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    High-resolution magnetic encoder
    1.
    发明授权
    High-resolution magnetic encoder 失效
    高分辨率磁编码器

    公开(公告)号：US08274277B2

    公开(公告)日：2012-09-25

    申请号：US12550369

    申请日：2009-08-29

    申请人： Andreas Dietzel ,  Marcus Breuer ,  Hubert Grimm ,  Karl-Heinz Lehnhert ,  Nikolaus Luckner ,  Rolf Schaefer ,  Guenther Michaelis

    发明人： Andreas Dietzel ,  Marcus Breuer ,  Hubert Grimm ,  Karl-Heinz Lehnhert ,  Nikolaus Luckner ,  Rolf Schaefer ,  Guenther Michaelis

    IPC分类号： G01R33/12 ,  G11B5/84 ,  G11B5/82

    CPC分类号： G01D5/145 ,  Y10T29/4902

    摘要： A high-resolution magnetic encoder system includes a magnetic resistive sensor, a fixed suspension, and a mechanism. The magnetic resistive sensor is mounted to the fixed suspension above a magnetic medium having at least one magnetic track. The fixed suspension is attached to the mechanism, such as a housing, a substrate, and/or an electronic board. The sensor is adapted to perform a relative movement with respect to and in close contact to the surface of the magnetic medium. The magnetic medium may be protected by an overcoat layer. The magnetic resistive sensor may be Giant Magnetic-Resistive (GMR) sensor and/or a Tunneling Magnetic-Resistive Sensor (TMR).

    摘要翻译： 高分辨率磁编码器系统包括磁阻传感器，固定悬架和机构。 磁阻传感器安装在具有至少一个磁道的磁介质上方的固定悬架上。 固定悬架附接到机构，例如壳体，基板和/或电子板。 传感器适于执行相对于磁介质表面的紧密接触的相对运动。 磁性介质可以被外涂层保护。 磁阻传感器可以是巨磁电阻（GMR）传感器和/或隧道磁阻传感器（TMR）。

    High-resolution magnetic encoder
    2.
    发明申请
    High-resolution magnetic encoder 失效
    高分辨率磁编码器

    公开(公告)号：US20100045270A1

    公开(公告)日：2010-02-25

    申请号：US12550369

    申请日：2009-08-29

    申请人： Andreas Dietzel ,  Marcus Breuer ,  Hubert Grimm ,  Karl-Heinz Lehnhert ,  Nikolaus Luckner ,  Rolf Schaefer ,  Guenther Michaelis

    发明人： Andreas Dietzel ,  Marcus Breuer ,  Hubert Grimm ,  Karl-Heinz Lehnhert ,  Nikolaus Luckner ,  Rolf Schaefer ,  Guenther Michaelis

    IPC分类号： G01B7/14

    CPC分类号： G01D5/145 ,  Y10T29/4902

    摘要： A high-resolution magnetic encoder system includes a magnetic resistive sensor, a fixed suspension, and a mechanism. The magnetic resistive sensor is mounted to the fixed suspension above a magnetic medium having at least one magnetic track. The fixed suspension is attached to the mechanism, such as a housing, a substrate, and/or an electronic board. The sensor is adapted to perform a relative movement with respect to and in close contact to the surface of the magnetic medium. The magnetic medium may be protected by an overcoat layer. The magnetic resistive sensor may be Giant Magnetic-Resistive (GMR) sensor and/or a Tunneling Magnetic-Resistive Sensor (TMR).

    摘要翻译： 高分辨率磁编码器系统包括磁阻传感器，固定悬架和机构。 磁阻传感器安装在具有至少一个磁道的磁介质上方的固定悬架上。 固定悬架附接到机构，例如壳体，基板和/或电子板。 传感器适于执行相对于磁介质表面的紧密接触的相对运动。 磁性介质可以被外涂层保护。 磁阻传感器可以是巨磁电阻（GMR）传感器和/或隧道磁阻传感器（TMR）。

    METHOD OF MANUFACTURING A MAGNETIC SENSOR WITH TILTED MAGNETORESISTIVE STRUCTURES
    3.
    发明申请
    METHOD OF MANUFACTURING A MAGNETIC SENSOR WITH TILTED MAGNETORESISTIVE STRUCTURES 失效
    制造具有倾斜磁阻结构的磁传感器的方法

    公开(公告)号：US20080217288A1

    公开(公告)日：2008-09-11

    申请号：US12106160

    申请日：2008-04-18

    申请人： Marcus Breuer ,  Guenther Crolly ,  Michael Haag ,  Manfred Jung ,  Thorsten Muehge ,  Johannes Paul ,  Joerg Sauerwein ,  Rolf Schaefer ,  Alexandra Welzel

    发明人： Marcus Breuer ,  Guenther Crolly ,  Michael Haag ,  Manfred Jung ,  Thorsten Muehge ,  Johannes Paul ,  Joerg Sauerwein ,  Rolf Schaefer ,  Alexandra Welzel

    IPC分类号： B05D5/12 ,  B44C1/22

    CPC分类号： G01R33/0206 ,  G11B5/3909 ,  G11B5/3951 ,  G11B2005/3996

    摘要： A method of manufacturing a magnetic field sensor device in one embodiment includes applying a mask on a substrate, performing a wet etching procedure on the substrate for generating at least a first groove having tilted side walls, and depositing at least one layer of magnetoresistive material onto a section of the surface of at least a first tilted side wall of the groove. A method of manufacturing a magnetic field sensor device on a substrate having a plurality of tilted planar sections, each of the tilted planar sections having a surface normal angled with respect to a surface normal of the substrate is also provided. The method includes depositing a magnetoresistive layered structure positioned at each of the tilted planar sections of the substrate, wherein the tilted planar sections are oriented such that a direction of an applied magnetic field in at least one of an x-, y- and z-direction relative to the substrate is detectable based on field-induced resistance changes of the magnetoresistive layered structures.

