知搜-全球专利检索

  1. 登录
  2. 注册

搜索结果

22 条记录 (耗时 0.023 秒)

    Optical system and methods for monitoring erosion of electrostatic chuck edge bead materials
    1.
    发明授权
    Optical system and methods for monitoring erosion of electrostatic chuck edge bead materials 有权
    用于监测静电卡盘边缘珠材料侵蚀的光学系统和方法

    公开(公告)号：US07952694B2

    公开(公告)日：2011-05-31

    申请号：US12887829

    申请日：2010-09-22

    申请人： Bradley J. Howard ,  Eric Pape ,  Siwen Li

    发明人： Bradley J. Howard ,  Eric Pape ,  Siwen Li

    IPC分类号： G01J3/30 ,  G01N27/04

    CPC分类号： H01J37/32642 ,  H01J37/32935 ,  H01J37/32972 ,  H01J37/3299

    摘要： A disclosed device comprises an edge bonding seal configured to be mounted to an edge bead of the electrostatic chuck. The edge bonding seal includes a monitoring layer comprised of a first material configured to emit a species capable of being optically monitored. The edge bonding seal further includes an edge bonding layer configured to be interspersed at least between the monitoring layer and the plasma environment. The edge bonding layer is comprised of a second material susceptible to erosion due to reaction with the plasma environment and configured to expose the monitoring layer to the plasma environment upon sufficient exposure to the plasma environment.

    摘要翻译： 所公开的装置包括构造成安装到静电卡盘的边缘珠缘上的边缘接合密封件。 边缘接合密封件包括由构造成发射能够进行光学监测的物质的第一材料构成的监测层。 边缘接合密封件还包括边缘粘合层，其被配置为至少散布在监测层和等离子体环境之间。 边缘粘合层由与等离子体环境的反应易受侵蚀的第二材料组成，并且被配置为在充分暴露于等离子体环境时将监测层暴露于等离子体环境。

    Integrated dry gasification fuel cell system for conversion of soild carbonaceous fuels
    2.
    发明申请
    Integrated dry gasification fuel cell system for conversion of soild carbonaceous fuels 失效
    用于转化土壤碳质燃料的综合干燥气化燃料电池系统

    公开(公告)号：US20090004529A1

    公开(公告)日：2009-01-01

    申请号：US12215681

    申请日：2008-06-26

    申请人： Turgut M. Gur ,  Reginald E. Mitchell ,  Andrew C. Lee ,  Siwen Li

    发明人： Turgut M. Gur ,  Reginald E. Mitchell ,  Andrew C. Lee ,  Siwen Li

    IPC分类号： H01M8/10

    CPC分类号： H01M8/0625 ,  H01M8/04007 ,  H01M8/04097 ,  H01M8/0643 ,  H01M8/1233

    摘要： An integrated dry gas fuel cell (IDG-FC) is provided. The IDG-FC includes at least one solid oxide fuel cell having an anode, a cathode and an electrolyte membrane disposed between the anode and the cathode. The IDG-FC further includes a conversion bed, where carbon dioxide gas is provided to the conversion bed to convert carbon monoxide gas from the carbon dioxide gas. Solid carbonaceous fuel is provided to the conversion bed to promote the gas conversion. The carbon monoxide is provided as fuel to the anode, and air is supplied to the cathode to provide oxygen for oxidation of the carbon monoxide at the anode to generate electric power. This new process does not require water, and supplies the oxygen required for the oxidation reaction through an ionically selective solid oxide electrolyte membrane.

