Optical analyzer for measuring reflectivity of moving substrate
    1.
    发明授权
    Optical analyzer for measuring reflectivity of moving substrate 失效
    用于测量移动基板的反射率的光学分析仪

    公开(公告)号:US5768471A

    公开(公告)日:1998-06-16

    申请号:US567927

    申请日:1995-12-06

    IPC分类号: G01N21/55 G01N21/89

    CPC分类号: G01N21/55 G01N21/89

    摘要: An optical analyzer measuring the reflectivity of a moving article in an in-line sputtering deposition system. The optical analyzer includes a light source which provides a light beam. Light is reflected from an optical coating of a moving article into a concentrator, which captures and directs the reflected light to a detector. The analyzer may be mounted in an evacuable chamber in which the end walls have openings to allow passage of the article.

    摘要翻译: 测量在线溅射沉积系统中的移动物品的反射率的光学分析仪。 光学分析仪包括提供光束的光源。 光从移动物品的光学涂层反射成聚光器,其将捕获并将反射光引导到检测器。 分析器可以安装在可抽空的室中,其中端壁具有开口以允许物品通过。

    Sputtering apparatus
    2.
    发明授权
    Sputtering apparatus 有权
    溅射装置

    公开(公告)号:US08900428B2

    公开(公告)日:2014-12-02

    申请号:US13344871

    申请日:2012-01-06

    IPC分类号: C23C14/35 H01J37/34

    摘要: In one embodiment, a magnetron assembly comprises a plurality of magnets and a yoke configured to hold the plurality of magnets in at least four independent linear arrays. The plurality of magnets is arranged in the yoke so as to form a pattern comprising an outer portion and an inner portion. The outer portion substantially surrounds the perimeter of the inner portion. The magnets used to form the outer portion have a first polarity and the magnets used to form the inner portion having a second polarity. The outer portion of the pattern comprises a pair of elongated sections that are substantially parallel to one another. The outer portion of the pattern comprises a pair of turnaround sections, wherein each turnaround section substantially spans respective ends of the pair of elongated sections and wherein each turnaround section comprises a plurality of magnets having the first polarity. Other embodiments are described.

    摘要翻译: 在一个实施例中,磁控管组件包括多个磁体和配置成将多个磁体保持在至少四个独立的线性阵列中的磁轭。 多个磁铁布置在磁轭中,以形成包括外部部分和内部部分的图案。 外部部分基本上围绕内部的周边。 用于形成外部部分的磁体具有第一极性,并且用于形成具有第二极性的内部部分的磁体。 图案的外部部分包括基本上彼此平行的一对细长部分。 图案的外部部分包括一对转向部分,其中每个折回部分基本跨过该对细长部分的相应端部,并且其中每个周转部分包括具有第一极性的多个磁体。 描述其他实施例。

    Three variable optimization system for thin film coating design
    4.
    发明授权
    Three variable optimization system for thin film coating design 失效
    三变量优化系统薄膜涂层设计

    公开(公告)号:US5812405A

    公开(公告)日:1998-09-22

    申请号:US448233

    申请日:1995-05-23

    CPC分类号: G02B5/285 G02B27/0012

    摘要: A method and system for designing and manufacturing a high-performance, optimized optical interference coatings that have a minimal number of layers. Index of refraction, absorption coefficient, and thickness values are selected for each of the layers in the design so as to cause the reflectance of a coated object to be zero for a given wavelength. Materials that with the selected properties are manufactured by mixing two or more preexisting available materials.

