公开(公告)号：US08733170B2

公开(公告)日：2014-05-27

申请号：US12683888

申请日：2010-01-07

Applicant: Ernesto Lasalandra ,  Angelo Merassi ,  Sarah Zerbini

Inventor： Ernesto Lasalandra ,  Angelo Merassi ,  Sarah Zerbini

IPC: G01P15/08 ,  G01P21/00

CPC classification number: B81C1/0069 ,  B81B3/0081 ,  B81B2201/025 ,  B81C1/00158 ,  B81C1/00666 ,  G01C19/56 ,  G01C19/5755 ,  G01P1/006 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0814 ,  H03H9/02448 ,  H03H2009/02496 ,  Y10T29/43

Abstract: A micro-electromechanical device includes a semiconductor substrate, in which a first microstructure and a second microstructure of reference are integrated. The first microstructure and the second microstructure are arranged in the substrate so as to undergo equal strains as a result of thermal expansions of the substrate. Furthermore, the first microstructure is provided with movable parts and fixed parts with respect to the substrate, while the second microstructure has a shape that is substantially symmetrical to the first microstructure but is fixed with respect to the substrate. By subtracting the changes in electrical characteristics of the second microstructure from those of the first, variations in electrical characteristics of the first microstructure caused by changes in thermal expansion or contraction can be compensated for.

Abstract translation: 微机电装置包括半导体衬底，其中第一微结构和第二参考微结构被集成。 第一微结构和第二微结构被布置在基板中，以便由于基板的热膨胀而产生相等的应变。 此外，第一微结构相对于基板设置有可移动部件和固定部件，而第二微结构具有与第一微结构基本对称的形状，但是相对于基板固定。 通过从第一微结构的电特性减去第一微结构的电特性的变化，可以补偿由热膨胀或收缩的变化引起的第一微结构的电特性的变化。

公开(公告)号：US08661900B2

公开(公告)日：2014-03-04

申请号：US12014563

申请日：2008-01-15

Applicant: Angelo Antonio Merassi ,  Sarah Zerbini ,  Barbara Simoni

Inventor： Angelo Antonio Merassi ,  Sarah Zerbini ,  Barbara Simoni

IPC: G01P15/08

CPC classification number: B81B3/0051 ,  B81B2201/0235 ,  G01P15/0802 ,  G01P2015/0831

Abstract: In a microelectromechanical device, a mobile mass is suspended above a substrate via elastic suspension elements and is rotatable about said elastic suspension elements, a cover structure is set above the mobile mass and has an internal surface facing the mobile mass, and a stopper structure is arranged at the internal surface of the cover structure and extends towards the mobile mass in order to stop a movement of the mobile mass away from the substrate along an axis (z) transverse to the substrate. The stopper structure is arranged with respect to the mobile mass so as to reduce an effect of reciprocal electrostatic interaction, in particular so as to minimize a resultant twisting moment of the mobile mass about the elastic suspension elements.

Abstract translation: 在微机电装置中，移动物质通过弹性悬挂元件悬挂在基底上方并且可围绕所述弹性悬挂元件旋转，盖结构设置在移动质量块的上方并具有面向移动质量块的内表面，并且止动结构 布置在盖结构的内表面并朝着移动块延伸，以便沿横向于基底的轴线（z）停止移动块离开基底的运动。 止动器结构相对于移动物质布置，以便减少相互静电相互作用的影响，特别是使得可移动物体围绕弹性悬挂元件的最终扭转力矩最小化。

公开(公告)号：US08042396B2

公开(公告)日：2011-10-25

申请号：US12208980

申请日：2008-09-11

Applicant: Luca Coronato ,  Alessandro Balzelli Ludovico ,  Sarah Zerbini

Inventor： Luca Coronato ,  Alessandro Balzelli Ludovico ,  Sarah Zerbini

IPC: G01P9/04 ,  G01C19/00

CPC classification number: G01C19/5712 ,  G01P15/125 ,  G01P15/14 ,  G01P15/18 ,  G01P2015/0828

Abstract: A driving mass of an integrated microelectromechanical structure is moved with a rotary motion about an axis of rotation, and a sensing mass is connected to the driving mass via elastic supporting elements so as to perform a detection movement in the presence of an external stress. The driving mass is anchored to a first anchorage arranged along the axis of rotation by first elastic anchorage elements. The driving mass is also coupled to a pair of further anchorages positioned externally thereof and coupled to opposite sides with respect to the first anchorage by further elastic anchorage elements; the elastic supporting elements and the first and further elastic anchorage elements render the driving mass fixed to the first sensing mass in the rotary motion, and substantially decoupled from the sensing mass in the detection movement, the detection movement being a rotation about an axis lying in a plane.

