Process and system for separation and recovery of perfluorocompound gases
    1.
    发明授权
    Process and system for separation and recovery of perfluorocompound gases 失效
    分离和回收全氟化合物气体的方法和系统

    公开(公告)号:US6444011B2

    公开(公告)日:2002-09-03

    申请号:US76826201

    申请日:2001-01-25

    摘要: Processes and systems to recover at least one perfluorocompound gas from a gas mixture are provided. In one embodiment the inventive process comprises the steps of a) providing a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, the gas mixture being at a predetermined pressure; b) providing at least once glassy polymer membrane having a feed side and a permeate side; c) contacting the feed side of the at least one membrane with the gas mixture; d) withdrawing from the feed side of the membrane as a non-permeate stream at a pressure which is substantially equal to the predetermined pressure a concentrated gas mixture comprising essentially the at least one perfluorocompound gas; and e) withdrawing from the permeate side of the membrane as a permeate stream a depleted gas mixture comprising essentially the at least one carrier gas.

    摘要翻译: 提供了从气体混合物中回收至少一种全氟化合物气体的方法和系统。 在一个实施方案中,本发明的方法包括以下步骤:a)提供包含至少一种全氟化合物气体和至少一种载气的气体混合物,所述气体混合物处于预定压力; b)提供至少一次具有进料侧和渗透侧的玻璃状聚合物膜; c)使至少一个膜的进料侧与气体混合物接触; d)以基本上等于预定压力的压力从作为非渗透物流的膜的进料侧排出基本上包含至少一种全氟化合物气体的浓缩气体混合物; 和e)作为渗透物流从膜的渗透侧排出基本上包含至少一种载气的贫化气体混合物。