公开(公告)号：US20100327864A1

公开(公告)日：2010-12-30

申请号：US12826330

申请日：2010-06-29

申请人： Benedetto Vigna ,  Simone Sassolini ,  Lorenzo Baldo ,  Francesco Procopio

发明人： Benedetto Vigna ,  Simone Sassolini ,  Lorenzo Baldo ,  Francesco Procopio

IPC分类号： G01R33/02

CPC分类号： G01C17/28 ,  B82Y25/00 ,  G01R33/093 ,  G01R33/096

摘要： A magnetoresistive element formed by a strip of magnetoresistive material which extends on a substrate of semiconductor material having an upper surface. The strip comprises at least one planar portion which extends parallel to the upper surface, and at least one transverse portion which extends in a direction transverse to the upper surface. The transverse portion is formed on a transverse wall of a dig. By providing a number of magnetoresistive elements perpendicular to one another it is possible to obtain an electronic compass that is insensitive to oscillations with respect to the horizontal plane parallel to the surface of the Earth.

摘要翻译： 一种由具有上表面的半导体材料的衬底上延伸的磁阻材料条形成的磁阻元件。 该条带包括平行于上表面延伸的至少一个平面部分和至少一个横向于上表面的方向延伸的横向部分。 横向部分形成在挖掘的横向壁上。 通过提供垂直于彼此的多个磁阻元件，可以获得对于平行于地球表面的水平面的振荡不敏感的电子罗盘。

公开(公告)号：US07399652B2

公开(公告)日：2008-07-15

申请号：US10821263

申请日：2004-04-08

申请人： Simone Sassolini ,  Mauro Marchi ,  Marco Del Sarto ,  Lorenzo Baldo

发明人： Simone Sassolini ,  Mauro Marchi ,  Marco Del Sarto ,  Lorenzo Baldo

IPC分类号： H01L21/58

CPC分类号： H01L21/76898 ,  B81B2201/033 ,  B81B2201/045 ,  B81C1/00484 ,  B81C1/00896 ,  B81C2201/019 ,  G02B6/357 ,  G02B6/3584

摘要： A method for manufacturing a micro-electro-mechanical device, which has supporting parts and operative parts, includes providing a first semiconductor wafer, having a first layer of semiconductor material and a second layer of semiconductor material arranged on top of the first layer, forming first supporting parts and first operative parts of the device in the second layer, forming temporary anchors in the first layer, and bonding the first wafer to a second wafer, with the second layer facing the second wafer. After bonding the first wafer and the second wafer together, second supporting parts and second operative parts of said device are formed in the first layer. The temporary anchors are removed from the first layer to free the operative parts formed therein.

摘要翻译： 一种具有支撑部件和操作部件的微电子机械装置的制造方法，包括提供具有第一半导体材料层的第一半导体晶片和配置在第一层顶部的第二半导体材料层，形成 在第二层中的装置的第一支撑部分和第一操作部分，在第一层中形成临时锚固件，以及将第一晶片结合到第二晶片，第二层面向第二晶片。 在将第一晶片和第二晶片接合在一起之后，所述器件的第二支撑部件和第二操作部分形成在第一层中。 将临时锚固件从第一层移除以释放其中形成的操作部件。

公开(公告)号：US07116525B2

公开(公告)日：2006-10-03

申请号：US10429266

申请日：2003-05-02

申请人： Marco Del Sarto ,  Mauro Marchi ,  Lorenzo Baldo ,  Simone Sassolini

发明人： Marco Del Sarto ,  Mauro Marchi ,  Lorenzo Baldo ,  Simone Sassolini

IPC分类号： G11B5/56

CPC分类号： G11B5/4826

摘要： A read/write assembly for magnetic hard disks includes at least: one supporting element; one read/write (R/W) transducer; one micro-actuator, set between the R/W transducer and the supporting element; one electrical-connection structure for connection to a remote device carried by the supporting element and connected to the R/W transducer and to the micro-actuator. In addition, a protective structure, set so as to cover the micro-actuator is made of a single piece with the electrical-connection structure.