    摘要翻译： 提供集成的干气燃料电池（IDG-FC）。 IDG-FC包括至少一个具有设置在阳极和阴极之间的阳极，阴极和电解质膜的固体氧化物燃料电池。 IDG-FC还包括转化床，其中向转化床提供二氧化碳气体以转化来自二氧化碳气体的一氧化碳气体。 将固体碳质燃料提供给转化床以促进气体转化。 将一氧化碳作为燃料提供给阳极，并且向阴极供应空气以提供用于在阳极处一氧化碳氧化的氧气以产生电力。 该新方法不需要水，并通过离子选择性固体氧化物电解质膜供应氧化反应所需的氧气。

    OPTICAL SYSTEM AND METHODS FOR MONITORING EROSION OF ELECTROSTATIC CHUCK EDGE BEAD MATERIALS
    6.
    发明申请
    OPTICAL SYSTEM AND METHODS FOR MONITORING EROSION OF ELECTROSTATIC CHUCK EDGE BEAD MATERIALS 有权
    用于监测静电花边边缘材料腐蚀的光学系统和方法

    公开(公告)号：US20110007303A1

    公开(公告)日：2011-01-13

    申请号：US12887829

    申请日：2010-09-22

    申请人： Bradley J. Howard ,  Eric Pape ,  Siwen Li

    发明人： Bradley J. Howard ,  Eric Pape ,  Siwen Li

    IPC分类号： G01N21/00

    CPC分类号： H01J37/32642 ,  H01J37/32935 ,  H01J37/32972 ,  H01J37/3299

    摘要： A disclosed device comprises an edge bonding seal configured to be mounted to an edge bead of the electrostatic chuck. The edge bonding seal includes a monitoring layer comprised of a first material configured to emit a species capable of being optically monitored. The edge bonding seal further includes an edge bonding layer configured to be interspersed at least between the monitoring layer and the plasma environment. The edge bonding layer is comprised of a second material susceptible to erosion due to reaction with the plasma environment and configured to expose the monitoring layer to the plasma environment upon sufficient exposure to the plasma environment.

    摘要翻译： 所公开的装置包括构造成安装到静电卡盘的边缘珠缘上的边缘接合密封件。 边缘接合密封件包括由构造成发射能够进行光学监测的物质的第一材料构成的监测层。 边缘接合密封件还包括边缘粘合层，其被配置为至少散布在监测层和等离子体环境之间。 边缘粘合层由与等离子体环境的反应易受侵蚀的第二材料组成，并且被配置为在充分暴露于等离子体环境时将监测层暴露于等离子体环境。

    Plasma Processing Devices With Corrosion Resistant Components
    10.
    发明申请
    Plasma Processing Devices With Corrosion Resistant Components 审中-公开
    具有耐腐蚀组件的等离子体处理装置

    公开(公告)号：US20130160948A1

    公开(公告)日：2013-06-27

    申请号：US13370765

    申请日：2012-02-10

    申请人： Hong Shih ,  Lin Xu ,  Rajinder Dhindsa ,  John Daugherty ,  Yan Fang ,  Siwen Li

    发明人： Hong Shih ,  Lin Xu ,  Rajinder Dhindsa ,  John Daugherty ,  Yan Fang ,  Siwen Li

    IPC分类号： B05C5/02 ,  C23C16/50

    CPC分类号： C23C16/50 ,  C23C16/06 ,  C23C16/56

    摘要： In one embodiment, a plasma processing device may include a plasma processing chamber, a plasma region, an energy source, and a corrosion resistant component. The plasma processing chamber can be maintained at a vacuum pressure and can confine a plasma processing gas. The energy source can transmit energy into the plasma processing chamber and transform at least a portion of the plasma processing gas into plasma within the plasma region. The corrosion resistant component can be located within the plasma processing chamber. The corrosion resistant component can be exposed to the plasma processing gas and is not coincident with the plasma region. The corrosion resistant component may include an inner layer of stainless steel that is coated with an outer layer of Tantalum (Ta).

    摘要翻译： 在一个实施例中，等离子体处理装置可以包括等离子体处理室，等离子体区域，能量源和耐腐蚀部件。 等离子体处理室可以保持在真空压力并且可以限制等离子体处理气体。 能量源可以将能量传输到等离子体处理室中，并将至少一部分等离子体处理气体转化成等离子体区域内的等离子体。 耐腐蚀组分可位于等离子体处理室内。 耐腐蚀成分可暴露于等离子体处理气体中，与等离子体区域不一致。 耐腐蚀部件可以包括涂覆有钽（Ta）的外层的不锈钢内层。