公开(公告)号：US20080038917A1

公开(公告)日：2008-02-14

申请号：US11873936

申请日：2007-10-17

申请人： Timothy Dalton ,  Nicholas Fuller ,  Stephen Gates

发明人： Timothy Dalton ,  Nicholas Fuller ,  Stephen Gates

IPC分类号： H01L21/4763

CPC分类号： H01L21/0331 ,  H01L21/76811 ,  H01L23/5329 ,  H01L23/53295 ,  H01L2924/0002 ,  Y10T428/12576 ,  Y10T428/12611 ,  Y10T428/31667 ,  H01L2924/00

摘要： Interconnect structures possessing an organosilicate glass based material for 90 nm and beyond BEOL technologies in which a multilayer hardmask using a line-first approach are described. The interconnect structure of the invention achieves respective improved device/interconnect performance and affords a substantial dual damascene process window owing to the non-exposure of the OSG material to resist removal plasmas and because of the alternating inorganic/organic multilayer hardmask stack. The latter feature implies that for every inorganic layer that is being etched during a specific etch step, the corresponding pattern transfer layer in the field is organic and vice-versa.

公开(公告)号：US20070173071A1

公开(公告)日：2007-07-26

申请号：US11336726

申请日：2006-01-20

申请人： Ali Afzali-Ardakani ,  Stephen Gates ,  Alfred Grill ,  Deborah Neumayer ,  Son Nguyen ,  Vishnubhai Patel

发明人： Ali Afzali-Ardakani ,  Stephen Gates ,  Alfred Grill ,  Deborah Neumayer ,  Son Nguyen ,  Vishnubhai Patel

IPC分类号： H01L21/469 ,  H01L23/58

CPC分类号： H01L21/31695 ,  C23C16/401 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02216 ,  H01L21/02274 ,  H01L21/02304 ,  H01L21/02348 ,  H01L21/02362 ,  H01L21/7682 ,  H01L21/76829 ,  H01L21/76832 ,  H01L21/76834 ,  H01L23/5329 ,  H01L23/53295 ,  H01L2221/1047 ,  H01L2924/0002 ,  H01L2924/00

摘要： A porous composite material useful in semiconductor device manufacturing, in which the diameter (or characteristic dimension) of the pores and the pore size distribution (PSD) is controlled in a nanoscale manner and which exhibits improved cohesive strength (or equivalently, improved fracture toughness or reduced brittleness), and increased resistance to water degradation of properties such as stress-corrosion cracking, Cu ingress, and other critical properties is provided. The porous composite material is fabricating utilizing at least one bifunctional organic porogen as a precursor compound

摘要翻译： 可用于半导体器件制造的多孔复合材料，其中孔的直径（或特征尺寸）和孔径分布（PSD）以纳米级方式进行控制，并且其表现出改进的内聚强度（或等效地提高的断裂韧性或 降低脆性），并且提供了诸如应力腐蚀开裂，Cu进入和其它关键性能等性能的降低的耐水分性。 多孔复合材料是利用至少一种双功能有机致孔剂作为前体化合物制造的

公开(公告)号：US20060165891A1

公开(公告)日：2006-07-27

申请号：US11132108

申请日：2005-05-18

申请人： Daniel Edelstein ,  Stephen Gates ,  Alfred Grill ,  Michael Lane ,  Qinghuang Lin ,  Robert Miller ,  Deborah Neumayer ,  Son Nguyen

发明人： Daniel Edelstein ,  Stephen Gates ,  Alfred Grill ,  Michael Lane ,  Qinghuang Lin ,  Robert Miller ,  Deborah Neumayer ,  Son Nguyen

IPC分类号： C23C16/00 ,  B05D3/00

CPC分类号： H01L31/103 ,  Y10T428/31663

摘要： A low-k dielectric material with increased cohesive strength for use in electronic structures including interconnect and sensing structures is provided that includes atoms of Si, C, O, and H in which a fraction of the C atoms are bonded as Si—CH3 functional groups, and another fraction of the C atoms are bonded as Si—R—Si, wherein R is phenyl, —[CH2]n— where n is greater than or equal to 1, HC═CH, C≡CH2, C≡C or a [S]n linkage, where n is a defined above.

