公开(公告)号：US20070247617A1

公开(公告)日：2007-10-25

申请号：US11788027

申请日：2007-04-18

申请人： Peter Jann ,  Douglas Peale ,  Wafaa Abdalla

发明人： Peter Jann ,  Douglas Peale ,  Wafaa Abdalla

IPC分类号： G01N21/88

CPC分类号： G01N21/9506

摘要： An apparatus for detecting defects on a disk surface includes a light source that generates a light beam and an acoustic-optic deflector that continuously dithers the light beam transmitted by the light source back and forth, producing a dithered output beam. The apparatus also includes at least one lens that forms a scan line on a disk surface from the dithered output beam with the scan line generating multiple scans and a detector that detects scattered light from defects on the disk surface passing through the dithered output beam of the scan line.

摘要翻译： 用于检测盘表面上的缺陷的装置包括产生光束的光源和使来自光源的光束前后连续地抖动的声光偏转器，产生抖动输出光束。 该装置还包括至少一个透镜，其在来自抖动输出光束的盘表面上形成扫描线，扫描线产生多次扫描;以及检测器，其检测来自盘表面上的缺陷的散射光，穿过该光盘的抖动输出光束 扫描线。

公开(公告)号：US20050135655A1

公开(公告)日：2005-06-23

申请号：US11036722

申请日：2005-01-13

申请人： Anne Kopf-Sill ,  Andrea Chow ,  Peter Jann ,  Morten Jensen ,  Michael Spaid ,  Colin Kennedy ,  Michael Kennedy

发明人： Anne Kopf-Sill ,  Andrea Chow ,  Peter Jann ,  Morten Jensen ,  Michael Spaid ,  Colin Kennedy ,  Michael Kennedy

IPC分类号： B01L3/00 ,  B01L7/00 ,  B01L9/00 ,  G01N21/05 ,  G01N21/64 ,  G01N27/447 ,  G01N35/00 ,  G01N37/00 ,  G01L9/18

CPC分类号： G01N21/6452 ,  B01J2219/00605 ,  B01J2219/0061 ,  B01J2219/00612 ,  B01J2219/00621 ,  B01J2219/00628 ,  B01J2219/0063 ,  B01J2219/00659 ,  B01J2219/00707 ,  B01L3/5025 ,  B01L3/5027 ,  B01L3/502715 ,  B01L3/50273 ,  B01L7/54 ,  B01L9/527 ,  B01L2200/023 ,  B01L2200/027 ,  B01L2200/028 ,  B01L2200/147 ,  B01L2300/0654 ,  B01L2300/0816 ,  B01L2300/0829 ,  B01L2300/0867 ,  B01L2300/1822 ,  B01L2400/0406 ,  B01L2400/0415 ,  B01L2400/0487 ,  G01N21/05 ,  G01N21/6428 ,  G01N21/645 ,  G01N27/44721 ,  G01N27/44782 ,  G01N35/0099 ,  G01N2021/0346 ,  G01N2021/6419 ,  G01N2021/6421

摘要： Analytical systems and methods that use a modular interface structure for providing an interface between a sample substrate and an analytical unit, where the analytical unit typically has a particular interface arrangement for implementing various analytical and control functions. Using a number of variants for each module of the modular interface structure advantageously provides cost effective and efficient ways to perform numerous tests using a particular substrate or class of substrates with a particular analytical and control systems interface arrangement. Improved optical illumination and detection system for simultaneously analyzing reactions or conditions in multiple parallel microchannels are also provided. Increased throughput and improved emissions detection is provided by the present invention by simultaneously illuminating multiple parallel microchannels at a non-normal incidence using an excitation beam including multiple excitation frequencies, and simultaneously detecting emissions from the substances in the microchannels in a direction normal to the substrate using a detection module with multiple detectors.

摘要翻译： 分析系统和方法使用模块化接口结构来提供样品基底和分析单元之间的界面，其中分析单元通常具有用于实现各种分析和控制功能的特定界面布置。 使用模块化接口结构的每个模块的许多变体有利地提供了使用具有特定分析和控制系统接口布置的特定基板或类别的基板执行大量测试的成本有效和有效的方式。 还提供了用于同时分析多个并行微通道中的反应或条件的改进的光学照明和检测系统。 通过使用包括多个激发频率的激发束同时照射非法线入射的多个平行微通道并且同时在垂直于衬底的方向上检测来自微通道中的物质的发射，本发明提供了增加的吞吐量和改进的排放物检测 使用具有多个检测器的检测模块。