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公开(公告)号：US07511282B2
公开(公告)日：2009-03-31
申请号：US11440799
申请日：2006-05-25
申请人： Enrique Agorio , Michael Tanguay , Christophe Roudin , Liang Hong , Jay Jordan , Craig Henry , Mark Darus
发明人： Enrique Agorio , Michael Tanguay , Christophe Roudin , Liang Hong , Jay Jordan , Craig Henry , Mark Darus
IPC分类号： G21K5/10
CPC分类号： G01N1/286 , G01N1/32 , G01N2001/2833 , G01N2001/2886 , G02B21/32 , H01J2237/31745 , Y10T428/24355
摘要： Methods of extracting a TEM sample from a substrate include milling a hole on the sample and inserting a probe into the hole. The sample adheres to the probe, and can be processed on transferred while on the probe. In another embodiment, the sample is freed from a substrate and adheres to a probe by electrostatic attraction. The sample is placed onto a TEM sample holder in a vacuum chamber.
摘要翻译： 从基材提取TEM样品的方法包括在样品上研磨孔并将探针插入孔中。 样品粘附到探头上，并且可以在探头上进行处理。 在另一个实施方案中，样品从基底中释放出来并通过静电吸附粘附到探针上。 将样品置于真空室中的TEM样品架上。
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公开(公告)号：US20050035291A1
公开(公告)日：2005-02-17
申请号：US10889967
申请日：2004-07-13
CPC分类号： H01J37/141 , H01J37/026 , H01J37/08 , H01J2237/0042 , H01J2237/0805 , H01J2237/1405 , H01J2237/28 , H01J2237/317 , H01J2237/31749
摘要： A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.
摘要翻译： 双光束系统包括离子束系统和具有磁性物镜的扫描电子显微镜。 离子束系统适于在存在来自SEM物镜的磁场的情况下最佳地操作，使得物镜在离子束操作期间不被关闭。 可选的二次粒子检测器和可选的电荷中和泛喷枪适于在存在磁场的情况下操作。 磁性物镜被设计成具有恒定的热信号，不管产生的磁场的强度如何，使得当磁场改变时，系统不需要时间稳定。
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公开(公告)号：US08357913B2
公开(公告)日：2013-01-22
申请号：US12446376
申请日：2007-10-20
CPC分类号： H01J37/20 , G01N1/286 , G01N1/32 , G01N2001/2873 , G01N2001/2886 , G01R31/2893 , H01J37/26 , H01J37/28 , H01J37/285 , H01J37/31 , H01J2237/202 , H01J2237/2802 , H01J2237/2812 , H01J2237/3109 , H01J2237/3114 , H01J2237/31745
摘要： An improved method and apparatus for extracting and handling samples for STEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput.
摘要翻译： 一种用于提取和处理STEM分析样品的改进方法和装置。 本发明的优选实施例利用显微操纵器和使用真空压力的中空微探针探针将微针尖附着到样品上。 通过通过微针尖向薄片施加小的真空压力，可以比通过单独使用静电力更牢固地保持薄片并且其布置更准确。 通过使用具有倾斜尖端并且也可围绕其长轴旋转的探针，所提取的样品可以平放放置在样品架上。 这样可以精确控制样品放置和取向，从而大大提高分析和产量的可预测性。
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公开(公告)号：US20100305747A1
公开(公告)日：2010-12-02
申请号：US12446376
申请日：2007-10-20
CPC分类号： H01J37/20 , G01N1/286 , G01N1/32 , G01N2001/2873 , G01N2001/2886 , G01R31/2893 , H01J37/26 , H01J37/28 , H01J37/285 , H01J37/31 , H01J2237/202 , H01J2237/2802 , H01J2237/2812 , H01J2237/3109 , H01J2237/3114 , H01J2237/31745
摘要： An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput
摘要翻译： 一种用于提取和处理样品用于S / TEM分析的改进方法和装置。 本发明的优选实施例利用显微操纵器和使用真空压力的中空微探针探针将微针尖附着到样品上。 通过通过微针尖向薄片施加小的真空压力，可以比通过单独使用静电力更牢固地保持薄片并且其布置更准确。 通过使用具有倾斜尖端并且也可围绕其长轴旋转的探针，所提取的样品可以平放放置在样品架上。 这样可以精确控制样品放置和取向，从而大大提高分析和产量的可预测性
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公开(公告)号：US20110309263A1
公开(公告)日：2011-12-22
申请号：US13222536
申请日：2011-08-31
IPC分类号： H01J37/30
CPC分类号： H01J37/141 , H01J37/026 , H01J37/08 , H01J2237/0042 , H01J2237/0805 , H01J2237/1405 , H01J2237/28 , H01J2237/317 , H01J2237/31749
摘要： A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.