摘要翻译： 提供了一种用于包括互连和感测结构的电子结构中具有增强的内聚强度的低k介电材料，其包括Si，C，O和H的原子，其中C原子的一部分键合为Si-CH _{3个官能团，另外一部分C原子键合为Si-R-Si，其中R是苯基， - [CH 2 N] - 其中n大于或等于1，HC-CH，C≡CH2，C≡C或[S] n N连接，其中n是定义的 以上。}

公开(公告)号：US20050156285A1

公开(公告)日：2005-07-21

申请号：US10758724

申请日：2004-01-16

申请人： Stephen Gates ,  Christos Dimitrakopoulos ,  Alfred Grill ,  Son Nguyen

发明人： Stephen Gates ,  Christos Dimitrakopoulos ,  Alfred Grill ,  Son Nguyen

IPC分类号： H01L21/768 ,  C23C16/00 ,  C23C16/40 ,  C23C16/56 ,  H01L21/31 ,  H01L21/312 ,  H01L21/316 ,  H01L23/522 ,  H01L23/532 ,  H01L23/58

CPC分类号： H01L21/02126 ,  C23C16/401 ,  C23C16/56 ,  H01L21/02216 ,  H01L21/02274 ,  H01L21/02304 ,  H01L21/0234 ,  H01L21/02348 ,  H01L21/02351 ,  H01L21/02362 ,  H01L21/31633 ,  H01L23/5329 ,  H01L23/53295 ,  H01L2924/0002 ,  H01L2924/00

摘要： Dielectric materials including elements of Si, C, O and H having specific values of mechanical properties (tensile stress, elastic modulus, hardness cohesive strength, crack velocity in water) that result in a stable ultra low k film which is not degraded by water vapor or integration processing are provided. The dielectric materials have a dielectric constant of about 2.8 or less, a tensile stress of less than 45 MPa, an elastic modulus from about 2 to about 15 GPa, and a hardness from about 0.2 to about 2 GPa. Electronic structures including the dielectric materials of the present invention as well as various methods of fabricating the dielectric materials are also provided.

摘要翻译： 包含Si，C，O和H元素的介电材料具有机械性能（拉伸应力，弹性模量，硬度内聚强度，水中裂纹速度）的特定值，这导致稳定的超低k膜，其不被水蒸气降解 或集成处理。 电介质材料具有约2.8或更小的介电常数，小于45MPa的拉伸应力，约2至约15GPa的弹性模量和约0.2至约2GPa的硬度。 还提供了包括本发明的电介质材料的电子结构以及制造介电材料的各种方法。

公开(公告)号：US20050078087A1

公开(公告)日：2005-04-14

申请号：US10681796

申请日：2003-10-08

申请人： Stephen Gates ,  Jeremy Black

发明人： Stephen Gates ,  Jeremy Black

IPC分类号： G06F3/038 ,  G06K20060101 ,  G09G5/08

CPC分类号： G06F3/0383 ,  G06F1/32 ,  G06F1/3259 ,  G06F3/0227 ,  G06F3/03543 ,  G06F3/03547 ,  G06F3/038 ,  G06F3/04886 ,  G08C2201/63

摘要： A controlling device for operating a PC and one or more home appliances. The described controlling device has integrated mouse and remote control functions, and may be configured to automatically detect whether the controlling device is being used as a mouse or as a remote control. For effective operation in both control modes, the controlling device includes both RF and IR transmitters, and is configured to transition between these transmission mediums based on the detection of whether the controlling device is being used as a mouse or as a remote control.

摘要翻译： 一种用于操作PC和一个或多个家用电器的控制装置。 所描述的控制设备具有集成的鼠标和远程控制功能，并且可以被配置为自动检测控制设备是否被用作鼠标或作为遥控器。 为了在两种控制模式下有效地操作，控制装置包括RF和IR发射器，并且被配置为基于检测控制装置是否被用作鼠标或作为远程控制来在这些传输介质之间转换。

公开(公告)号：US20080118717A1

公开(公告)日：2008-05-22

申请号：US12018640

申请日：2008-01-23

申请人： Son Nguyen ,  Michael Lane ,  Stephen Gates ,  Xiao Liu ,  Vincent McGahay ,  Sanjay Mehta ,  Thomas Shaw

发明人： Son Nguyen ,  Michael Lane ,  Stephen Gates ,  Xiao Liu ,  Vincent McGahay ,  Sanjay Mehta ,  Thomas Shaw

