摘要:
This invention relates to an article having a substrate with a photocatalyst coating film formed thereon by ae sputtering method, characterized in that the photocatalyst coating film comprises titanium oxide as a main component and at least one kind of metal having a sputtering rate for Ar being 0.9 to 2.7 times that of Ti, preferably at least one kind of metal selected from the group consisting of Fe, V, Mo, Nb, Al and Cr, in an amount of 0.01 to 10 wt % in terms of the sum of such metals. The coating film is formed by a method using a Ti metal sputtering target or a Ti sub-oxide sputtering target containing the metal in an amount of 0.01 to 10 wt % in terms of the sum of such metals, or a method using two kinds of targets for two sputtering cathodes and applying reversing potential so as to have a cathode and an anode alternately.
摘要:
A method of film deposition is disclosed, which eliminates the conventional problem that a coating film having a component concentration gradient in the thickness direction and thus having a boundary with a compositional gradient or a coating film in which two or more components coexist as a mixture thereof cannot be stably obtained by sputtering. In the method, two planar cathodes are closely arranged as a pair, and a voltage is applied thereto while alternately inverting the polarities thereof so that when a target A bonded to one of the cathodes is used as a negative electrode, then a target B bonded to the other cathode and differing to the target A in component is used as a positive electrode. The targets A and B are simultaneously bombarded with positive ions while passing a substrate in front of the targets so as to cross the cathodes. Thus, a coating film having a boundary with a compositional gradient in the thickness direction or a coating film having a two-layer structure composed of a layer of ingredient A and a layer of ingredient B is deposited by sputtering through one-direction conveyance.
摘要:
A transparent touch panel substrate comprising a transparent substrate and deposited thereon a transparent conductive metal oxide film which contains zinc, indium, and tin as metallic elements and is soluble in acids. The transparent conductive metal oxide film preferably contains zinc in an amount of from 40 to 65 atomic % based on all metals and contains indium in an amount of from 0.25 to 1.3 times the amount of tin on an atomic basis. The film preferably has a thickness of from 100 to 160 nm. Unlike the conventional substrate for resistive film type transparent touch panels which comprises a glass plate coated with a transparent conductive ITO film, the touch panel substrate of the invention combines three properties: high light transmittance; ease of processing in forming a transparent electrode by acid etching; and the transparent conductive film has a moderate sheet resistance of from 500 to 5,000&OHgr;. It therefore realizes a touch panel which combines the three functions of having satisfactory display quality, being of the power-saving type, and enabling touch switch operations to be conducted without fail.
摘要:
A photocatalytic member which does not undergo heat treatment is provided. A photocatalyst layer is formed on the surface of a substrate through the intermediary of an undercoat layer. The main component of the undercoat layer is a crystalline zirconium compound, the photocatalyst layer is constituted of a crystalline phase, and the substrate has a low heat resistant element.
摘要:
A method for forming a zirconium compound film on a substrate by a sputtering process using a zirconium target which contains a metal (such as tin or zinc) of which the sputtering yield in an argon atmosphere is more than twice that of zirconium in place of a conventional metallic zirconium target. An article coated with the zirconium compound film and a sputtering target used for coating the film are provided. It is desirable that the content of the metal be 1-45 at %, but a third metal can be added thereto.
摘要:
An optical fiber collimator which facilitates optical adjustment. The optical fiber collimator includes a gradient index rod lens, and an optical fiber optically connected to the rod lens. An anti-reflection film is formed on one end face of the rod lens. The anti-reflection film has a refractive index which continuously changes from a value substantially equal to that of a center refractive index of the rod lens to a value substantially equal to that of the refractive index of the optical fiber along a film thickness direction of the anti-reflection film. A refractive index matching medium having a refractive index substantially equal to that of the optical fiber bonds the anti-reflection film to the end face of the optical fiber.
摘要:
An antibacterial substrate of the present invention includes a substrate and a plurality of antibacterial metal islands formed on the surface of the substrate. The antibacterial metal islands are exposed to an external atmosphere. The average value of contact angles between the substrate and the respective antibacterial metal islands is 90 degrees or less, as measured on the basis of results of surface observation with a scanning electron microscope.
摘要:
A member having high photocatalytic activity and multiple glass using the member are provided. A photocatalyst layer (TiO2) is formed on the surface of a substrate (glass sheet) through the intermediary of a crystalline undercoat layer (ZrO2), and no dead layer is substantially present between the photocatalyst layer and the undercoat layer. Also, provision of an amorphous layer between the substrate and the undercoat layer prevents peeling or defects between the photocatalyst layer and the substrate. In particular, by adjusting the thickness of each layer within a specific range, it is possible to obtain an article having a film configuration in which the optical feature of a reflection color, small variation of the reflectance, and a photocatalytic function are combined.
摘要:
A photocatalyst layer (TiO2) is formed on the surface of a substrate (glass plate) through the intermediary of a monoclinic undercoat layer (ZrO2), and no dead layer is substantially present between the photocatalyst layer and the undercoat layer. Also, by providing a peel preventing layer between the substrate and the undercoat layer, it is possible to eliminate film peeling between the photocatalyst layer and the substrate, defects and discoloration. In the above-described TiO2 layer, metal such as tin (Sn), zinc (Zn), molybdenum (Mo) or iron (Fe) is doped. The phrase “no dead layer is substantially present” means that the thickness of the dead layer is 20 nm or less. The thickness of the photocatalyst layer is preferably from 1 nm to 1,000 nm, more preferably from 1 nm to 500 nm.
摘要:
A method for forming a zirconium compound film on a substrate by a sputtering process using a zirconium target which contains a metal (such as tin or zinc) of which the sputtering yield in an argon atmosphere is more than twice that of zirconium in place of a conventional metallic zirconium target. An article coated with the zirconium compound film and a sputtering target used for coating the film are provided. It is desirable that the content of the metal be 1-45 at %, but a third metal can be added thereto.