion of the first scintillator, wherein the first scintillator and a second scintillator are positioned between the sample and a column electrode of the column; wherein the first scintillator is positioned above the second scintillator; (c) detecting the secondary electrons by the first scintillator; (d) directing backscattered electrons emitted from the sample towards a lower portion of the second scintillator; and (e) detecting the backscattered electrons by the second scintillator.
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公开(公告)号：US11646173B2
公开(公告)日：2023-05-09
申请号：US17369746
申请日：2021-07-07
IPC分类号： H01J37/244 , H01J37/28
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/2443 , H01J2237/2445 , H01J2237/2448 , H01J2237/24475
摘要： A scanning electron microscope and a method for evaluating a sample, the method may include (a) illuminating the sample with a primary electron beam, (b) directing secondary electrons emitted from the sample and propagated above a first scintillator, towards an upper portion of the first scintillator, wherein the first scintillator and a second scintillator are positioned between the sample and a column electrode of the column; wherein the first scintillator is positioned above the second scintillator; (c) detecting the secondary electrons by the first scintillator; (d) directing backscattered electrons emitted from the sample towards a lower portion of the second scintillator; and (e) detecting the backscattered electrons by the second scintillator.
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公开(公告)号：US20230055035A1
公开(公告)日：2023-02-23
申请号：US17404900
申请日：2021-08-17
IPC分类号： G02B6/35 , H01J37/304 , H01J37/244
摘要： An adjustable attenuation optical unit that may include a lightguide that includes a core, wherein the core comprises an output, an input and an exterior surface; and an adjustable attenuator that is configured to define an interfacing parameter related to an area of the exterior surface thereby receiving at least some of the light that impinges on the area.
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公开(公告)号：US11835769B2
公开(公告)日：2023-12-05
申请号：US17404900
申请日：2021-08-17
IPC分类号： G02B6/35 , H01J37/244 , H01J37/304
CPC分类号： G02B6/3538 , H01J37/244 , H01J37/3045 , H01J2237/28
摘要： An adjustable attenuation optical unit that may include a lightguide that includes a core, wherein the core comprises an output, an input and an exterior surface; and an adjustable attenuator that is configured to define an interfacing parameter related to an area of the exterior surface thereby receiving at least some of the light that impinges on the area.
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