IPC分类号： B32B3/00

CPC分类号： H01L21/3148 ,  H01L21/02126 ,  H01L21/02216 ,  H01L21/02274 ,  H01L21/3122 ,  H01L21/76807 ,  H01L21/76825 ,  H01L21/76826 ,  H01L21/76828 ,  H01L21/76832 ,  H01L23/53295 ,  H01L2924/0002 ,  Y10T428/24802 ,  H01L2924/00

摘要： The present invention provides a hardmask that is located on a surface of a low k dielectric material having at least one conductive feature embedded therein. The hardmask includes a lower region of a hermetic oxide material located adjacent to the low k dielectric material and an upper region comprising atoms of Si, C and H located above the hermetic oxide material. The present invention also provides a method of fabricating the inventive hardmask as well as a method to form an interconnect structure containing the same.

公开(公告)号：US20080042982A1

公开(公告)日：2008-02-21

申请号：US11657345

申请日：2007-01-24

申请人： Stephen Gates ,  Jeremy Black

发明人： Stephen Gates ,  Jeremy Black

IPC分类号： G06F3/041

CPC分类号： G06F3/0383 ,  G06F1/32 ,  G06F1/3259 ,  G06F3/0227 ,  G06F3/03543 ,  G06F3/03547 ,  G06F3/038 ,  G06F3/04886 ,  G08C2201/63

摘要： A device includes a sensor which generates a value representative of a position of the device relative to an object surface. The device then uses the value obtained from the sensor to automatically transition from a first state in which the input interface is enabled to a second state in which at least a portion of the input interface is inhibited.

摘要翻译： 一种装置包括一个传感器，该传感器产生代表装置相对于物体表面的位置的值。 然后，设备使用从传感器获得的值自动地从输入接口被启用的第一状态转换到禁止输入接口的至少一部分的第二状态。

公开(公告)号：US20060079099A1

公开(公告)日：2006-04-13

申请号：US10964254

申请日：2004-10-13

申请人： Son Nguyen ,  Stephen Gates ,  Deborah Neumayer ,  Alfred Grill

发明人： Son Nguyen ,  Stephen Gates ,  Deborah Neumayer ,  Alfred Grill

IPC分类号： H01L21/31 ,  H01L21/469

CPC分类号： C23C16/401 ,  H01L21/02126 ,  H01L21/02216 ,  H01L21/02274 ,  H01L21/02337 ,  H01L21/0234 ,  H01L21/02348 ,  H01L21/02351 ,  H01L21/02362 ,  H01L21/3122 ,  H01L21/31633 ,  H01L21/31695 ,  Y10T428/249921

摘要： A method for fabricating a SiCOH dielectric material comprising Si, C, O and H atoms from a single organosilicon precursor with a built-in organic porogen is provided. The single organosilicon precursor with a built-in organic porogen is selected from silane (SiH4) derivatives having the molecular formula SiRR1R2R3, disiloxane derivatives having the molecular formula R4R5R6—Si—O—Si—R7R8R9, and trisiloxane derivatives having the molecular formula R10R11R12—Si—O—Si—R13R14—O—Si—R15R16R17 where R and R1-17 may or may not be identical and are selected from H, alkyl, alkoxy, epoxy, phenyl, vinyl, allyl, alkenyl or alkynyl groups that may be linear, branched, cyclic, polycyclic and may be functionalized with oxygen, nitrogen or fluorine containing substituents. In addition to the method, the present application also provides SiCOH dielectrics made from the inventive method as well as electronic structures that contain the same.

摘要翻译： 提供了由具有内置有机致孔剂的单一有机硅前体制备包含Si，C，O和H原子的SiCOH电介质材料的方法。 具有内置有机致孔剂的单一有机硅前体选自具有分子式SiRR 1 R 2 R 2的硅烷（SiH 4 S 4）衍生物 3，具有分子式R 4的二硅氧烷衍生物R 5 S 6 -Si-O-Si-R 具有分子式R 10 R 11的三硅氧烷衍生物，其中R 1，R 2，R 3，R 3，R 4， SUP> R 12 -Si-O-Si-R 13 R 14 -O-Si-R 15 其中R和R 1-17可以相同也可以不相同，并且选自H，烷基，烷氧基，环氧基， 苯基，乙烯基，烯丙基，烯基或炔基，其可以是直链，支链，环状，多环并且可以被含氧，含氮或含氟的取代基官能化。 除了该方法之外，本申请还提供了由本发明方法制备的SiCOH电介质以及含有该SiCOH的电子结构。

