公开(公告)号：US5651867A

公开(公告)日：1997-07-29

申请号：US591935

申请日：1990-10-02

申请人： Yuichi Kokaku ,  Hiroyuki Kataoka ,  Makoto Kitoh ,  Shigehiko Fujimaki ,  Satoshi Matsunuma ,  Kenji Furusawa ,  Nobuo Nakagawa ,  Katsuo Abe ,  Masaaki Hayashi

发明人： Yuichi Kokaku ,  Hiroyuki Kataoka ,  Makoto Kitoh ,  Shigehiko Fujimaki ,  Satoshi Matsunuma ,  Kenji Furusawa ,  Nobuo Nakagawa ,  Katsuo Abe ,  Masaaki Hayashi

IPC分类号： C23C14/34 ,  C23C14/56 ,  C23C16/509 ,  G11B5/84 ,  G11B5/851 ,  H01J37/32

CPC分类号： H01J37/32623 ,  C23C14/566 ,  C23C16/5096 ,  G11B5/84 ,  G11B5/851 ,  H01J37/32743

摘要： A plasma processing apparatus comprising: a vacuum container; an evacuation means for keeping the interior of the vacuum container at a pressure not higher than atmospheric pressure; a substrate support device for supporting a substrate to be subjected to plasma processing; an electrode for generating plasma in cooperation with the substrate support; a voltage supply for applying a voltage to the electrode; a gas introducing system for introducing a gaseous material into a space where the plasma is produced; a surrounding member for enclosing the space above the substrate support, and a drive for relatively moving the surrounding member to space an end of the surrounding member proximate from the substrate from at least one of the substrate support and the substrate supported thereon by a distance which is short enough to suppress plasma leakage during the plasma processing and to position the end of the surrounding member away from said at least one of the substrate support and the substrate thereon for charging and discharging of the substrate.

摘要翻译： 一种等离子体处理装置，包括：真空容器; 用于将真空容器的内部保持在不高于大气压的压力的排气装置; 用于支撑待进行等离子体处理的基板的基板支撑装置; 用于与衬底支撑件协作产生等离子体的电极; 用于向电极施加电压的电压源; 用于将气态物质引入制造等离子体的空间中的气体导入系统; 用于封闭衬底支撑件上方的空间的周围构件以及用于相对移动周围构件的驱动器，用于将基板支撑件和支撑在其上的衬底中的至少一个上的衬底附近的邻近基板的一端远离一定距离， 足够短以抑制等离子体处理期间的等离子体泄漏并且使周围部件的端部远离所述至少一个基板支撑件和其上的基板，以对基板进行充电和放电。

公开(公告)号：US4444635A

公开(公告)日：1984-04-24

申请号：US400258

申请日：1982-07-21

申请人： Shigeru Kobayashi ,  Nobuo Nakagawa ,  Katsuo Abe ,  Tsuneaki Kamei ,  Kazuyuki Fujimoto

发明人： Shigeru Kobayashi ,  Nobuo Nakagawa ,  Katsuo Abe ,  Tsuneaki Kamei ,  Kazuyuki Fujimoto

IPC分类号： C23C14/35 ,  H01J37/34 ,  C23C15/00

CPC分类号： C23C14/3492 ,  C23C14/35 ,  H01J37/3408 ,  H01J37/3429 ,  H01J37/3458

摘要： A film forming method by plasma sputtering is provided to attain a composite film on a substrate. A target plate having metal materials in a different pattern is prepared in opposition to the substrate. A plasma is created by a planar magnetron sputtering electrode structure. The plasma is shifted magnetically on the target plate by at least three magnetically coupled magnetic poles to deposit the materials into a film with a uniform thickness and a desired composition on the substrate.

摘要翻译： 提供通过等离子体溅射的成膜方法以在基板上获得复合膜。 制备具有不同图案的金属材料的靶板，与基底相对。 通过平面磁控溅射电极结构产生等离子体。 等离子体通过至少三个磁耦合磁极在目标板上磁性地移动，以将材料沉积到具有均匀厚度的膜和基底上所需的组成。

公开(公告)号：US4430387A

公开(公告)日：1984-02-07

申请号：US206175

申请日：1980-11-12

申请人： Nobuo Nakagawa ,  Yoshiki Kato ,  Katsuo Abe ,  Takao Edamura ,  Takao Nakamura

发明人： Nobuo Nakagawa ,  Yoshiki Kato ,  Katsuo Abe ,  Takao Edamura ,  Takao Nakamura

