公开(公告)号：US08382999B2

公开(公告)日：2013-02-26

申请号：US12711061

申请日：2010-02-23

申请人： Ankur Agarwal ,  Kenneth S. Collins ,  Shahid Rauf ,  Kartik Ramaswamy ,  Thorsten B. Lill

发明人： Ankur Agarwal ,  Kenneth S. Collins ,  Shahid Rauf ,  Kartik Ramaswamy ,  Thorsten B. Lill

IPC分类号： G01L21/30 ,  G01R31/00

CPC分类号： H01L21/31116 ,  H01J37/32091 ,  H01J37/32165 ,  H01J37/32706

摘要： Radial distribution of etch rate is controlled by controlling the respective duty cycles of pulsed VHF source power applied to the ceiling and pulsed HF or MF bias power on the workpiece. Net average electrical charging of the workpiece is controlled by providing an electronegative process gas and controlling the voltage of a positive DC pulse on the workpiece applied during pulse off times of the pulsed VHF source power.

摘要翻译： 通过控制施加到天花板的脉冲VHF源功率和工件上的脉冲HF或MF偏置功率的相应占空比来控制蚀刻速率的径向分布。 通过提供电负性处理气体并控制在脉冲VHF源功率的脉冲关闭期间施加的工件上的正DC脉冲的电压来控制工件的净平均充电。

公开(公告)号：US20100248488A1

公开(公告)日：2010-09-30

申请号：US12711061

申请日：2010-02-23

申请人： Ankur Agarwal ,  Kenneth S. Collins ,  Shahid Rauf ,  Kartik Ramaswamy ,  Thorsten B. Lill

发明人： Ankur Agarwal ,  Kenneth S. Collins ,  Shahid Rauf ,  Kartik Ramaswamy ,  Thorsten B. Lill

IPC分类号： H01L21/3065

CPC分类号： H01L21/31116 ,  H01J37/32091 ,  H01J37/32165 ,  H01J37/32706

摘要： Radial distribution of etch rate is controlled by controlling the respective duty cycles of pulsed VHF source power applied to the ceiling and pulsed HF or MF bias power on the workpiece. Net average electrical charging of the workpiece is controlled by providing an electronegative process gas and controlling the voltage of a positive DC pulse on the workpiece applied during pulse off times of the pulsed VHF source power.

摘要翻译： 通过控制施加到天花板的脉冲VHF源功率和工件上的脉冲HF或MF偏置功率的相应占空比来控制蚀刻速率的径向分布。 通过提供电负性处理气体并控制在脉冲VHF源功率的脉冲关闭期间施加的工件上的正DC脉冲的电压来控制工件的净平均充电。

公开(公告)号：US08404598B2

公开(公告)日：2013-03-26

申请号：US12851606

申请日：2010-08-06

申请人： Bryan Liao ,  Katsumasa Kawasaki ,  Yashaswini Pattar ,  Sergio Fukuda Shoji ,  Duy D. Nguyen ,  Kartik Ramaswamy ,  Ankur Agarwal ,  Phillip Stout ,  Shahid Rauf

发明人： Bryan Liao ,  Katsumasa Kawasaki ,  Yashaswini Pattar ,  Sergio Fukuda Shoji ,  Duy D. Nguyen ,  Kartik Ramaswamy ,  Ankur Agarwal ,  Phillip Stout ,  Shahid Rauf

IPC分类号： H01L21/302

CPC分类号： C23F1/00 ,  H01J37/32082 ,  H01J37/32146 ,  H01J37/32165 ,  H01L21/31116

摘要： Methods for processing a substrate are provided herein. In some embodiments, a method of etching a dielectric layer includes generating a plasma by pulsing a first RF source signal having a first duty cycle; applying a second RF bias signal having a second duty cycle to the plasma; applying a third RF bias signal having a third duty cycle to the plasma, wherein the first, second, and third signals are synchronized; adjusting a phase variance between the first RF source signal and at least one of the second or third RF bias signals to control at least one of plasma ion density non-uniformity in the plasma or charge build-up on the dielectric layer; and etching the dielectric layer with the plasma.

公开(公告)号：US20130098555A1

公开(公告)日：2013-04-25

申请号：US13595612

申请日：2012-08-27

申请人： Kallol Bera ,  Shahid Rauf ,  Ankur Agarwal

发明人： Kallol Bera ,  Shahid Rauf ,  Ankur Agarwal

IPC分类号： H05H1/46

CPC分类号： H01J37/3233

摘要： In a plasma reactor employing a planar electron beam as a plasma source, the electron beam source chamber has an internal conductive fin that is profiled along a direction transverse to the beam propagation diction and parallel to the plane of the electron beam, in order to correct electron beam density distribution.

