Planarized ceramic substrates
    3.
    发明授权
    Planarized ceramic substrates 失效
    平面化陶瓷基板

    公开(公告)号:US4761332A

    公开(公告)日:1988-08-02

    申请号:US937265

    申请日:1987-02-24

    Abstract: A method of planarizing or smoothing the surface of a ceramic substrate by deposition of a silicon nitride layer. The silicon nitride in addition to planarizing the surface forms an alpha particle barrier. The substrates suitable for planarization with silicon nitride in accordance with the method of the present invention are sintered oxide particles which are bonded with a silicon bonding phase. The silicon content of the silicon bonding phase is greater than the silicon content of the aggregate of the oxide particles. The silicon nitride is preferably deposited by plasma enhanced chemical vapor deposition, and the silicon bonding phase is preferably a glass.

    Abstract translation: 通过沉积氮化硅层来平坦化或平滑陶瓷衬底的表面的方法。 除了平坦化表面之外,氮化硅形成α粒子屏障。 根据本发明的方法适用于与氮化硅平面化的衬底是与硅键合相结合的烧结氧化物颗粒。 硅键合相的硅含量大于氧化物颗粒的聚集体的硅含量。 优选通过等离子体增强化学气相沉积来沉积氮化硅,并且硅键合相优选是玻璃。

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