公开(公告)号：US20050233597A1

公开(公告)日：2005-10-20

申请号：US11143793

申请日：2005-06-02

申请人： Matthew Colburn ,  Stephen Gates ,  Jeffrey Hedrick ,  Elbert Huang ,  Satyanarayana Nitta ,  Sampath Purushothaman ,  Muthumanickam Sankarapandian

发明人： Matthew Colburn ,  Stephen Gates ,  Jeffrey Hedrick ,  Elbert Huang ,  Satyanarayana Nitta ,  Sampath Purushothaman ,  Muthumanickam Sankarapandian

IPC分类号： H01L21/027 ,  B32B3/00 ,  G03F7/00 ,  G03F7/16 ,  G03F7/26 ,  H01L21/31 ,  H01L21/3105 ,  H01L21/469

CPC分类号： H05K3/0079 ,  H01L21/0331 ,  H01L21/76849 ,  H05K3/282 ,  H05K2203/1173 ,  Y10T428/24802

摘要： A method for forming a self aligned pattern on an existing pattern on a substrate comprising applying a coating of a solution containing a masking material in a carrier, the masking material having an affinity for portions of the existing pattern; and allowing at least a portion of the masking material to preferentially assemble to the portions of the existing pattern. The pattern may be comprised of a first set of regions of the substrate having a first atomic composition and a second set of regions of the substrate having a second atomic composition different from the first composition. The first set of regions may include one or more metal elements and the second set of regions may include a dielectric. The first and second regions may be treated to have different surface properties. Structures made in accordance with the method. Compositions useful for practicing the method.

摘要翻译： 一种用于在衬底上的现有图案上形成自对准图案的方法，包括在载体中涂覆含有掩蔽材料的溶液的涂层，所述掩模材料对现有图案的部分具有亲和力; 并且允许掩模材料的至少一部分优先组装到现有图案的部分。 该图案可以由具有第一原子组成的衬底的第一组区域和第二组衬底的区域组成，其具有不同于第一组成的第二原子组成。 第一组区域可以包括一个或多个金属元件，并且第二组区域可以包括电介质。 可以将第一和第二区域处理成具有不同的表面性质。 按照该方法制造的结构。 用于练习该方法的组合物。

公开(公告)号：US20050118039A1

公开(公告)日：2005-06-02

申请号：US10940546

申请日：2004-09-14

申请人： Adrian Shorten ,  Christopher McCrindle ,  Brian Knell ,  Stephen Gates

发明人： Adrian Shorten ,  Christopher McCrindle ,  Brian Knell ,  Stephen Gates

IPC分类号： F01C21/08 ,  F04C2/344 ,  F04B49/00 ,  F04B17/00

CPC分类号： F01C21/0827 ,  F04C2/3445

摘要： A roller vane pump for fluid includes a carrier which is rotatable in a housing about an axis of rotation, the carrier carrying a plurality of roller vanes which are each received in a respective slot which extends inwardly of a periphery of the carrier and permits the roller to move inwardly and outwardly in use, the housing surrounding the carrier, pumping chambers being formed between the rollers, the carrier and the housing, the rollers engaging with the housing and moving inwardly and outwardly of their respective slots as the carrier rotates, in response to the configuration of the housing so that the pumping chambers change in volume as the carrier rotates, to effect pumping of the fluid, from an inlet to an outlet of the pump, and wherein in each of the slots in which the rollers are received, there is provided a restrictor element which restricts movement of the roller inwardly of its respective slot.

摘要翻译： 用于流体的滚子叶片泵包括可围绕旋转轴线在壳体中旋转的载体，所述载体承载多个辊叶片，每个叶片各自容纳在相对于所述载体周边的内侧延伸的槽中，并允许所述滚筒 在使用中向内和向外移动，围绕载体的壳体，在辊，载体和壳体之间形成的泵送室，当载体旋转时，滚子与壳体接合并向其内侧和外侧移动，作为响应 关于壳体的构造，使得当载体旋转时，泵送室的体积变化，以实现从泵的入口到出口的流体的泵送，并且其中在每个容纳辊的槽中， 提供了一种限制器，其限制了其相应槽的内部的运动。