摘要翻译： 在采用平面电子束作为等离子体源的等离子体反应器中，电子束源室具有内部导电翅片，该内部导电翅片沿着横向于光束传播的方向并且平行于电子束的平面成型，以便校正 电子束密度分布。

公开(公告)号：US20150155193A1

公开(公告)日：2015-06-04

申请号：US14094601

申请日：2013-12-02

申请人： Chih-Hsun Hsu ,  Tza-Jing Gung ,  Benjamin Schwarz ,  Shahid Rauf ,  Ankur Agarwal ,  Vijay D. Parkhe ,  Michael D. Willwerth ,  Zhiqiang Guo

发明人： Chih-Hsun Hsu ,  Tza-Jing Gung ,  Benjamin Schwarz ,  Shahid Rauf ,  Ankur Agarwal ,  Vijay D. Parkhe ,  Michael D. Willwerth ,  Zhiqiang Guo

IPC分类号： H01L21/683 ,  H01L21/67

CPC分类号： H01L21/6833 ,  H01J37/3266 ,  H01J37/32715

摘要： Electrostatic chucks with variable pixelated magnetic field are described. For example, an electrostatic chuck (ESC) includes a ceramic plate having a front surface and a back surface, the front surface for supporting a wafer or substrate. A base is coupled to the back surface of the ceramic plate. A plurality of electromagnets is disposed in the base, the plurality of electromagnets configured to provide pixelated magnetic field tuning capability for the ESC.

摘要翻译： 描述了具有可变像素化磁场的静电卡盘。 例如，静电卡盘（ESC）包括具有前表面和后表面的陶瓷板，前表面用于支撑晶片或基板。 基座耦合到陶瓷板的背面。 多个电磁铁设置在基座中，多个电磁铁构造成为ESC提供像素化的磁场调谐能力。

公开(公告)号：US08980760B2

公开(公告)日：2015-03-17

申请号：US13442478

申请日：2012-04-09

申请人： Ankur Agarwal ,  Ajit Balakrishna ,  Shahid Rauf

发明人： Ankur Agarwal ,  Ajit Balakrishna ,  Shahid Rauf

IPC分类号： H01L21/302 ,  H05H1/46 ,  H01J37/32

CPC分类号： H05H1/46 ,  H01J37/32082 ,  H01J37/32137 ,  H01J37/32165 ,  H05H2001/4682

摘要： Methods and apparatus for controlling a plasma are provided herein. In some embodiments, a method may include supplying a first RF signal having a first frequency and a first period from an RF power source to a first electrode, wherein the first period is a first integer number of first cycles at the first frequency; supplying a second RF signal having a second frequency and a second period from the RF power source to the first electrode, wherein the second period is a second integer number of second cycles at the second frequency and wherein a first multiplicative product of the first frequency and the first integer number is equal to a second multiplicative product of the second frequency and the second integer number; and controlling the phase between the first and second periods to control an ion energy distribution of the plasma formed in a process chamber.

摘要翻译： 本文提供了用于控制等离子体的方法和装置。 在一些实施例中，一种方法可以包括从RF功率源向第一电极提供具有第一频率和第一周期的第一RF信号，其中第一周期是第一频率的第一整数个第一周期; 提供具有从RF电源到第一电极的第二频率和第二周期的第二RF信号，其中第二周期是第二频率的第二整数倍的第二周期，并且其中第一频率和第二频率的第一乘法乘积 第一整数等于第二频率和第二整数的第二乘法乘积; 以及控制第一和第二周期之间的相位，以控制在处理室中形成的等离子体的离子能量分布。

公开(公告)号：US08103109B2

公开(公告)日：2012-01-24

申请号：US11765264

申请日：2007-06-19

申请人： John Winn ,  Antonio Criminisi ,  Ankur Agarwal ,  Thomas Deselaers

发明人： John Winn ,  Antonio Criminisi ,  Ankur Agarwal ,  Thomas Deselaers

IPC分类号： G06K9/62

CPC分类号： G06K9/00355 ,  G06F3/017 ,  G06F3/0425 ,  G06K9/6282

摘要： There is a need to provide simple, accurate, fast and computationally inexpensive methods of object and hand pose recognition for many applications. For example, to enable a user to make use of his or her hands to drive an application either displayed on a tablet screen or projected onto a table top. There is also a need to be able to discriminate accurately between events when a user's hand or digit touches such a display from events when a user's hand or digit hovers just above that display. A random decision forest is trained to enable recognition of hand poses and objects and optionally also whether those hand poses are touching or not touching a display surface. The random decision forest uses image features such as appearance, shape and optionally stereo image features. In some cases, the training process is cost aware. The resulting recognition system is operable in real-time.

