公开(公告)号：US20160083840A1

公开(公告)日：2016-03-24

申请号：US14863063

申请日：2015-09-23

Applicant: Applied Materials, Inc.

Inventor： PREETHAM RAO ,  Subramani Iyer ,  Kartik Shah ,  Mehran Behdjat

IPC: C23C16/458 ,  C23C16/46

CPC classification number: C23C16/4583 ,  C23C16/4581 ,  H01L21/67098 ,  H01L21/68785

Abstract: Embodiments described herein include a susceptor for semiconductor processing including an oriented graphite plate that may have a thickness of at least 1 mm. The susceptor may have a support member, and the oriented graphite plate may be disposed on the support member. The support member may have a center thermal conduit and an edge thermal conduit, and may be substantially solid between the center thermal conduit and the edge thermal conduit.

Abstract translation: 本文描述的实施例包括用于半导体处理的基座，其包括可以具有至少1mm的厚度的取向石墨板。 基座可以具有支撑构件，并且取向的石墨板可以设置在支撑构件上。 支撑构件可以具有中心热导管和边缘热导管，并且可以在中心热导管和边缘热导管之间基本上是固体的。

公开(公告)号：US20190018053A1

公开(公告)日：2019-01-17

申请号：US15649600

申请日：2017-07-13

Applicant: APPLIED MATERIALS, INC.

Inventor： ANANTHKRISHNA JUPUDI ,  YUEH SHENG OW ,  JACOB NEWMAN ,  PREETHAM RAO ,  YUICHI WADA ,  VINODH RAMACHANDRAN

IPC: G01R29/08 ,  H01L21/67 ,  H05B6/80 ,  H05B6/64

Abstract: An apparatus for relaying microwave field intensity in a microwave cavity. In some embodiments, the apparatus comprises a microwave transparent substrate with at least one Radio Frequency (RF) detector that is capable of detecting a microwave field and generating a signal associated with a field intensity of the detected microwave field and a transmitter that receives the signal associated with the detected microwave field from the RF detector and transmits or stores information about the detected microwave field intensity. In some embodiments, the apparatus relays the microwave intensity via a wired, wireless, or optical transmitter located in proximity of the RF detector.