摘要:
Radial distribution of etch rate is controlled by controlling the respective duty cycles of pulsed VHF source power applied to the ceiling and pulsed HF or MF bias power on the workpiece. Net average electrical charging of the workpiece is controlled by providing an electronegative process gas and controlling the voltage of a positive DC pulse on the workpiece applied during pulse off times of the pulsed VHF source power.
摘要:
Radial distribution of etch rate is controlled by controlling the respective duty cycles of pulsed VHF source power applied to the ceiling and pulsed HF or MF bias power on the workpiece. Net average electrical charging of the workpiece is controlled by providing an electronegative process gas and controlling the voltage of a positive DC pulse on the workpiece applied during pulse off times of the pulsed VHF source power.
摘要:
Methods for processing a substrate are provided herein. In some embodiments, a method of etching a dielectric layer includes generating a plasma by pulsing a first RF source signal having a first duty cycle; applying a second RF bias signal having a second duty cycle to the plasma; applying a third RF bias signal having a third duty cycle to the plasma, wherein the first, second, and third signals are synchronized; adjusting a phase variance between the first RF source signal and at least one of the second or third RF bias signals to control at least one of plasma ion density non-uniformity in the plasma or charge build-up on the dielectric layer; and etching the dielectric layer with the plasma.
摘要:
In a plasma reactor employing a planar electron beam as a plasma source, the electron beam source chamber has an internal conductive fin that is profiled along a direction transverse to the beam propagation diction and parallel to the plane of the electron beam, in order to correct electron beam density distribution.
摘要:
Electrostatic chucks with variable pixelated magnetic field are described. For example, an electrostatic chuck (ESC) includes a ceramic plate having a front surface and a back surface, the front surface for supporting a wafer or substrate. A base is coupled to the back surface of the ceramic plate. A plurality of electromagnets is disposed in the base, the plurality of electromagnets configured to provide pixelated magnetic field tuning capability for the ESC.
摘要:
Methods and apparatus for controlling a plasma are provided herein. In some embodiments, a method may include supplying a first RF signal having a first frequency and a first period from an RF power source to a first electrode, wherein the first period is a first integer number of first cycles at the first frequency; supplying a second RF signal having a second frequency and a second period from the RF power source to the first electrode, wherein the second period is a second integer number of second cycles at the second frequency and wherein a first multiplicative product of the first frequency and the first integer number is equal to a second multiplicative product of the second frequency and the second integer number; and controlling the phase between the first and second periods to control an ion energy distribution of the plasma formed in a process chamber.
摘要:
There is a need to provide simple, accurate, fast and computationally inexpensive methods of object and hand pose recognition for many applications. For example, to enable a user to make use of his or her hands to drive an application either displayed on a tablet screen or projected onto a table top. There is also a need to be able to discriminate accurately between events when a user's hand or digit touches such a display from events when a user's hand or digit hovers just above that display. A random decision forest is trained to enable recognition of hand poses and objects and optionally also whether those hand poses are touching or not touching a display surface. The random decision forest uses image features such as appearance, shape and optionally stereo image features. In some cases, the training process is cost aware. The resulting recognition system is operable in real-time.
摘要:
Existing remote workspace sharing systems are difficult to use. For example, changes made on a common work product by one user often appear abruptly on displays viewed by remote users. As a result the interaction is perceived as unnatural by the users and is often inefficient. Images of a display of a common work product are received from a camera at a first location. These images may also comprise information about objects between the display and the camera such as a user's hand editing a document on a tablet PC. These images are combined with images of the shared work product and displayed at remote locations. Advance information about remote user actions is then visible and facilitates collaborative mediation between users. Depth information may be used to influence the process of combining the images.
摘要:
Existing remote workspace sharing systems are difficult to use. For example, changes made on a common work product by one user often appear abruptly on displays viewed by remote users. As a result the interaction is perceived as unnatural by the users and is often inefficient. Images of a display of a common work product are received from a camera at a first location. These images may also comprise information about objects between the display and the camera such as a user's hand editing a document on a tablet PC. These images are combined with images of the shared work product and displayed at remote locations. Advance information about remote user actions is then visible and facilitates collaborative mediation between users. Depth information may be used to influence the process of combining the images.
摘要:
A method of segmenting image elements into a foreground and background is described, such that only the foreground elements are part of a volume of interest for stereo matching. This reduces computational burden as compared with computing stereo matching over the whole image. An energy function is defined using a probabilistic framework and that energy function approximated to require computation only over foreground disparities. An optimization algorithm is used on the energy function to perform the segmentation.