IPC分类号： G11B5/66 ,  C23C14/00 ,  C23C14/08 ,  C23C14/16 ,  C23C14/20 ,  C23C14/24 ,  C23C14/58 ,  G11B5/73 ,  G11B5/738 ,  G11B5/82 ,  G11B5/84 ,  G11B5/85 ,  B21C1/00

CPC分类号： G11B5/85 ,  C23C14/16 ,  C23C14/20 ,  C23C14/5806 ,  C23C14/5853 ,  C23C14/5886 ,  G11B5/7315 ,  G11B5/7325 ,  Y10S205/922 ,  Y10T428/12243 ,  Y10T428/1259 ,  Y10T428/12639 ,  Y10T428/12743 ,  Y10T428/12757 ,  Y10T428/12764 ,  Y10T428/12778 ,  Y10T428/12806 ,  Y10T428/24975 ,  Y10T428/31 ,  Y10T428/31507 ,  Y10T428/31605

摘要： A base plate for magnetic recording disc is produced by coating thin metal layers containing no impurities for forming defects by an anodizing treatment on one or both sides of a discoid substrate made of a metal such as aluminum or an aluminum alloy or from a plastic by a dry process, and anodizing the thin metal layers so as to form anodized film from the surfaces of the thin metal layers to a certain depth while the portions contacting to the substrate are retained not anodized.

摘要翻译： 通过在由诸如铝或铝合金的金属制成的盘状基板的一面或两面上通过阳极氧化处理来涂覆不含杂质的薄金属层来制造磁记录盘的基板，或者由塑料 干法和阳极氧化薄金属层，以便从薄金属层的表面形成阳极氧化膜至一定深度，而与基底接触的部分保持不被阳极氧化。

公开(公告)号：US4303443A

公开(公告)日：1981-12-01

申请号：US159231

申请日：1980-06-13

申请人： Osamu Miyazawa ,  Hitoshi Oka ,  Isamu Tanaka ,  Akira Matsuo ,  Hitoshi Yokono ,  Nobuo Nakagawa ,  Tokio Isogai

发明人： Osamu Miyazawa ,  Hitoshi Oka ,  Isamu Tanaka ,  Akira Matsuo ,  Hitoshi Yokono ,  Nobuo Nakagawa ,  Tokio Isogai

IPC分类号： C23C18/40 ,  C23C3/02

CPC分类号： C23C18/40

摘要： When an amine compound having at least two polyolefin glycol chains in one molecule is used as a stabilizer, and an alkylene diamine compound, at least one hydrogen atom in the respective amino groups thereof being substituted by CH.sub.2 COOX (wherein X is H or Na) and another hydrogen atom in the respective amino group thereof being substituted by CH.sub.2 OH, is used as a complexing agent for cupric ions and a nitrogen-containing cyclic compound is used as a complexing agent for cuprous ions in an electroless copper plating solution comprising water, a water-soluble copper salt, a complexing agent for cupric ions, a reducing agent, a pH-controlling agent and a stabilizer, or an electroless copper plating solution comprising water, a water-soluble copper salt, a complexing agent for cupric ions, a reducing agent, a pH-controlling agent, a stabilizer and a complexing agent for cuprous ions, the plating rate of the electroless copper plating solution, mechanical strength of plating film, and stability of the plating solution are improved.

摘要翻译： 当使用在一个分子中具有至少两个聚烯烃二醇链的胺化合物作为稳定剂和亚烷基二胺化合物时，其各氨基中的至少一个氢原子被CH 2 COOX（其中X是H或Na）取代，和 在其氨基中的另一个氢原子被CH 2 OH取代，用作铜离子的络合剂，并且含氮环状化合物用作含有水，水的无电镀铜溶液中的亚硝酸根离子的络合剂 可溶性铜盐，铜离子络合剂，还原剂，pH控制剂和稳定剂，或包含水，水溶性铜盐，铜离子络合剂，还原剂的化学镀铜溶液 药剂，pH控制剂，稳定剂和亚铜离子络合剂，化学镀铜溶液的电镀速率，电镀膜的机械强度和稳定剂 改善了电镀溶液的性能。

公开(公告)号：US4735853A

公开(公告)日：1988-04-05

申请号：US863503

申请日：1986-05-15

申请人： Hiroaki Okudaira ,  Hitoshi Oka ,  Masako Fujisawa ,  Yoshio Gobara ,  Nobuo Nakagawa

发明人： Hiroaki Okudaira ,  Hitoshi Oka ,  Masako Fujisawa ,  Yoshio Gobara ,  Nobuo Nakagawa

