INSPECTION DEVICE FOR BONDED WAFER USING LASER
    1.
    发明申请
    INSPECTION DEVICE FOR BONDED WAFER USING LASER 审中-公开
    使用激光的粘结波形检测装置

    公开(公告)号:US20120314212A1

    公开(公告)日:2012-12-13

    申请号:US13511112

    申请日:2010-11-22

    CPC classification number: G01N21/9505 G01N21/94 H01L22/12

    Abstract: Disclosed is a device for inspecting a bonded wafer using laser, which has a simple structure to facilitate an operation of the device and can detect an interface defect of the bonded wafer economically and highly reliably. To this end, the device for inspecting the bonded wafer using laser includes a laser unit, a laser diffusion unit, and a detection unit. If the device of inspecting the bonded wafer using laser according to the present invention is used, it is possible to advantageously inspect a wafer interface at a magnification desired by an inspector. In addition, the device has a simple structure, and thus it is advantageously easy to operate the device.

    Abstract translation: 公开了一种用于使用激光检查接合晶片的装置,其具有简单的结构以便于装置的操作并且可以经济地且高度可靠地检测接合晶片的界面缺陷。 为此,用激光单元,激光扩散单元和检测单元检测使用激光的接合晶片的装置。 如果使用根据本发明的使用激光的接合晶片的检查装置,则可以以检查者期望的放大率有利地检查晶片界面。 此外,该装置具有简单的结构,因此有利于操作该装置。

    Syringe-Shaped Culture Tube and Cell Culture Apparatus Using Same
    2.
    发明申请
    Syringe-Shaped Culture Tube and Cell Culture Apparatus Using Same 审中-公开
    注射器培养管和使用相同的细胞培养装置

    公开(公告)号:US20110287529A1

    公开(公告)日:2011-11-24

    申请号:US13120986

    申请日:2009-09-23

    CPC classification number: C12M27/10 C12M23/08

    Abstract: Disclosed are a syringe-shaped culture tube which has a wide surface area and is changeable by a user to a desired size, and a cell culture apparatus in which a plurality of the culture tubes are mounted. The cell culture apparatus allows a culture medium to constantly and smoothly contact the entire inner circumference of the culture tube and rotate by a rotation unit at a preset speed when the culture tube is filled with the culture medium. Thus, the cell culture apparatus can promote stirring and gas supply and increase the gas exchange rate. Also, it can reduce consumption of the culture medium.The cell culture apparatus according to the present disclosure includes: the culture tube with a culture space formed therein, wherein a vent hole through which the culture medium flows in and out of the culture space is formed at one or both ends of the culture tube and the inner diameter of which gradually tapers toward the outside at one end thereof is formed; a rotation support member with a plurality of the culture tubes horizontally mounted in a longitudinal direction that rotates around a rotation shaft formed at the center; and a rotation unit for rotating the rotation support member around the rotation shaft.

    Abstract translation: 公开了一种注射器状培养管,其具有宽的表面积并且可由使用者改变为期望的尺寸,以及其中安装有多个培养管的细胞培养装置。 细胞培养装置允许培养基在培养管填充有培养基时,以规定的速度使培养管的整个内周不间断地平滑地接触旋转单元。 因此,细胞培养装置可以促进搅拌和气体供应,并提高气体交换率。 此外,它可以减少培养基的消耗。 根据本公开的细胞培养装置包括:形成有培养空间的培养管,其中在培养管的一端或两端形成培养基流入和移出培养空间的通气孔, 形成其内径在其一端逐渐朝外的锥形; 旋转支撑构件,其具有沿着形成在中心的旋转轴旋转的纵向方向上水平安装的多个培养管; 以及用于使所述旋转支撑构件绕所述旋转轴旋转的旋转单元。

    INSPECTION METHOD FOR BONDED WAFER USING LASER
    3.
    发明申请
    INSPECTION METHOD FOR BONDED WAFER USING LASER 审中-公开
    使用激光的粘结波形检测方法

    公开(公告)号:US20110122403A1

    公开(公告)日:2011-05-26

    申请号:US12951665

    申请日:2010-11-22

    CPC classification number: G01N21/9505 G01N21/94

    Abstract: Provided is a bonded wafer inspection method using a laser method allowing a simple and reliable test in an examination of a bonded wafer interface using a laser. To do this, a laser used bonded wafer inspection method includes, emitting a laser beam through a laser means, diffusing the emitted laser beam by a laser diffusion means, illuminating the diffused laser beam on a bonded wafer, and detecting a laser beam illuminated and transmitted at the bonded wafer using a detecting means. In a case a bonded wafer inspection method using a laser of the invention is used, defects by a foreign substance occurring at an interface of a bonded wafer is can be examined in a simple way and thus high work performance may be expected.

    Abstract translation: 提供一种使用激光方法的接合晶片检查方法,其允许使用激光检查键合晶片界面的简单可靠的测试。 为此,使用激光使用的接合晶片检查方法包括:通过激光装置发射激光束,通过激光漫射装置漫射发射的激光束,照射粘合晶片上的漫射激光束,以及检测照射的激光束, 使用检测装置在接合晶片上传输。 在使用本发明的激光的接合晶片检查方法的情况下,可以以简单的方式检查在接合晶片的界面处发生的异物的缺陷,从而可以预期高的工作性能。

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