发明授权
US06732855B1 Conveying element and conveyor means for conveying wafer receptacles, and method
有权
用于输送晶片容器的输送元件和输送装置及方法
- 专利标题： Conveying element and conveyor means for conveying wafer receptacles, and method
- 专利标题（中）： 用于输送晶片容器的输送元件和输送装置及方法
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申请号： US09658152申请日： 2000-09-08
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公开(公告)号： US06732855B1公开(公告)日： 2004-05-11
- 发明人: Michael Lering , Volker Tegeder , Clinton Haris
- 申请人： Michael Lering , Volker Tegeder , Clinton Haris
- 主分类号： B65G1312
- IPC分类号： B65G1312
摘要：
A conveyor element (10) for conveying wafer receptacles between a conveyor (12) and a loading station (11) of a manufacturing system in the semiconductor industry has a lifting mechanism (13) to move the wafer receptacle from a first position of the conveyor (12) or the loading station (11) into a second position of the conveyor (12) or of the loading station (11) substantially in a vertical direction. Rollers (14) are provided to move the wafer receptacle from the second position of the conveyor (12) along a substantially horizontal direction to the second position of the loading station (11) or from the second position of the loading station (11) to the second position of the conveyor (12).
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