公开(公告)号：US07258008B2

公开(公告)日：2007-08-21

申请号：US11317623

申请日：2005-12-22

申请人： Guido Spinola Durante ,  Simone Sassolini ,  Andrea Rusconi Clerici

发明人： Guido Spinola Durante ,  Simone Sassolini ,  Andrea Rusconi Clerici

IPC分类号： G01P9/04 ,  G01C19/00

CPC分类号： G01C19/5762 ,  G01C19/5747

摘要： An Integrated gyroscope includes a suspended mass; mobile actuation electrodes extending from the suspended mass; and a sensing mass connected to the actuation mass through coupling springs. The suspended mass is formed by an external part and an internal part, electrically separated by an electrical-insulation region having a closed annular shape. The electrical-insulation region is laterally completely surrounded by the external part and by the internal part. In one embodiment, the suspended mass has the shape of a closed frame delimiting an opening, the sensing mass is formed inside the opening and is connected to the internal part, and the mobile actuation electrodes are connected to the external part.

摘要翻译： 集成陀螺仪包括悬挂质量; 从悬浮物延伸的移动致动电极; 以及通过联接弹簧连接到致动质量块的感测质量。 悬挂质量由外部部分和内部部分形成，由具有闭合环形形状的电绝缘区域电隔离。 电绝缘区域由外部部分和内部部分横向完全包围。 在一个实施例中，悬挂质量具有限定开口的闭合框架的形状，感测质量形成在开口内部并且连接到内部部分，并且移动致动电极连接到外部部分。

公开(公告)号：US07239487B2

公开(公告)日：2007-07-03

申请号：US10601332

申请日：2003-06-20

申请人： Ubaldo Mastromatteo ,  Bruno Murari ,  Paolo Ferrari ,  Simone Sassolini

发明人： Ubaldo Mastromatteo ,  Bruno Murari ,  Paolo Ferrari ,  Simone Sassolini

IPC分类号： G11B5/56

CPC分类号： B81B3/0021 ,  H02N1/006

摘要： A micro-electro-mechanical device formed by a body of semiconductor material having a thickness and defining a mobile part and a fixed part. The mobile part is formed by a mobile platform, supporting arms extending from the mobile platform to the fixed part, and by mobile electrodes fixed to the mobile platform. The fixed part has fixed electrodes facing the mobile electrodes, a first biasing region fixed to the fixed electrodes, a second biasing region fixed to the supporting arms, and an insulation region of insulating material extending through the entire thickness of the body. The insulation region insulates electrically at least one between the first and the second biasing regions from the rest of the fixed part.

摘要翻译： 由具有厚度并限定可移动部分和固定部分的半导体材料体形成的微电子机械装置。 可移动部分由移动平台，从移动平台延伸到固定部分的支撑臂，以及固定到移动平台的移动电极形成。 固定部分具有面向移动电极的固定电极，固定到固定电极的第一偏置区域，固定到支撑臂的第二偏压区域以及延伸穿过主体整个厚度的绝缘材料的绝缘区域。 绝缘区域在第一和第二偏压区域之间至少一个与固定部件的其余部分绝缘。

公开(公告)号：US07009799B2

公开(公告)日：2006-03-07

申请号：US10161054

申请日：2002-05-30

申请人： Simone Sassolini ,  Benedetto Vigna

发明人： Simone Sassolini ,  Benedetto Vigna

IPC分类号： G11B5/60 ,  G11B21/12

CPC分类号： G11B5/6005 ,  G11B5/5552 ,  G11B5/5582

摘要： In an actuator device for hard disks a suspension element carries a slider that is subject to undesired vibrations which give rise to rotations of the slider with respect to a nominal position. An electrostatically controlled position-control structure is arranged between the suspension and the slider and is controlled in an active way so as to generate torsions of the platform that counter the undesired rotations. The position-control structure comprises a platform of conductive material and control electrodes arranged underneath the platform. The platform is connected to a load-bearing structure by spring elements that enable movements of roll and pitch. Four control electrodes are arranged according to the quadrants of a square and can be selectively biased for generating electrical forces acting on the platform.

