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    Method and apparatus for separating a stamper from a patterned substrate
    1.
    发明授权
    Method and apparatus for separating a stamper from a patterned substrate 失效
    用于将压模与图案化衬底分离的方法和装置

    公开(公告)号：US07695667B2

    公开(公告)日：2010-04-13

    申请号：US11365021

    申请日：2006-03-01

    Applicant: Margaret Evans Best ,  Tsai-Wei Wu

    Inventor： Margaret Evans Best ,  Tsai-Wei Wu

    IPC: B28B7/12

    CPC classification number: G11B5/82 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G11B5/743 ,  G11B5/855 ,  G11B5/865

    Abstract: A method and apparatus are disclosed for separating a stamper from a patterned substrate. The method includes providing a substrate having a top and a bottom with an opening therein, providing a support mechanism configured to retain the substrate, providing a stamper having a formed pattern and configured to come in contact with the top of the substrate, wherein a chamber is formed within the opening of the substrate when the stamper is in contact with the substrate, providing a channel directed toward the chamber to introduce pressurized air into the chamber, and directing pressured air through the channel to the chamber to initiate separation of the stamper from the substrate. In certain embodiments, the pressurized air may be directed toward an opening in the substrate, such as a central ID hole in a disk. The disk may be incorporated within a storage device as pattered magnetic media.

    Abstract translation: 公开了用于将压模与图案化衬底分离的方法和装置。 该方法包括提供具有其中具有开口的顶部和底部的基底，提供被配置为保持基底的支撑机构，提供具有形成的图案的压模并且构造成与基底的顶部接触，其中腔室 当压模与基板接触时，形成在基板的开口内，提供引导到腔室的通道，以将加压的空气引入到腔室中，并且将加压空气通过通道引导到腔室，以将压模从 底物。 在某些实施例中，加压空气可以被引向衬底中的开口，例如盘中的中心ID孔。 盘可以作为图案化的磁性介质结合在存储装置内。

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