公开(公告)号：US20240145230A1

公开(公告)日：2024-05-02

申请号：US17976573

申请日：2022-10-28

Applicant: Applied Materials, Inc.

Inventor： Abhishek Mandal ,  Nitin Deepak ,  Geetika Bajaj ,  Ankur Kadam ,  Gopi Chandran Ramachandran ,  Suraj Rengarajan ,  Farhad K. Moghadam ,  Deenesh Padhi ,  Srinivas M. Satya ,  Manish Hemkar ,  Vijay Tripathi ,  Darshan Thakare

IPC: H01L21/02

CPC classification number: H01L21/0206 ,  H01L21/02123 ,  H01L21/02208 ,  H01L21/0226

Abstract: Exemplary semiconductor processing methods may include providing one or more deposition precursors to a semiconductor processing chamber. A substrate may be disposed within a processing region of the semiconductor processing chamber. The methods may include depositing a silicon-containing material on the substrate and on one or more components of the semiconductor processing chamber. The methods may include providing a fluorine-containing precursor to the processing region. The fluorine-containing precursor may be plasma-free when provided to the processing region. The methods may include contacting the silicon-containing material on the one or more components of the semiconductor processing chamber with the fluorine-containing precursor. The methods may include removing at least a portion of the silicon-containing material on the one or more components of the semiconductor processing chamber with the fluorine-containing precursor.

公开(公告)号：US11739429B2

公开(公告)日：2023-08-29

申请号：US17339411

申请日：2021-06-04

Applicant: Applied Materials, Inc.

Inventor： Abhishek Mandal ,  Nitin Deepak ,  Neha Gupta ,  Prerna Sonthalia Goradia ,  Ankur Kadam ,  Kenichi Ohno ,  David Alexander Britz ,  Lance A. Scudder

IPC: C23C16/40 ,  C23G1/10 ,  C23C16/02 ,  C23C16/34 ,  B64F5/40 ,  C11D7/32 ,  C11D7/06 ,  C11D7/08 ,  C11D11/00

CPC classification number: C23G1/10 ,  B64F5/40 ,  C11D7/06 ,  C11D7/08 ,  C11D7/3245 ,  C11D11/0023 ,  C23C16/0227 ,  C23C16/34 ,  C23C16/40

Abstract: Methods for refurbishing aerospace components by removing corrosion and depositing protective coatings are provided herein. In one or more embodiments, a method of refurbishing an aerospace component includes exposing the aerospace component containing corrosion to an aqueous cleaning solution. The aerospace component contains a nickel superalloy, an aluminide layer disposed on the nickel superalloy, and an aluminum oxide layer disposed on the aluminide layer. The method includes removing the corrosion from a portion of the aluminum oxide layer with the aqueous cleaning solution to reveal the aluminum oxide layer, then exposing the aluminum oxide layer to a post-rinse, and forming a protective coating on the aluminum oxide layer.