Abstract:
In a pipe joint, a tapered male screw thread is provided at one end and a joint connection section which is connected to a joint section is provided at the other end. The tapered male screw thread has a length adapted so that, when the tapered male screw thread has been fastened to a tapered female screw thread formed in an end cap, the entire length is engaged with the tapered female screw thread, and the sealing effect is obtained by a seal member.
Abstract:
A plating apparatus 1 can perform plating processes by supplying plating liquids onto a surface of a substrate 2. The plating apparatus 1 includes a substrate rotating holder configured to hold and rotate the substrate 2; plating liquid supply units 29 and 30 configured to supply different kinds of plating liquids onto the surface of the substrate 2; a plating liquid drain unit 31 configured to drain out the plating liquids dispersed from the substrate 2 depending on the kinds of the plating liquids; and a controller 32 configured to control the substrate rotating holder 25, the plating liquid supply units 29 and 30, the plating liquid drain unit 31. While the substrate 2 is held and rotated, the plating processes are performed on the surface of the substrate 2 in sequence by supplying the different kinds of the plating liquids onto the surface of the substrate 2.
Abstract:
A cap metal forming method capable of obtaining a uniform film thickness on the entire surface of a substrate is provided. The method for forming a cap metal on a copper wiring formed on a processing target surface of a substrate includes: holding the substrate so as to be rotatable; rotating the substrate in a processing target surface direction of the substrate; locating an end portion of an agitation member so as to face the processing target surface of a periphery portion of the substrate with a preset gap maintained therebetween; supplying a plating processing solution onto the processing target surface; and stopping the supply of the plating processing solution and moving the agitation member such that the end portion of the agitation member is separated away from the processing target surface of the substrate.
Abstract:
Water vapor is mixed to O3 gas generated by an ozone generator of discharge type. The mixed fluid is cooled by a cooler, thereby impurities such as metals and nitrogen oxides contained in the O3 gas dissolve into condensed water. Subsequently, a gas-liquid separator separates the O3 gas from the condensed water. Water vapor is mixed with the O3 gas again. The mixed fluid passes through a metal trap composed of a container containing plural silicon chips as a metal adsorbent, thereby to remove the remaining metals therefrom.
Abstract:
A substrate processing method which removes an ArF resist film from a wafer having the ArF resist film. As an ultraviolet irradiation process is performed on the ArF resist film, and then an ozone gas and water vapor are fed to the ArF resist film, the ArF resist film is altered in a water-soluble state. Thereafter, the ArF resist film is removed from the substrate by feeding pure water to the ArF resist film altered into the water-soluble state.
Abstract:
The present invention relates to a first process for producing a 2,2-bis(fluoromethyl)-6-(perfluoroalkyl)-2H-1-benzopyran-4-carboxylic acid. The first process includes the steps of (a) reacting a 2,2-bis(fluoromethyl)-6-(perfluoroalkyl)-2H-1-benzopyran-4-one with a perfluoroalkanesulfonic acid anhydride in the presence of a base, thereby obtaining a perfluoroalkanesulfonic 2,2-bis(fluoromethyl)-6-(perfluoroalkyl)-2H- 1-benzopyran-4-yl ester; and (b) reacting the benzopyranyl ester with carbon monoxide in the presence of a palladium complex compound and a base, thereby obtaining the carboxylic acid. The present invention further relates to a second process for producing a 2-hydroxy-5-(perfluoroalkyl) acetophenone, which can be a raw material for producing the carboxylic acid. The second process includes the steps of (c) reacting a 4-(perfluoroalkyl)alkoxybenzene with acetic anhydride or an acyl halide in the presence of a Lewis acid, thereby obtaining a 2-alkoxy-5-(perfluoroalkyl)acetophenone; and (d) dealkylating the 2-alkoxy-5-(perfluoroalkyl) acetophenone by a dealkylating agent.
Abstract:
A circuit includes a substrate having a dielectric layer with a first surface and a second surface. A conductive layer is formed on the first surface. A beveled via is formed in a dielectric layer of the substrate. The via has a first opening of a first width in the first surface, and a second opening of a second width in the second surface, the second width being greater than the first width. A conductive plug is connected to the conductive layer. The plug is formed in the via and extends from adjacent the first opening toward the second opening, and terminates adjacent the second opening at a plug interface surface. A conductive solder ball is connected to the plug interface surface and extends to protrude from the second surface.
Abstract:
A target air amount for achieving a requested torque is back-calculated from the requested torque using a virtual air-fuel ratio. The virtual air-fuel ratio is changed from a first air-fuel ratio to a second air-fuel ratio in response to a condition for switching an operation mode from operation in the first air-fuel ratio to operation in the second air-fuel ratio being satisfied. After the virtual air-fuel ratio is changed from the first air-fuel ratio to the second air-fuel ratio, the target air-fuel ratio is changed in accordance with an air-fuel ratio efficiency within the range from the first air-fuel ratio to the second air-fuel ratio. The air-fuel ratio efficiency is calculated based on a proportion of the requested torque relative to a torque that can be achieved by means of a current estimated air amount under the theoretical air-fuel ratio and the optimal ignition timing.
Abstract:
An object of the present invention is to improve controllability over a supercharging pressure in a transient state, in a control device of an internal combustion engine equipped with a turbo supercharger that determines a manipulated variable of an actuator which acts on a rotational speed of a turbine by feedback control based on a deviation between a target state quantity and an actual state quantity. To this end, a control device according to the present invention determines an opening degree of a throttle by feedforward control based on a target intake air amount, and determines a manipulated variable of the actuator by feedback control based on a deviation between a target intake pressure determined from the target intake air amount and an actual intake pressure.
Abstract:
A pair of penetrating holes are formed along a longitudinal direction in the interior of a cylinder body that constitutes a fluid pressure cylinder. One end of the pair of penetrating holes is sealed by a pair of caps formed in plate-like shapes. The caps, for example, are formed by press molding a plate body made up from a metal material such as aluminum or the like. Outer edge portions of the caps include bent portions, which are inclined at a predetermined angle in a radial outward direction. In addition, the caps are installed by means of the bent portions biting into inner circumferential surfaces of the penetrating holes.