摘要翻译： 需要为许多应用提供简单，准确，快速和计算上便宜的对象和手姿态识别方法。 例如，为了使用户能够利用他或她的手来驱动显示在平板电脑屏幕上或投影到桌面上的应用程序。 当用户的手或数字在该显示器的正上方移动时，当用户的手或数字触发这样的显示时，还需要能够精确地区分事件之间的事件。 训练随机决策林以识别手姿势和物体，并且还可以选择性地确定那些手姿势是触摸还是不接触显示表面。 随机决策林使用图像特征，如外观，形状和可选的立体图像特征。 在某些情况下，培训过程是意识到成本。 所得到的识别系统可以实时操作。

公开(公告)号：US20080184124A1

公开(公告)日：2008-07-31

申请号：US11669107

申请日：2007-01-30

申请人： Ankur Agarwal ,  Antonio Criminisi ,  William Buxton ,  Andrew Blake ,  Andrew Fitzgibbon

发明人： Ankur Agarwal ,  Antonio Criminisi ,  William Buxton ,  Andrew Blake ,  Andrew Fitzgibbon

IPC分类号： G06F3/048

CPC分类号： G06Q10/10 ,  H04N7/15

摘要： Existing remote workspace sharing systems are difficult to use. For example, changes made on a common work product by one user often appear abruptly on displays viewed by remote users. As a result the interaction is perceived as unnatural by the users and is often inefficient. Images of a display of a common work product are received from a camera at a first location. These images may also comprise information about objects between the display and the camera such as a user's hand editing a document on a tablet PC. These images are combined with images of the shared work product and displayed at remote locations. Advance information about remote user actions is then visible and facilitates collaborative mediation between users. Depth information may be used to influence the process of combining the images.

摘要翻译： 现有的远程工作区共享系统很难使用。 例如，一个用户在公共工作产品上进行的更改通常会在远程用户查看的显示器上突然出现。 因此，互动被用户认为是不自然的，并且通常效率低下。 在第一位置从相机接收公共作品的显示的图像。 这些图像还可以包括关于显示器和相机之间的对象的信息，例如用户在平板PC上编辑文档的手。 这些图像与共享工作产品的图像组合，并在远程位置显示。 然后可以看到有关远程用户操作的高级信息，并促进用户之间的协作中介。 深度信息可以用于影响组合图像的过程。

公开(公告)号：US08514264B2

公开(公告)日：2013-08-20

申请号：US13406235

申请日：2012-02-27

申请人： Ankur Agarwal ,  Antonio Criminisi ,  William A. S. Buxton ,  Andrew Blake ,  Andrew William Fitzgibbon

发明人： Ankur Agarwal ,  Antonio Criminisi ,  William A. S. Buxton ,  Andrew Blake ,  Andrew William Fitzgibbon

IPC分类号： H04N7/15

CPC分类号： G06Q10/10 ,  H04N7/15

摘要： Existing remote workspace sharing systems are difficult to use. For example, changes made on a common work product by one user often appear abruptly on displays viewed by remote users. As a result the interaction is perceived as unnatural by the users and is often inefficient. Images of a display of a common work product are received from a camera at a first location. These images may also comprise information about objects between the display and the camera such as a user's hand editing a document on a tablet PC. These images are combined with images of the shared work product and displayed at remote locations. Advance information about remote user actions is then visible and facilitates collaborative mediation between users. Depth information may be used to influence the process of combining the images.

摘要翻译： 现有的远程工作区共享系统很难使用。 例如，一个用户在公共工作产品上进行的更改通常会在远程用户查看的显示器上突然出现。 因此，互动被用户认为是不自然的，并且通常效率低下。 在第一位置从相机接收公共作品的显示的图像。 这些图像还可以包括关于显示器和相机之间的对象的信息，例如用户在平板PC上编辑文档的手。 这些图像与共享工作产品的图像组合，并在远程位置显示。 然后可以看到有关远程用户操作的高级信息，并促进用户之间的协作中介。 深度信息可以用于影响组合图像的过程。

公开(公告)号：US08249333B2

公开(公告)日：2012-08-21

申请号：US12159960

申请日：2007-01-04

申请人： Ankur Agarwal ,  Andrew Blake

发明人： Ankur Agarwal ,  Andrew Blake

IPC分类号： G06K9/00 ,  G06K9/34

CPC分类号： G06T7/11 ,  G06T7/30 ,  G06T2207/10012 ,  G06T2207/20076

摘要： A method of segmenting image elements into a foreground and background is described, such that only the foreground elements are part of a volume of interest for stereo matching. This reduces computational burden as compared with computing stereo matching over the whole image. An energy function is defined using a probabilistic framework and that energy function approximated to require computation only over foreground disparities. An optimization algorithm is used on the energy function to perform the segmentation.

摘要翻译： 描述将图像元素分割成前景和背景的方法，使得只有前景元素是用于立体匹配的感兴趣体积的一部分。 与整个图像上的计算立体匹配相比，这减少了计算负担。 使用概率框架定义能量函数，并且能量函数近似于仅需要前景差异的计算。 能量函数使用优化算法进行分割。