摘要翻译： 双光束系统包括离子束系统和具有磁性物镜的扫描电子显微镜。 离子束系统适于在存在来自SEM物镜的磁场的情况下最佳地操作，使得物镜在离子束操作期间不被关闭。 可选的二次粒子检测器和可选的电荷中和泛喷枪适于在存在磁场的情况下操作。 磁性物镜被设计成具有恒定的热信号，不管产生的磁场的强度如何，使得当磁场改变时，系统不需要时间稳定。
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公开(公告)号：US20100025578A1
公开(公告)日：2010-02-04
申请号：US12576914
申请日：2009-10-09
CPC分类号： H01J37/141 , H01J37/026 , H01J37/08 , H01J2237/0042 , H01J2237/0805 , H01J2237/1405 , H01J2237/28 , H01J2237/317 , H01J2237/31749
摘要： A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.
摘要翻译： 双光束系统包括离子束系统和具有磁性物镜的扫描电子显微镜。 离子束系统适于在存在来自SEM物镜的磁场的情况下最佳地操作，使得物镜在离子束操作期间不被关闭。 可选的二次粒子检测器和可选的电荷中和泛喷枪适于在存在磁场的情况下操作。 磁性物镜被设计成具有恒定的热信号，不管产生的磁场的强度如何，使得当磁场改变时，系统不需要时间稳定。
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公开(公告)号：US20080035860A1
公开(公告)日：2008-02-14
申请号：US11641540
申请日：2006-12-18
IPC分类号： H01J37/00
CPC分类号： H01J37/141 , H01J37/026 , H01J37/08 , H01J2237/0042 , H01J2237/0805 , H01J2237/1405 , H01J2237/28 , H01J2237/317 , H01J2237/31749
摘要： A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.
摘要翻译： 双光束系统包括离子束系统和具有磁性物镜的扫描电子显微镜。 离子束系统适于在存在来自SEM物镜的磁场的情况下最佳地操作，使得物镜在离子束操作期间不被关闭。 可选的二次粒子检测器和可选的电荷中和泛喷枪适于在存在磁场的情况下操作。 磁性物镜被设计成具有恒定的热信号，不管产生的磁场的强度如何，使得当磁场改变时，系统不需要时间稳定。
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公开(公告)号：US07161159B2
公开(公告)日：2007-01-09
申请号：US10889967
申请日：2004-07-13
IPC分类号： H01J37/244
CPC分类号： H01J37/141 , H01J37/026 , H01J37/08 , H01J2237/0042 , H01J2237/0805 , H01J2237/1405 , H01J2237/28 , H01J2237/317 , H01J2237/31749
摘要： A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.
摘要翻译： 双光束系统包括离子束系统和具有磁性物镜的扫描电子显微镜。 离子束系统适于在存在来自SEM物镜的磁场的情况下最佳地操作，使得物镜在离子束操作期间不被关闭。 可选的二次粒子检测器和可选的电荷中和泛喷枪适于在存在磁场的情况下操作。 磁性物镜被设计成具有恒定的热信号，不管产生的磁场的强度如何，使得当磁场改变时，系统不需要时间稳定。
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公开(公告)号：US08399864B2
公开(公告)日：2013-03-19
申请号：US13222536
申请日：2011-08-31
IPC分类号： H01J37/26 , H01J37/141
CPC分类号： H01J37/141 , H01J37/026 , H01J37/08 , H01J2237/0042 , H01J2237/0805 , H01J2237/1405 , H01J2237/28 , H01J2237/317 , H01J2237/31749
摘要： A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.
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公开(公告)号：US08013311B2
公开(公告)日：2011-09-06
申请号：US12576914
申请日：2009-10-09
CPC分类号： H01J37/141 , H01J37/026 , H01J37/08 , H01J2237/0042 , H01J2237/0805 , H01J2237/1405 , H01J2237/28 , H01J2237/317 , H01J2237/31749
摘要： A dual beam system includes an ion beam system and a scanning electron microscope with a magnetic objective lens. The ion beam system is adapted to operate optimally in the presence of the magnetic field from the SEM objective lens, so that the objective lens is not turned off during operation of the ion beam. An optional secondary particle detector and an optional charge neutralization flood gun are adapted to operate in the presence of the magnetic field. The magnetic objective lens is designed to have a constant heat signature, regardless of the strength of magnetic field being produced, so that the system does not need time to stabilize when the magnetic field is changed.
摘要翻译： 双光束系统包括离子束系统和具有磁性物镜的扫描电子显微镜。 离子束系统适于在存在来自SEM物镜的磁场的情况下最佳地操作，使得物镜在离子束操作期间不被关闭。 可选的二次粒子检测器和可选的电荷中和泛喷枪适于在存在磁场的情况下操作。 磁性物镜被设计成具有恒定的热信号，不管产生的磁场的强度如何，使得当磁场改变时，系统不需要时间稳定。
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