IPC分类号： G11B5/66 ,  G11B5/62 ,  G11B5/64 ,  G11B5/73 ,  G11B5/738 ,  G11B5/82 ,  H01F10/26

CPC分类号： G11B5/7325 ,  Y10S428/90 ,  Y10T428/265 ,  Y10T428/31678

摘要： Disclosed is a magnetic recording medium in which an underlayer formed below a magnetic medium, in which a signal is written, is composed of a nickel alloy comprising 0.05 to 10 atom % of tungsten and 14 to 30 atom % of phosphorus. In this magnetic recording medium, the temperature for formation of magnetic medium and the temperature for formation of a protective film can be elevated over the levels adopted in the conventional techniques. Therefore, the magnetic characteristics and abrasion resistance can be improved. Furthermore, the magnetic recording medium is excellent in the mechanical strength and corrosion resistance. Accordingly, the reliability of the magnetic medium can be highly improved.

摘要翻译： 公开了一种磁记录介质，其中形成在其上写有信号的磁介质下方的底层由包含0.05至10原子％的钨和14至30原子％的磷的镍合金组成。 在这种磁记录介质中，用于形成磁介质的温度和用于形成保护膜的温度可以提高到常规技术中采用的水平。 因此，可以提高磁特性和耐磨性。 此外，磁记录介质的机械强度和耐腐蚀性优异。 因此，可以大大提高磁性介质的可靠性。

公开(公告)号：US20110122531A1

公开(公告)日：2011-05-26

申请号：US12634624

申请日：2009-12-09

申请人： Yukio KATO ,  Junguo Xu ,  Nobuo Nakagawa

发明人： Yukio KATO ,  Junguo Xu ,  Nobuo Nakagawa

IPC分类号： G11B23/03

CPC分类号： G11B25/043 ,  G11B5/725 ,  G11B33/148

摘要： A hard-disk drive. The hard-disk drive includes a disk enclosure, a magnetic-recording disk accommodated in the disk enclosure, and a diffusion suppressing film. The diffusion suppressing film divides the space in the disk enclosure into a first space where the magnetic-recording disk is disposed and a second space for retaining a lubricant. The diffusion suppressing film also suppresses diffusion of the lubricant from the second space to the first space.

摘要翻译： 硬盘驱动器。 硬盘驱动器包括容纳在盘盒中的磁盘盒，磁记录盘以及扩散抑制膜。 扩散抑制膜将盘盒中的空间划分成磁记录盘设置的第一空间和用于保持润滑剂的第二空间。 扩散抑制膜还抑制润滑剂从第二空间到第一空间的扩散。

公开(公告)号：US5494721A

公开(公告)日：1996-02-27

申请号：US112255

申请日：1993-08-26

申请人： Nobuo Nakagawa ,  Hirayoshi Tanei

发明人： Nobuo Nakagawa ,  Hirayoshi Tanei

IPC分类号： G11B5/72 ,  G11B5/725 ,  G11B5/73 ,  G11B5/738 ,  G11B5/00

CPC分类号： G11B5/7315 ,  G11B5/72 ,  G11B5/725 ,  G11B5/738 ,  Y10S428/90 ,  Y10T428/21 ,  Y10T428/24421 ,  Y10T428/252 ,  Y10T428/315

摘要： A substrate for a magnetic disc, which comprises a crystallized glass consisting essentially of an amorphous glass continuous phase and crystal particles dispersed in the continuous phase, the substrate having fine projections of the crystal particles on the surface thereof, a method of producing the substrate, the magnetic disc using the substrate, and a method of producing the magnetic disc are provided. The crystallized glass is made from a glass material of a Li.sub.2 O--SiO.sub.2, Li.sub.2 O--Al.sub.2 O.sub.3 --SiO.sub.2, Li.sub.2 O--MgO--Al.sub.2 O.sub.3 --SiO.sub.2, MgO--Al.sub.2 O.sub.3 --SiO.sub.2, Na.sub.2 O--Al.sub.2 O.sub.3 --SiO .sub.2 or BaO--Al.sub.2 O.sub.3 --SiO.sub.2 system, and the crystal particles have one or more compositions selected from Li.sub.2 O--SiO.sub.2, Li.sub.2 O.2SiO.sub.2, Li.sub.2 O.Al.sub.2 O.sub.3.2Si.sub.2, Li.sub.2 O.Al.sub.2 O.sub.3 4SiO.sub.2, SiO.sub.2 and 2MgO--2Al.sub.2 O.sub.3.5SiO.sub.2, and an average particle size of 0.01 to 3.0 .mu.m, and are projected at a density of 10.sup.2 to 10.sup.6 / mm.sup.2 and at an average height of 0.005 to 0.2 .mu.m on the surface of the substrate, the total surface area of the projections of crystal particles occupying at most 30% of the unit surface area of the substrate. The projections are made by chemical etching with an aqueous solution of hydrofluoric acid, physical etching with sputtering under vacuum or ion-milling, or mechanical etching with sand blasting. The magnetic disc comprises the crystallized glass substrate, a chromium or chromium alloy undercoat film, thin magnetic film, protective carbon film and lubricant film.