公开(公告)号：US06587312B2

公开(公告)日：2003-07-01

申请号：US09792384

申请日：2001-02-22

申请人： Bruno Murari ,  Benedetto Vigna ,  Simone Sassolini

发明人： Bruno Murari ,  Benedetto Vigna ,  Simone Sassolini

IPC分类号： G11B555

CPC分类号： H02N1/008

摘要： An electrical connection structure having connection elements which electrically connect a movable part to a fixed part of a microelectromechanical device, for example a microactuator. The movable part and fixed part are separated by trenches and are mechanically connected by spring elements, which determine, together with the connection elements, the torsional rigidity of the microelectromechanical device. Each connection element is formed by multiple sub-arms connected in parallel and having a common movable anchorage region anchored to the movable part, and a common fixed anchorage region anchored to the fixed part, whereby the mechanical resistance of the connection elements is negligible. The sub-arms have a width equal to a sub-multiple of the width necessary in case of a single connection element for the latter to have a preset electrical resistance, which is determined in the design. In particular, the width of the sub-arms is at least equal to the width of the single connection element divided by the number of sub-arms.

摘要翻译： 一种电连接结构，其具有将可移动部件电连接到微机电装置例如微型致动器的固定部分的连接元件。 可移动部分和固定部分由沟槽分开，并通过弹簧元件机械连接，弹簧元件与连接元件一起确定微机电装置的扭转刚度。 每个连接元件由并联连接的多个子臂形成，并且具有锚定到可移动部分的公共可移动锚固区域，以及锚固到固定部分的公共固定锚固区域，由此连接元件的机械阻力可忽略不计。 子臂的宽度等于在单个连接元件的情况下所需的宽度的子倍数，以使后者具有在设计中确定的预设电阻。 特别地，子臂的宽度至少等于单个连接元件的宽度除以子臂的数量。

公开(公告)号：US06501623B1

公开(公告)日：2002-12-31

申请号：US09357078

申请日：1999-07-20

申请人： Simone Sassolini ,  Sarah Zerbini ,  Benedetto Vigna ,  Ubaldo Mastromatteo

发明人： Simone Sassolini ,  Sarah Zerbini ,  Benedetto Vigna ,  Ubaldo Mastromatteo

IPC分类号： G11B555

CPC分类号： G11B5/5552 ,  G11B5/11

摘要： A microactuator is attached to a first face of a coupling formed on a suspension, so that an R/W transducer projects from an opposite face. A hole in the coupling permits passage of an adhesive mass interposed between a rotor of the microactuator and the R/W transducer. A strip of adhesive material extends between a die accommodating the microactuator and the coupling, and externally surrounds the microactuator. The coupling acts as a protective shield for the microactuator, both mechanically and electrically. The coupling covers the microactuator at the front, and prevents foreign particles from blocking the microactuator. In addition, the coupling electrically insulates the R/W transducer, which is sensitive to magnetic fields, from regions of the microactuator biased to a high voltage. With the coupling, the strip forms a sealing structure, which in practice surrounds the microactuator on all sides.

摘要翻译： 微型致动器附接到形成在悬架上的联接器的第一面上，使得R / W传感器从相对的面突出。 联接器中的孔允许插入在微致动器的转子和R / W换能器之间的粘合剂块的通过。 一条粘合剂材料在容纳微型致动器的模具和联接器之间延伸，并且外部包围微型致动器。 联轴器作为微型致动器的机械和电气保护屏蔽。 联轴器覆盖前部的微型致动器，并防止外来颗粒堵塞微型致动器。 另外，该耦合将对磁场敏感的R / W传感器与微型制动器的偏压高电压绝缘。 通过联接，条带形成密封结构，实际上围绕着所有侧面上的微致动器。

