公开(公告)号：US06784445B2

公开(公告)日：2004-08-31

申请号：US10033950

申请日：2001-12-28

申请人： Jürgen Ziegler ,  Reinhold Waller ,  Lothar Pfitzner ,  Claus Schneider ,  Heiner Ryssel ,  Volker Tegeder

发明人： Jürgen Ziegler ,  Reinhold Waller ,  Lothar Pfitzner ,  Claus Schneider ,  Heiner Ryssel ,  Volker Tegeder

IPC分类号： G01N2186

CPC分类号： B24B37/013 ,  C23C14/547 ,  C23C16/4407 ,  C23C16/52 ,  G01B11/0616 ,  H01J37/32935 ,  H01L22/26

摘要： The apparatus allows monitoring layer depositions in a process chamber. The apparatus has a light source, a sensor element, and at least one light detector. The sensor element is suitably configured in order to influence the intensity of the light beam measured by the detector by the thickness of the layer growing on the sensor element. The novel monitoring method for measuring the transmitted light intensity utilizes the apparatus. The sensor element has a continuous opening through which the intensity of the light is observed as a function of the opening grown over by the thickness of the growing layer.

摘要翻译： 该装置允许在处理室中监测层沉积。 该装置具有光源，传感器元件和至少一个光检测器。 传感器元件被适当地构造以便通过由传感器元件上生长的层的厚度来影响由检测器测量的光束的强度。 用于测量透射光强度的新型监测方法利用该装置。 传感器元件具有连续的开口，作为根据生长层的厚度生长的开口的函数，观察到光的强度。

公开(公告)号：US06732855B1

公开(公告)日：2004-05-11

申请号：US09658152

申请日：2000-09-08

申请人： Michael Lering ,  Volker Tegeder ,  Clinton Haris

发明人： Michael Lering ,  Volker Tegeder ,  Clinton Haris

IPC分类号： B65G1312

CPC分类号： H01L21/67706 ,  B65G13/065

摘要： A conveyor element (10) for conveying wafer receptacles between a conveyor (12) and a loading station (11) of a manufacturing system in the semiconductor industry has a lifting mechanism (13) to move the wafer receptacle from a first position of the conveyor (12) or the loading station (11) into a second position of the conveyor (12) or of the loading station (11) substantially in a vertical direction. Rollers (14) are provided to move the wafer receptacle from the second position of the conveyor (12) along a substantially horizontal direction to the second position of the loading station (11) or from the second position of the loading station (11) to the second position of the conveyor (12).

摘要翻译： 用于在半导体工业中的输送机（12）和制造系统的装载站（11）之间输送晶片容器的传送器元件（10）具有提升机构（13），以使晶片接收器从输送机的第一位置移动 （12）或装载站（11）基本上沿垂直方向进入输送机（12）或装载站（11）的第二位置。 提供辊（14）以将晶片接收器从输送机（12）的第二位置沿着基本上水平的方向移动到装载站（11）的第二位置或从装载站（11）的第二位置移动到 输送机（12）的第二位置。

公开(公告)号：US06884639B2

公开(公告)日：2005-04-26

申请号：US10262181

申请日：2002-09-30

申请人： James Dougan ,  Volker Tegeder

发明人： James Dougan ,  Volker Tegeder

IPC分类号： H01L21/00 ,  H01L21/673 ,  B23Q3/16 ,  B65G49/07

CPC分类号： H01L21/67775 ,  H01L21/67253 ,  H01L21/67379

摘要： A semiconductor wafer pod includes a measurement sensor configured within a housing. The sensor faces towards a surface of a wafer being accommodated in the pod. The pod can be connected to the conventional load-port of a semiconductor wafer manufacturing tool. Thereby, measurement data can be collected immediately after wafer processing without a need to transport the wafer. The invention enables the cost-effective development of tool-integrated metrology.

摘要翻译： 半导体晶片盒包括配置在壳体内的测量传感器。 传感器面向容纳在容器中的晶片的表面。 荚可以连接到半导体晶片制造工具的常规负载端口。 因此，可以在晶片处理之后立即收集测量数据，而不需要输送晶片。 本发明使得成本有效地开发了工具集成度量。

公开(公告)号：US06745637B2

公开(公告)日：2004-06-08

申请号：US10090259

申请日：2002-03-04

申请人： Volker Tegeder ,  Detlef Gerhard ,  Johannes Lechner ,  Eckhard Marx

发明人： Volker Tegeder ,  Detlef Gerhard ,  Johannes Lechner ,  Eckhard Marx

IPC分类号： G01N1900

CPC分类号： H01L21/67775 ,  H01L21/67253 ,  Y10S414/135

摘要： A metrology device is described which is couplable to a load port of a semiconductor product handling and/or processing tool. The tool encloses a mini-environmental atmosphere and has a load port table for supporting devices to be coupled to the load port. The metrology device contains a housing preserving an inner atmosphere, a coupling region for connecting the inner atmosphere to the mini-environmental atmosphere and a measuring device for measuring a property of a semiconductor product. The metrology device further has a support which is movable by a transport device and which is dimensioned such that the metrology device is self-supporting in a position appropriate for coupling the coupling region to the load port. The metrology device is thereby couplable to the load port without being supported by the load port table.

摘要翻译： 描述了可耦合到半导体产品处理和/或处理工具的负载端口的计量装置。 该工具包含迷你环境氛围，并具有一个负载端口台，用于支持要耦合到负载端口的设备。 测量装置包括保持内部空气的壳体，用于将内部空气连接到迷你环境气氛的耦合区域和用于测量半导体产品的性质的测量装置。 测量装置还具有可由运输装置移动的支撑件，其尺寸使得计量装置在适于将联接区域耦合到负载端口的位置自支撑。 因此，测量设备可以连接到负载端口，而不受负载端口表的支持。

公开(公告)号：US5632085A

公开(公告)日：1997-05-27

申请号：US554769

申请日：1995-11-07

申请人： Volker Tegeder

发明人： Volker Tegeder

IPC分类号： A61B5/00 ,  A61N1/05 ,  H01R43/20

CPC分类号： A61N1/056 ,  A61N1/05 ,  Y10T29/49208

摘要： A method for making an electrical contact for a vitreous carbon electrodes includes the steps of making a bore in an electrode blank of a cross-linked artificial resin forming the electrode blank into an electrode body. A solid or hollow pin, or a sleeve, composed of a biocompatible, refractory metal is introduced into the bore. If a pin is to be used, the bore is made to extend only partially into the electrode body, if a sleeve is used the bore extends completely through the body. The pin or sleeve has smaller dimensions than the bore; if a pin is used it projects from one side of the electrode body and if a sleeve is used it projects from both sides of the electrode body. The electrode blank is subjected to a pyrolysis, whereby the cross-linked artificial resin is converted into vitreous carbon and the electrode body shrinks onto the pin or sleeve.

摘要翻译： 用于制造玻璃碳电极的电接触的方法包括以下步骤：将形成电极坯料的交联人造树脂的电极坯体中的孔制成电极体。 将由生物相容性难熔金属组成的固体或中空销或套筒引入孔中。 如果要使用销，则使孔仅部分延伸到电极体中，如果使用套筒，则孔完全延伸通过本体。 销或套筒具有比孔更小的尺寸; 如果使用销，则从电极体的一侧突出，如果使用套筒，则从电极体的两侧突出。 对电极坯料进行热解，由此将交联的人造树脂转化为玻璃碳，并且电极体收缩到销或套筒上。