摘要翻译： 一种用于磁盘的基板，其包括基本上由无定形玻璃连续相组成的结晶玻璃和分散在连续相中的晶体颗粒，所述基板在其表面上具有晶体颗粒的微小突起，制造基板的方法， 提供使用该基板的磁盘及其制造方法。 结晶玻璃由Li2O-SiO2，Li2O-Al2O3-SiO2，Li2O-MgO-Al2O3-SiO2，MgO-Al2O3-SiO2，Na2O-Al2O3-SiO2或BaO-Al2O3-SiO2体系的玻璃材料制成， 所述结晶粒子具有选自Li 2 O-SiO 2，Li 2 O 2·SiO 2，Li 2 O·Al 2 O 3·2Si 2，Li 2 O·Al 2 O 34·SiO 2，SiO 2和2MgO·2Al 2 O 3·5SiO 2中的一种以上的组成，平均粒径为0.01〜3.0μm， 投影在基板表面上的密度为102〜106 / mm 2，平均高度为0.005〜0.2μm，晶体颗粒的突起的总表面积占据了单体表面积的至多30％ 基质。 通过用氢氟酸的水溶液进行化学蚀刻，在真空下进行溅射物理蚀刻或离子研磨或通过喷砂机械蚀刻来进行突起。 磁盘包括结晶玻璃基板，铬或铬合金底涂层，薄磁膜，保护性碳膜和润滑膜。

公开(公告)号：US5093173A

公开(公告)日：1992-03-03

申请号：US462775

申请日：1990-01-10

申请人： Nobuo Nakagawa ,  Hirayoshi Tanei

发明人： Nobuo Nakagawa ,  Hirayoshi Tanei

IPC分类号： G11B5/82 ,  G11B5/72 ,  G11B5/725 ,  G11B5/73 ,  G11B5/738 ,  G11B5/84

CPC分类号： G11B5/7315 ,  G11B5/72 ,  G11B5/725 ,  G11B5/7325 ,  G11B5/738 ,  Y10S428/90 ,  Y10T428/252 ,  Y10T428/30

摘要： A substrate for a magnetic disc, which comprises a crystallized glass consisting essentially of an amorphous glass continuous phase and crystal particles dispersed in the continuous phase, the substrate having fine projections of the crystal particles on the surface thereof, a method of producing the substrate, the magnetic disc using the substrate, and a method of producing the magnetic disc are provided. The crystallized glass is made from a glass material of a Li.sub.2 O-SiO.sub.2, Li.sub.2 O-Al.sub.2 O.sub.3 -SiO.sub.2, Li.sub.2 O-MgO-Al.sub.2 O.sub.3 -SiO.sub.2, MgO-Al.sub.2 O.sub.3 -SiO.sub.2, Na.sub.2 O-Al.sub.2 O.sub.3 -SiO.sub.2 or BaO-Al.sub.2 O.sub.3 -SiO.sub.2 system, and the crystal particles have one or more compositions selected from Li.sub.2 O.multidot.SiO.sub.2, Li.sub.2 O.multidot.2SiO.sub.2, Li.sub.2 O.multidot.Al.sub.2 O.sub.3 .multidot.2SiO.sub.2, Li.sub.2 O.multidot.Al.sub.2 O.sub.3 .multidot.4SiO.sub.2, SiO.sub.2 and 2MgO.multidot.2Al.sub.2 O.sub.3 .multidot.5SiO.sub.2, and an average particle size of 0.01 to 3.0 .mu.m, and are projected at a density of 10.sup.2 to 10.sup.6 /mm.sup.2 and at an average height of 0.005 to 0.2 .mu.m on the surface of the substrate, the total surface area of the projections of crystal particles occupying at most 30% of the unit surface area of the substrate. The projections are made by chemical etching with an aqueous solution of hydrofluoric acid, physical etching with sputtering under vacuum or ion-milling, or mechanical etching with sand blasting. The magnetic disc comprises the crystallized glass substrate, a chromium or chromium alloy undercoat film, thin magnetic film, protective carbon film and lubricant film.