Abstract translation: 集成微电子机械结构的驱动质量以围绕旋转轴线的旋转运动移动，并且感测质量块经由弹性支撑元件连接到驱动质量块，以便在存在外部应力的情况下执行检测运动。 驱动质量块被锚固到通过第一弹性锚固元件沿着旋转轴线布置的第一锚固件。 驱动质量体还连接到位于其外部的一对另外的锚固件，并且通过另外的弹性锚定元件相对于第一锚固件相对于相对侧联接; 弹性支撑元件和第一和另外的弹性锚固元件使得驱动质量在旋转运动中固定到第一感测块，并且在检测运动中基本上与感测质量分离，检测运动是围绕位于 一架飞机。

公开(公告)号：US20100158280A1

公开(公告)日：2010-06-24

申请号：US12644846

申请日：2009-12-22

Applicant: Luca Coronato ,  Sarah Zerbini ,  Angelo Antonio Merassi

Inventor： Luca Coronato ,  Sarah Zerbini ,  Angelo Antonio Merassi

IPC: H04R25/00 ,  H04R31/00

CPC classification number: B81C1/00182 ,  B81B3/0035 ,  B81B3/0072 ,  B81B2201/0257 ,  B81C1/00158 ,  H04R7/24 ,  H04R19/005 ,  H04R19/04 ,  H04R31/00 ,  Y10T29/49005

Abstract: A MEMS acoustic transducer, for example, a microphone, includes a substrate provided with a cavity, a supporting structure, fixed to the substrate, a membrane having a perimetral edge and a centroid, suspended above the cavity and fixed to the substrate the membrane configured to oscillate via the supporting structure. The supporting structure includes a plurality of anchorage elements fixed to the membrane, and each anchorage element is coupled to a respective portion of the membrane between the centroid and the perimetral edge of the membrane.

Abstract translation: MEMS声换能器，例如麦克风，包括设置有空腔的基板，固定到基板的支撑结构，具有周缘和质心的膜，悬挂在空腔上方并固定到基板上，膜构造 通过支撑结构振荡。 支撑结构包括固定在膜上的多个锚定元件，并且每个锚定元件在膜的质心和周边之间连接到膜的相应部分。

公开(公告)号：US07678599B2

公开(公告)日：2010-03-16

申请号：US11566590

申请日：2006-12-04

Applicant: Sarah Zerbini ,  Angelo Merassi ,  Guido Spinola Durante ,  Biagio De Masi

Inventor： Sarah Zerbini ,  Angelo Merassi ,  Guido Spinola Durante ,  Biagio De Masi

IPC: H01L21/00

CPC classification number: H01H1/0036 ,  G01P1/023 ,  G01P15/06 ,  G01P15/0802 ,  G01P15/0891 ,  G01P15/18 ,  G01P2015/0814 ,  H01H35/146

Abstract: A process for the fabrication of an inertial sensor with failure threshold includes the step of forming, on top of a substrate of a semiconductor wafer, a sample element embedded in a sacrificial region, the sample element configured to break under a preselected strain. The process further includes forming, on top of the sacrificial region, a body connected to the sample element and etching the sacrificial region so as to free the body and the sample element. The process may also include forming, on the substrate, additional sample elements connected to the body.

Abstract translation: 用于制造具有故障阈值的惯性传感器的方法包括在半导体晶片的衬底的顶部上形成嵌入在牺牲区域中的样品元件的步骤，所述样品元件构造成在预选应变下断裂。 该方法还包括在牺牲区域的顶部上形成连接到样品元件的主体并蚀刻牺牲区域以释放身体和样品元件。 该方法还可以包括在基底上形成连接到身体的附加样品元件。

公开(公告)号：US20080173959A1

公开(公告)日：2008-07-24

申请号：US12014563

申请日：2008-01-15

Applicant: Angelo Antonio Merassi ,  Sarah Zerbini ,  Barbara Simoni

Inventor： Angelo Antonio Merassi ,  Sarah Zerbini ,  Barbara Simoni

IPC: H01L29/84 ,  H01L21/00

CPC classification number: B81B3/0051 ,  B81B2201/0235 ,  G01P15/0802 ,  G01P2015/0831

Abstract: In a microelectromechanical device, a mobile mass is suspended above a substrate via elastic suspension elements and is rotatable about said elastic suspension elements, a cover structure is set above the mobile mass and has an internal surface facing the mobile mass, and a stopper structure is arranged at the internal surface of the cover structure and extends towards the mobile mass in order to stop a movement of the mobile mass away from the substrate along an axis (z) transverse to the substrate. The stopper structure is arranged with respect to the mobile mass so as to reduce an effect of reciprocal electrostatic interaction, in particular so as to minimize a resultant twisting moment of the mobile mass about the elastic suspension elements.

