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公开(公告)号：US20240085351A1
公开(公告)日：2024-03-14
申请号：US18231567
申请日：2023-08-08
发明人： Doron Girmonsky , Michal Eilon , Dror Shemesh , Uri Hadar
IPC分类号： G01N23/083 , G06T7/00
CPC分类号： G01N23/083 , G06T7/001 , G06T2207/10116 , G06T2207/20084
摘要： Disclosed herein is a system for non-destructive depth-profiling of samples. The system includes an electron beam source, a light sensor, and processing circuitry. The electron beam source configured to project e-beams on an inspected sample at each of a plurality of landing energies, which induce X-ray emitting interactions within each of a plurality of probed regions in the inspected sample, respectively, whose depth is determined by the landing energy. The light sensor is configured to measure the emitted X-ray light to obtain optical emission data sets pertaining to each of the probed regions, respectively. The processing circuitry is configured to determine a set of structural parameters, characterizing an internal geometry and/or a composition of the inspected sample, based on the measured optical emission data sets and taking into account reference data indicative of an intended design of the inspected sample.
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公开(公告)号：US10910204B2
公开(公告)日：2021-02-02
申请号：US16576588
申请日：2019-09-19
发明人： Irit Ruach-Nir , Michal Eilon , Guy Eytan , Magen Yaacov Schulman
摘要： A cleanliness monitor for monitoring a cleanliness of a vacuum chamber. The cleanliness monitor may include a mass spectrometer, a molecule aggregation and release unit and an analyzer. The molecule aggregation and release unit is configured to (a) aggregate, during an aggregation period, organic molecules that are present in the vacuum chamber and (b) induce, during a release period, a release of a subset of the organic molecules towards the mass spectrometer. The mass spectrometer is configured to monitor an environment within the vacuum chamber and to generate detection signals indicative of a content of the environment; wherein a first subset of the detection signals is indicative of a presence of the subset of the organic molecules. The analyzer is configured to determine the cleanliness of the vacuum chamber based on the detection signals.
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公开(公告)号：US20240255449A1
公开(公告)日：2024-08-01
申请号：US18103238
申请日：2023-01-30
发明人： Doron Girmonsky , Uri Hadar , Dror Shemesh , Michal Eilon
IPC分类号： G01N23/2252
CPC分类号： G01N23/2252 , G01N2223/079 , G01N2223/507 , G01N2223/6116
摘要： Disclosed herein is a system for non-destructive classification of specimens. The system includes an e-beam source, an X-ray measurement module, and a computational module. The e-beam source is configured to project e-beams on a specimen at one or more e-beam landing energies, so as to penetrate the specimen and induce emission of X-rays. The X-ray measurement module is configured to measure the emitted X-rays. The computational module is configured to process the measurement data to obtain an energy signature of at least one target substance included in the specimen and classify the inspected specimen based on the obtained energy signature and one or more reference energy signatures pertaining to one or more reference specimens, respectively.
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公开(公告)号：US20240085356A1
公开(公告)日：2024-03-14
申请号：US17901705
申请日：2022-09-01
发明人： Doron Girmonsky , Michal Eilon , Dror Shemesh , Uri Hadar
IPC分类号： G01N23/2252 , G06N3/08
CPC分类号： G01N23/2252 , G06N3/08
摘要： A computer-based method for non-destructive z-profiling of samples. The method includes: a measurement operation and a data analysis operation. The measurement operation includes, for each of a plurality of landing energies: (i) projecting an electron beam on a sample at a respective landing energy, such that light-emitting interactions between electrons from the electron beam and the sample occur within a respective probed region of the sample, which is centered about a respective depth; and (ii) measuring the emitted light to obtain an optical emission data set of the sample. The data analysis operation includes obtaining from the measured optical emission data sets a concentration map quantifying a dependence of a concentration of a material, which the sample comprises, on at least the depth.