摘要翻译： 一种用于磁盘的基板，其包括基本上由无定形玻璃连续相组成的结晶玻璃和分散在连续相中的晶体颗粒，所述基板在其表面上具有晶体颗粒的微小突起，制造基板的方法， 提供使用该基板的磁盘及其制造方法。 结晶玻璃由Li2O-SiO2，Li2O-Al2O3-SiO2，Li2O-MgO-Al2O3-SiO2，MgO-Al2O3-SiO2，Na2O-Al2O3-SiO2或BaO-Al2O3-SiO2体系的玻璃材料制成， 晶体颗粒具有选自Li 2 O x SiO 2，Li 2 O x 2 SiO 2，Li 2 O x Al 2 O 3 xSiSiO 2，Li 2 O x Al 2 O 3 x 4 SiO 2，SiO 2和2MgO 2 Al 2 O x xSiSiO 2中的一种或多种组合物，平均粒径为0.01〜3.0μm，以102〜106 / mm 2的密度投影，平均高度 在基板表面上为0.005〜0.2μm，晶体颗粒的突起的总表面积占基板的单位面积的至多30％。 通过用氢氟酸的水溶液进行化学蚀刻，在真空下进行溅射物理蚀刻或离子研磨或通过喷砂机械蚀刻来进行突起。 磁盘包括结晶玻璃基板，铬或铬合金底涂层，薄磁膜，保护性碳膜和润滑膜。

公开(公告)号：US08184397B2

公开(公告)日：2012-05-22

申请号：US12634624

申请日：2009-12-09

申请人： Yukio Kato ,  Junguo Xu ,  Nobuo Nakagawa

发明人： Yukio Kato ,  Junguo Xu ,  Nobuo Nakagawa

IPC分类号： G11B33/14

CPC分类号： G11B25/043 ,  G11B5/725 ,  G11B33/148

摘要： A hard-disk drive. The hard-disk drive includes a disk enclosure, a magnetic-recording disk accommodated in the disk enclosure, and a diffusion suppressing film. The diffusion suppressing film divides the space in the disk enclosure into a first space where the magnetic-recording disk is disposed and a second space for retaining a lubricant. The diffusion suppressing film also suppresses diffusion of the lubricant from the second space to the first space.

摘要翻译： 硬盘驱动器。 硬盘驱动器包括容纳在盘盒中的磁盘盒，磁记录盘以及扩散抑制膜。 扩散抑制膜将盘盒中的空间划分成磁记录盘设置的第一空间和用于保持润滑剂的第二空间。 扩散抑制膜还抑制润滑剂从第二空间到第一空间的扩散。

公开(公告)号：US20060081527A1

公开(公告)日：2006-04-20

申请号：US11250321

申请日：2005-10-13

申请人： Katsuji Ichikawa ,  Nobuo Nakagawa ,  Mitsuhiko Oguchi

发明人： Katsuji Ichikawa ,  Nobuo Nakagawa ,  Mitsuhiko Oguchi

IPC分类号： B01D29/13

CPC分类号： B01D39/2027 ,  B01D39/2003 ,  B01D2239/0478 ,  B01D2239/086 ,  B01D2239/1216

摘要： Embodiments of the invention eliminate, in an elemental analysis made of fine particles trapped using a conventional analytical filter, a hindrance to correct identification of elements of the fine particles as an original object of measurement that would otherwise cause the X-ray analyzer to measure elements of a filter base in addition to those of the fine particles. In one embodiment, an analytical filter includes a filter base and a metallic coating film. The filter base made of a resin has a plurality of filtering holes, each having a hole diameter ranging between about 100 nm and 1000 nm. The metallic coating film is formed on one face of the filter base through ion sputtering of gold (Au). The metallic coating film is so thick that an electron beam from an X-ray analyzer does not penetrate therethrough and the filtering holes are not plugged up. The metallic coating film is at least about 40 nm thick and is preferably about 40 nm to 100 nm thick.

摘要翻译： 本发明的实施例在使用常规分析过滤器捕获的细小颗粒的元素分析中消除了将微粒元素的正确识别作为原始测量对象的障碍，否则将导致X射线分析仪测量元件 除了微粒之外的过滤器底座。 在一个实施例中，分析过滤器包括过滤器底座和金属涂膜。 由树脂制成的过滤器底座具有多个过孔，每个过孔都具有在约100nm和1000nm之间的孔直径。 金属涂膜通过金（Au）的离子溅射形成在过滤器基体的一个面上。 金属涂膜如此厚，使得来自X射线分析仪的电子束不穿透其中，并且过滤孔未堵塞。 金属涂膜的厚度至少约40nm，优选为约40nm至100nm厚。