Abstract translation: 在微机电装置中，移动物质通过弹性悬挂元件悬挂在基底上方并且可围绕所述弹性悬挂元件旋转，盖结构设置在移动质量块的上方并具有面向移动质量块的内表面，并且止动结构 布置在盖结构的内表面并朝着移动块延伸，以便沿横向于基底的轴线（z）停止移动块离开基底的运动。 止动器结构相对于移动物质布置，以便减少相互静电相互作用的影响，特别是使得可移动物体围绕弹性悬挂元件的最终扭转力矩最小化。

公开(公告)号：US07252002B2

公开(公告)日：2007-08-07

申请号：US10948095

申请日：2004-09-23

Applicant: Sarah Zerbini ,  Angelo Merassi ,  Ernesto Lasalandra ,  Benedetto Vigna

Inventor： Sarah Zerbini ,  Angelo Merassi ,  Ernesto Lasalandra ,  Benedetto Vigna

IPC: G01P15/125

CPC classification number: G01P15/0891 ,  G01P15/125 ,  G01P2015/0857 ,  H04M2250/12

Abstract: A planar inertial sensor includes a first region and a second region of semiconductor material. The second region is capacitively coupled, and mobile with respect to the first region. The second region extends in a plane and has second portions, which face respective first portions of the first region. Movement of the second region, relative to the first region, in any direction belonging to the plane modifies the distance between the second portions and the first portions, which in turn modifies a value of the capacitive coupling.

Abstract translation: 平面惯性传感器包括第一区域和第二半导体材料区域。 第二区域电容耦合，并相对于第一区域移动。 第二区域在平面中延伸并且具有面对第一区域的相应第一部分的第二部分。 第二区域相对于第一区域在属于该平面的任何方向上的运动修改了第二部分和第一部分之间的距离，从而改变了电容耦合的值。

公开(公告)号：US06809907B1

公开(公告)日：2004-10-26

申请号：US09357442

申请日：1999-07-20

Applicant: Benedetto Vigna ,  Sarah Zerbini ,  Simone Sassolini ,  Carlo Menescardi

Inventor： Benedetto Vigna ,  Sarah Zerbini ,  Simone Sassolini ,  Carlo Menescardi

IPC: G11B2114

CPC classification number: G11B21/02 ,  H02N1/006

Abstract: A microactuator comprises a motor element including a stator and a rotor capacitively coupled to the stator; an actuator element having a circular structure; and a transmission structure interposed between the motor element and the actuator element to transmit a rotary movement of the motor element into a corresponding rotary movement of the actuator element. In particular, the transmission structure comprises a pair of transmission arms identical to each other, arranged symmetrically with respect to a symmetry axis of the microactuator. The transmission arms extend between two approximately diametrically opposed regions of the rotor to diametrically opposed regions of the actuator element.

Abstract translation: 微致动器包括电动机元件，其包括定子和电容耦合到定子的转子; 具有圆形结构的致动器元件; 以及插入在电动机元件和致动器元件之间以将电动机元件的旋转运动传递到致动器元件的相应旋转运动中的传动结构。 特别地，传动结构包括相对于微致动器的对称轴对称地布置的一对传动臂。 传动臂在转子的两个大致直径相对的区域之间延伸到致动器元件的径向相对的区域。

公开(公告)号：US06508124B1

公开(公告)日：2003-01-21

申请号：US09657294

申请日：2000-09-07

Applicant: Sarah Zerbini ,  Simone Sassolini ,  Benedetto Vigna

Inventor： Sarah Zerbini ,  Simone Sassolini ,  Benedetto Vigna

IPC: G01P1508

CPC classification number: B81B3/0072 ,  B81B2201/0235 ,  B81B2203/0109 ,  G01C19/5684 ,  G01P15/0888 ,  G01P15/125

Abstract: A microelectromechanical structure includes a rotor element having a barycentric axis and suspended regions arranged a distance with respect to the barycentric axis. The rotor element is supported and biased via a suspension structure having a single anchoring portion extending along the barycentric axis. The single anchoring portion is integral with a body of semiconductor material on which electric connections are formed.

Abstract translation: 微机电结构包括具有重心轴线的转子元件和相对于重心轴布置一定距离的悬置区域。 转子元件通过具有沿着重心轴线延伸的单个锚定部分的悬架结构被支撑和偏置。 单个锚定部分与其上形成有电连接的半导体材料体成一体。

公开(公告)号：US08413506B2

公开(公告)日：2013-04-09

申请号：US12626433

申请日：2009-11-25

Applicant: Luca Coronato ,  Gabriele Cazzaniga ,  Sarah Zerbini

Inventor： Luca Coronato ,  Gabriele Cazzaniga ,  Sarah Zerbini

IPC: G01C19/56

CPC classification number: G01C19/56 ,  G01C19/5712 ,  Y10T29/49002

Abstract: An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis.

Abstract translation: 集成的微机电结构设置有：具有衬底和框架的管芯，在其内部限定检测区域，并具有沿第一轴线延伸的第一侧面; 固定在基板上的驱动质量块，设置在检测区域中，并被设计成在垂直轴线的致动运动的平面内旋转; 以及第一对和第二对第一感测质量块，其通过弹性支撑元件悬挂在驱动质量块内，以便在致动运动中相对于其固定，以便执行从平面中的旋转检测移动 响应于第一角速度; 其中第一对的第一感测质量和第二对的第一感测质量体在相对于第一轴线具有相反符号的非零倾斜的相应方向上对齐。