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公开(公告)号：US10217621B2
公开(公告)日：2019-02-26
申请号：US15653299
申请日：2017-07-18
发明人： Irit Ruach-Nir , Michal Eilon , Guy Eytan , Magen Yaacov Schulman
摘要： A cleanliness monitor for monitoring a cleanliness of a vacuum chamber. The cleanliness monitor may include a mass spectrometer, a molecule aggregation and release unit and an analyzer. The molecule aggregation and release unit is configured to (a) aggregate, during an aggregation period, organic molecules that are present in the vacuum chamber and (b) induce, during a release period, a release of a subset of the organic molecules towards the mass spectrometer. The mass spectrometer is configured to monitor an environment within the vacuum chamber and to generate detection signals indicative of a content of the environment; wherein a first subset of the detection signals is indicative of a presence of the subset of the organic molecules. The analyzer is configured to determine the cleanliness of the vacuum chamber based on the detection signals.
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公开(公告)号：US20240096591A1
公开(公告)日：2024-03-21
申请号：US18237854
申请日：2023-08-24
发明人： Dror Shemesh , Doron Girmonsky , Uri Hadar , Michal Eilon
IPC分类号： H01J37/26 , H01J37/244 , H01J37/28
CPC分类号： H01J37/265 , H01J37/244 , H01J37/28 , H01J2237/24475 , H01J2237/24495 , H01J2237/24507
摘要： Disclosed herein is a system for non-destructive depth-profiling of samples. The system includes: (i) an electron beam (e-beam) source for projecting e-beams at each of a plurality of landing energies on an inspected sample; (ii) an electron sensor for obtaining a measured set of electron intensities pertaining to each of the landing energies; and (iii) processing circuitry for determining a set of structural parameters, which characterizes an internal geometry and/or a composition of the inspected sample, based on the measured set of electron intensities and taking into account reference data indicative of an intended design of the inspected sample.
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公开(公告)号：US20240094150A1
公开(公告)日：2024-03-21
申请号：US17947481
申请日：2022-09-19
发明人： Dror Shemesh , Doron Girmonsky , Uri Hadar , Michal Eilon
IPC分类号： G01N23/2251 , H01J37/29
CPC分类号： G01N23/2251 , H01J37/292 , G01N2223/053 , G01N2223/305 , G01N2223/306 , H01J2237/22 , H01J2237/2815
摘要： Disclosed herein is a computer-based method for non-destructive depth-profiling of samples. The method includes a measurement operation and a data analysis operation. The measurement operation includes, for each of a plurality of landing energies: (i) projecting an electron beam on a sample, which penetrates the sample to a respective depth determined by the landing energy, and (ii) sensing electrons returned from the sample, thereby obtaining a respective sensed electrons data set. The data analysis operation includes generating from the sensed electrons data sets a concentration map, which characterizing at least a vertical dimension of the sample.
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公开(公告)号：US11049704B1
公开(公告)日：2021-06-29
申请号：US16879105
申请日：2020-05-20
发明人： Irit Ruach-Nir , Michal Eilon , Guy Eytan , Magen Yaacov Schulman , Sven Ruhle , Manuel Radek , Igor Krivts (Krayvitz)
摘要： A cleanliness monitor, an evaluation system and a method. The cleanliness monitor may include: a first vacuum chamber, a second vacuum chamber, a molecule collector, a release unit, a mass spectrometer, a manipulator that may be configured to move the molecule collector from the first position to the second position, and an analyzer. The mass spectrometer may have a line of sight to an inner space of the second vacuum chamber. The mass spectrometer may be configured to monitor the inner space of the second vacuum chamber and to generate detection signals that are indicative of a content of the inner space of the second vacuum chamber. A first subset of the detection signals may be indicative of a presence of the at least subset of released organic molecules. The analyzer may be configured to determine, based on the detection signals, the cleanliness of at least one out of (a) the first vacuum chamber, and (b) a tested vacuum chamber. The tested vacuum chamber is fluidly coupled to the first vacuum chamber.
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