公开(公告)号：US09785051B2

公开(公告)日：2017-10-10

申请号：US14435450

申请日：2013-09-17

Applicant: ASML Netherlands B.V.

Inventor： Jan Bernard Plechelmus Van Schoot ,  Sven Antoin Johan Hol ,  Edwin Johan Buis ,  Erik Maria Rekkers ,  Gosse Charles De Vries ,  Hako Botma ,  Marinus Johannes Maria Van Dam ,  Ramon Pascal Van Gorkom

IPC: G03F7/20 ,  G02B7/182 ,  H02K41/00 ,  G01C9/06 ,  H01F7/02 ,  H01F7/20 ,  H01H51/22

CPC classification number: G03F7/70091 ,  G01C9/06 ,  G01C2009/066 ,  G02B7/1821 ,  G03F7/70116 ,  H01F7/0231 ,  H01F7/206 ,  H01H2051/2218 ,  H02K41/00

Abstract: An actuator to displace, for example a mirror, provides movement with at least two degrees of freedom by varying the currents in two electromagnets. A moving part includes a permanent magnet with a magnetic face constrained to move over a working area lying substantially in a first plane perpendicular to a direction of magnetization of the magnet. The electromagnets have pole faces lying substantially in a second plane closely parallel to the first plane, each pole face substantially filling a quadrant of the area traversed by the face of the moving magnet. An optical position sensor may direct a beam of radiation at the moving magnet through a central space between the electromagnets. The sizes of facets in a pupil mirror device may be made smaller in a peripheral region, but larger in a central region, thereby relaxing focusing requirements.

公开(公告)号：US20150277233A1

公开(公告)日：2015-10-01

申请号：US14435450

申请日：2013-09-17

Applicant: ASML NETHERLANDS B.V.

Inventor： Jan Bernard Plechelmus Van Schoot ,  Sven Antoin Johan Hol ,  Edwin Johan Buis ,  Erik Maria Rekkers ,  Gosse Charles De Vries ,  Hako Botma ,  Marinus Johannes Maria Van Dam ,  Ramon Pascal Van Gorkom

IPC: G03F7/20 ,  H01F7/20 ,  G01C9/06 ,  H01F7/02

CPC classification number: G03F7/70091 ,  G01C9/06 ,  G01C2009/066 ,  G02B7/1821 ,  G03F7/70116 ,  H01F7/0231 ,  H01F7/206 ,  H01H2051/2218 ,  H02K41/00

Abstract: An actuator to displace, for example a mirror, provides movement with at least two degrees of freedom by varying the currents in two electromagnets. A moving part includes a permanent magnet with a magnetic face constrained to move over a working area lying substantially in a first plane perpendicular to a direction of magnetization of the magnet. The electromagnets have pole faces lying substantially in a second plane closely parallel to the first plane, each pole face substantially filling a quadrant of the area traversed by the face of the moving magnet. An optical position sensor may direct a beam of radiation at the moving magnet through a central space between the electromagnets. The sizes of facets in a pupil mirror device may be made smaller in a peripheral region, but larger in a central region, thereby relaxing focusing requirements.

Abstract translation: 移位的致动器，例如镜子，通过改变两个电磁体中的电流，提供具有至少两个自由度的运动。 移动部件包括具有被限制在基本上位于垂直于磁体的磁化方向的第一平面中的工作区域上移动的磁性面的永磁体。 电磁体具有基本上位于与第一平面紧密平行的第二平面中的极面，每个极面基本上填充由移动磁体的表面穿过的区域的象限。 光学位置传感器可以通过电磁体之间的中心空间来引导移动磁体上的辐射束。 瞳孔镜装置中的小平面的尺寸可以在外围区域中较小，但在中心区域较大，从而放松聚焦要求。