    摘要翻译: 一种用于设计和制造具有最少层数的高性能,优化的光学干涉涂层的方法和系统。 对于设计中的每个层选择折射率,吸收系数和厚度值,以便使给定波长的涂覆物体的反射率为零。 具有所选性能的材料通过混合两种或多种预先存在的可用材料制造。

    System for evaluating thin film coatings
    5.
    发明授权
    System for evaluating thin film coatings 失效
    薄膜涂层评估系统

    公开(公告)号:US5772861A

    公开(公告)日:1998-06-30

    申请号:US541201

    申请日:1995-10-16

    IPC分类号: C23C14/54 C23C14/56

    摘要: A system for evaluating the reflectance of an object (e.g., a CRT) that is coated with an anti-reflective coating material is disclosed. The quality and/or uniformity of the coating is evaluated by a reflectometer. The reflectometer is positioned relative to the object by non-contact sensors. Reflectance data gathered by the reflectometer is analyzed to determine to what extent the actual coating differs from the optimal (i.e., ideal) coating. A feedback system modifies the coating process for subsequent objects in an attempt to fine-tune the coating process and achieve optimal anti-reflective coatings for later objects passing through the system.

    摘要翻译: 公开了一种用于评估涂覆有抗反射涂层材料的物体(例如CRT)的反射率的系统。 通过反射计评价涂层的质量和/或均匀性。 反射计通过非接触传感器相对于物体定位。 分析由反射计收集的反射率数据,以确定实际涂层在何种程度上与最佳(即理想)涂层不同。 反馈系统修改后续物体的涂覆过程,以试图微调涂层工艺,并为后续物体通过系统获得最佳的抗反射涂层。

    System for evaluating thin film coatings
    8.
    发明授权
    System for evaluating thin film coatings 失效
    薄膜涂层评估系统

    公开(公告)号:US6128087A

    公开(公告)日:2000-10-03

    申请号:US74843

    申请日:1998-05-08

    IPC分类号: C23C14/54 C23C14/56 G01B11/06

    摘要: A system for evaluating the reflectance of an object (e.g., a CRT) that is coated with an anti-reflective coating material is disclosed. The quality and/or uniformity of the coating is evaluated by a reflectometer. The reflectometer is positioned relative to the object by non-contact sensors. Reflectance data gathered by the reflectometer is analyzed to determine to what extent the actual coating differs from the optimal (i.e., ideal) coating. A feedback system modifies the coating process for subsequent objects in an attempt to fine-tune the coating process and achieve optimal anti-reflective coatings.

    摘要翻译: 公开了一种用于评估涂覆有抗反射涂层材料的物体(例如CRT)的反射率的系统。 通过反射计评价涂层的质量和/或均匀性。 反射计通过非接触传感器相对于物体定位。 分析由反射计收集的反射率数据,以确定实际涂层在何种程度上与最佳(即理想)涂层不同。 反馈系统改变后续物体的涂覆过程,以试图微调涂层工艺并实现最佳的抗反射涂层。

    Absorbing dichroic filters
    9.
    发明授权
    Absorbing dichroic filters 失效
    吸收二氯过滤器

    公开(公告)号:US5200855A

    公开(公告)日:1993-04-06

    申请号:US728882

    申请日:1991-07-12

    IPC分类号: G02B5/28

    CPC分类号: G02B5/285

    摘要: High purity (95-99.5 percent) red, orange and yellow filters are disclosed which comprise a periodic stack of relatively low index of refraction dielectric material (L) such as SiO.sub.2 or MgF.sub.2 and absorbing relatively high index material such as silicon or Fe.sub.2 O.sub.3. Together, the low and high index materials provide a high index ratio (typically 1.7 to 2.5). The filters are fabricated according to designs such as (H/2 L H/2).sup.n, typically using only 5 to 7 layers. Despite the very small layer count, these filters provide overall optical performance which is at least the equivalent of all-dielectric filters of 30 or more layers, with color purity that is unachievable by all-dielectric filters and simple low cost design. In addition, our filters have inherently low stress levels and absorb and reflect unwanted light such as blue light. As a consequence, the filters are ideally suited for coating on flexible substrates such as plastics and for coating on lamp envelopes to form red or yellow bulbs which are ideally suited, for example, for use as automobile tail light bulbs, side marker bulbs and turn signal bulbs.