公开(公告)号：US06391741B1

公开(公告)日：2002-05-21

申请号：US09616227

申请日：2000-07-14

申请人： Ubaldo Mastromatteo ,  Sarah Zerbini ,  Simone Sassolini ,  Benedetto Vigna

发明人： Ubaldo Mastromatteo ,  Sarah Zerbini ,  Simone Sassolini ,  Benedetto Vigna

IPC分类号： H01L2176

CPC分类号： G11B5/56 ,  B81C1/00896 ,  H01L2224/48091 ,  H01L2224/48472 ,  H01L2224/73204 ,  H01L2924/10253 ,  H01L2924/00014 ,  H01L2924/00

摘要： A process for assembling a microactuator on a R/W transducer that includes forming a first wafer of semiconductor material having a plurality of microactuators including suspended regions and fixed regions separated from each other by first trenches; forming a second wafer of semiconductor material comprising blocking regions connecting mobile and fixed intermediate regions separated from each other by second trenches; bonding the two wafers so as to form a composite wafer wherein the suspended regions of the first wafer are connected to the mobile intermediate regions of the second wafer, and the fixed regions of the first wafer are connected to the fixed intermediate regions of the second wafer; cutting the composite wafer into a plurality of units; fixing the mobile intermediate region of each unit to a respective R/W transducer; and removing the blocking regions. The blocking regions are made of silicon oxide, and the intermediate regions are made of polycrystalline silicon.

摘要翻译： 一种在R / W换能器上组装微致动器的方法，包括形成具有多个微致动器的半导体材料的第一晶片，所述多个微致动器包括通过第一沟槽彼此分离的悬置区域和固定区域; 形成第二半导体材料晶片，其包括通过第二沟槽彼此分开的连接移动和固定中间区域的阻挡区域; 键合两个晶片以形成复合晶片，其中第一晶片的悬置区域连接到第二晶片的移动中间区域，并且第一晶片的固定区域连接到第二晶片的固定中间区域 ; 将复合晶片切割成多个单元; 将每个单元的移动中间区域固定到相应的R / W换能器; 并去除阻挡区域。 阻挡区域由氧化硅制成，中间区域由多晶硅制成。

公开(公告)号：US08679887B2

公开(公告)日：2014-03-25

申请号：US13456990

申请日：2012-04-26

申请人： Simone Sassolini ,  Mauro Marchi ,  Marco Del Sarto ,  Lorenzo Baldo

发明人： Simone Sassolini ,  Mauro Marchi ,  Marco Del Sarto ,  Lorenzo Baldo

IPC分类号： H01L21/58

CPC分类号： H01L21/76898 ,  B81B2201/033 ,  B81B2201/045 ,  B81C1/00484 ,  B81C1/00896 ,  B81C2201/019 ,  G02B6/357 ,  G02B6/3584

摘要： A method for manufacturing a micro-electro-mechanical device, which has supporting parts and operative parts, includes providing a first semiconductor wafer, having a first layer of semiconductor material and a second layer of semiconductor material arranged on top of the first layer, forming first supporting parts and first operative parts of the device in the second layer, forming temporary anchors in the first layer, and bonding the first wafer to a second wafer, with the second layer facing the second wafer. After bonding the first wafer and the second wafer together, second supporting parts and second operative parts of said device are formed in the first layer. The temporary anchors are removed from the first layer to free the operative parts formed therein.

摘要翻译： 一种具有支撑部件和操作部件的微电子机械装置的制造方法，包括提供具有第一层半导体材料的第一半导体晶片和布置在第一层顶部的第二半导体材料层，形成 在第二层中的装置的第一支撑部分和第一操作部分，在第一层中形成临时锚固件，以及将第一晶片结合到第二晶片，第二层面向第二晶片。 在将第一晶片和第二晶片接合在一起之后，所述器件的第二支撑部件和第二操作部分形成在第一层中。 将临时锚固件从第一层移除以释放其中形成的操作部件。