知搜-全球专利检索

  1. Login
  2. Sign Up

Search Results

92 records (took 0.024 seconds)

    Heated Plasma Flood Gun Sweeper
    2.
    发明申请
    Heated Plasma Flood Gun Sweeper 有权

    公开(公告)号：US20240371602A1

    公开(公告)日：2024-11-07

    申请号：US18143666

    申请日：2023-05-05

    Applicant: Applied Materials, Inc.

    Inventor： Frank Sinclair ,  Paul Joseph Murphy ,  Bon-Woong Koo ,  Gregory Edward Stratoti ,  Tseh-Jen Hsieh ,  Alexandre Likhanskii ,  Glenn Green

    IPC: H01J37/317 ,  H01J37/08 ,  H01J37/147

    Abstract: An ion implanter that includes an ion source to generate an ion beam, a platen disposed in a process chamber to support a workpiece that is treated with the ion beam, and a plasma flood gun that results in fewer particles in the process chamber is disclosed. The plasma flood gun includes at least one plasma chamber, each having at least one aperture through which low energy ions and electrons are emitted. A sweeper is located near the aperture, positioned so as to be between the aperture and the upstream components. The sweeper is heated using resistive elements or a halogen lamp so as to elevate its temperature, which limited the amount of deposition that occurs on the sweeper.

    Stiffened RF LINAC coil inductor with internal support structure
    5.
    发明授权
    Stiffened RF LINAC coil inductor with internal support structure 有权

    公开(公告)号：US11856685B2

    公开(公告)日：2023-12-26

    申请号：US17479313

    申请日：2021-09-20

    Applicant: Applied Materials, Inc.

    Inventor： Charles T. Carlson ,  Aaron P. Webb ,  Paul J. Murphy ,  Frank Sinclair ,  David Blahnik

    IPC: H05H7/22

    CPC classification number: H05H7/22

    Abstract: A coil inductor for use with a LINAC is disclosed. The coil inductor comprises one or more tubes, wherein each tube comprises an interior support structure to strengthen the tubes. By supporting the tube, the amount of vibration is reduced, allowing the coil to resonate at its natural frequency. In some embodiments, the interior structure comprises one or more interior walls. These interior walls may be used to create a plurality of fluid channels that allow the flow of coolant through the tubes. An end cap may be disposed on the second end of the tubes to allow fluid communication between the supply fluid channels and the return fluid channels. The first ends of the one or more tubes may be connected to a manifold that includes a supply port and a return port for the passage of coolant.

    Stiffened RF LINAC Coil Inductor With Internal Support Structure
    6.
    发明申请
    Stiffened RF LINAC Coil Inductor With Internal Support Structure 有权

    公开(公告)号：US20230089170A1

    公开(公告)日：2023-03-23

    申请号：US17479313

    申请日：2021-09-20

    Applicant: Applied Materials, Inc.

    Inventor： Charles T. Carlson ,  Aaron P. Webb ,  Paul J. Murphy ,  Frank Sinclair ,  David Blahnik

    IPC: H05H7/22

    Abstract: A coil inductor for use with a LINAC is disclosed. The coil inductor comprises one or more tubes, wherein each tube comprises an interior support structure to strengthen the tubes. By supporting the tube, the amount of vibration is reduced, allowing the coil to resonate at its natural frequency. In some embodiments, the interior structure comprises one or more interior walls. These interior walls may be used to create a plurality of fluid channels that allow the flow of coolant through the tubes. An end cap may be disposed on the second end of the tubes to allow fluid communication between the supply fluid channels and the return fluid channels. The first ends of the one or more tubes may be connected to a manifold that includes a supply port and a return port for the passage of coolant.

    System, apparatus and method for multi-frequency resonator operation in linear accelerator
    9.
    发明授权
    System, apparatus and method for multi-frequency resonator operation in linear accelerator 有权

    公开(公告)号：US11388810B2

    公开(公告)日：2022-07-12

    申请号：US17024295

    申请日：2020-09-17

    Applicant: Applied Materials, Inc.

    Inventor： Peter F. Kurunczi ,  David T. Blahnik ,  Frank Sinclair

    IPC: H05H7/22 ,  H01J37/317 ,  H05H9/00

    Abstract: An apparatus, system and method. An apparatus may include an RF power assembly, arranged to output an RF signal; a resonator, coupled to receive the RF signal, the resonator comprising a first output end and a second output end, and a drift tube assembly, configured to transmit an ion beam, and coupled to the resonator. As such, the drift tube assembly may include a first AC drift tube electrode, coupled to the first output end, and a second AC drift tube electrode, coupled to the second output end and separated from the first AC drift tube by a first gap. The RF power assembly may be switchable to switch output from a first Eigenmode frequency to a second Eigenmode frequency.

    Apparatus and system including high angle extraction optics
    10.
    发明授权
    Apparatus and system including high angle extraction optics 有权

    公开(公告)号：US11361935B2

    公开(公告)日：2022-06-14

    申请号：US17092250

    申请日：2020-11-07

    Applicant: Applied Materials, Inc.

    Inventor： Costel Biloiu ,  Jay R. Wallace ,  Kevin M. Daniels ,  Frank Sinclair ,  Christopher Campbell

    IPC: H01J37/08 ,  H01J37/32

    Abstract: An extraction plate for an ion beam system. The extraction plate may include an insulator body that includes a peripheral portion, to connect to a first side of a plasma chamber, and further includes a central portion, defining a concave shape. As such, an extraction aperture may be arranged along a first surface of the central portion, where the first surface is oriented at a high angle with respect to the first side. The extraction plate may further include a patterned electrode, comprising a first portion and a second portion, affixed to an outer side of the insulator body, facing away from the plasma chamber, wherein the first portion is separated from the second portion by an insulating gap.

Patent Agency Ranking