    摘要翻译： 在一个实施例中制造磁场传感器装置的方法包括在衬底上施加掩模，在衬底上执行湿蚀刻工艺，以产生至少具有倾斜侧壁的第一凹槽，并且将至少一层磁阻材料沉积到 凹槽的至少第一倾斜侧壁的表面的一部分。 还提供了一种在具有多个倾斜平面部分的基板上制造磁场传感器装置的方法，每个倾斜平面部分具有相对于基板的表面法线成一定角度的表面。 该方法包括沉积位于基板的每个倾斜平面部分处的磁阻分层结构，其中倾斜的平面部分被定向成使得x，y和z轴中的至少一个中施加的磁场的方向， 基于磁阻分层结构的场致电阻变化可以检测相对于衬底的方向。

    High-Resolution Magnetic Encoder
    4.
    发明申请
    High-Resolution Magnetic Encoder 失效
    高分辨率磁性编码器

    公开(公告)号：US20070268017A1

    公开(公告)日：2007-11-22

    申请号：US10580766

    申请日：2004-10-29

    申请人： Andreas Dietzel ,  Marcus Breuer ,  Hubert Grimm ,  Karl-Heinz Lehnhert ,  Nikolaus Luckner ,  Rolf Schaefer ,  Guenther Michaelis

    发明人： Andreas Dietzel ,  Marcus Breuer ,  Hubert Grimm ,  Karl-Heinz Lehnhert ,  Nikolaus Luckner ,  Rolf Schaefer ,  Guenther Michaelis

    IPC分类号： G01R33/02 ,  H01F7/00

    CPC分类号： G01D5/145 ,  Y10T29/4902

    摘要： A high-resolution magnetic encoder system includes a magnetic resistive sensor, a fixed suspension, and a mechanism. The magnetic resistive sensor is mounted to the fixed suspension above a magnetic medium having at least one magnetic track. The fixed suspension is attached to the mechanism, such as a housing, a substrate, and/or an electronic board. The sensor is adapted to perform a relative movement with respect to and in close contact to the surface of the magnetic medium. The magnetic medium may be protected by an overcoat layer. The magnetic resistive sensor may be Giant Magnetic-Resistive (GMR) sensor and/or a Tunneling Magnetic-Resistive Sensor (TMR).

    摘要翻译： 高分辨率磁编码器系统包括磁阻传感器，固定悬架和机构。 磁阻传感器安装在具有至少一个磁道的磁介质上方的固定悬架上。 固定悬架附接到机构，例如壳体，基板和/或电子板。 传感器适于执行相对于磁介质表面的紧密接触的相对运动。 磁性介质可以被外涂层保护。 磁阻传感器可以是巨磁电阻（GMR）传感器和/或隧道磁阻传感器（TMR）。

    MAGNETIC ENCODER SYSTEM
    7.
    发明申请
    MAGNETIC ENCODER SYSTEM 失效
    磁力编码器系统

    公开(公告)号：US20070019336A1

    公开(公告)日：2007-01-25

    申请号：US11536823

    申请日：2006-09-29

    申请人： Marcus Breuer ,  Hubert Grimm ,  Hans-Guenter Kraemer ,  Nikolaus Luckner

    发明人： Marcus Breuer ,  Hubert Grimm ,  Hans-Guenter Kraemer ,  Nikolaus Luckner

    IPC分类号： G11B5/33 ,  G11B5/127

    CPC分类号： G01D5/145

    摘要： A magnetic encoder system according to one embodiment includes a magnetic sensor mounted on a first substrate above a magnetic medium, the magnetic medium carrying at least one magnetic track, the sensor detecting changes in the magnetic track during a relative movement between the sensor and the magnetic medium. The first substrate is provided with a second substrate rotatably engaging the magnetic medium.

    摘要翻译： 根据一个实施例的磁编码器系统包括安装在磁介质上的第一基板上的磁传感器，所述磁介质承载至少一个磁道，所述传感器检测在所述传感器和所述磁体之间的相对运动期间所述磁轨的变化 中。 第一基板设置有可旋转地接合磁介质的第二基板。

    Method of manufacturing a magnetic sensor with tilted magnetoresistive structures
    9.
    发明授权
    Method of manufacturing a magnetic sensor with tilted magnetoresistive structures 失效
    制造具有倾斜磁阻结构的磁传感器的方法

    公开(公告)号：US08110119B2

    公开(公告)日：2012-02-07

    申请号：US12106160

    申请日：2008-04-18

    申请人： Marcus Breuer ,  Guenther Crolly ,  Michael Haag ,  Manfred Jung ,  Thorsten Muehge ,  Johannes Paul ,  Joerg Sauerwein ,  Rolf Schaefer ,  Alexandra Welzel

    发明人： Marcus Breuer ,  Guenther Crolly ,  Michael Haag ,  Manfred Jung ,  Thorsten Muehge ,  Johannes Paul ,  Joerg Sauerwein ,  Rolf Schaefer ,  Alexandra Welzel

    IPC分类号： B05D5/12 ,  B44C1/22

    CPC分类号： G01R33/0206 ,  G11B5/3909 ,  G11B5/3951 ,  G11B2005/3996

    摘要： A method of manufacturing a magnetic field sensor device in one embodiment includes applying a mask on a substrate, performing a wet etching procedure on the substrate for generating at least a first groove having tilted side walls, and depositing at least one layer of magnetoresistive material onto a section of the surface of at least a first tilted side wall of the groove. A method of manufacturing a magnetic field sensor device on a substrate having a plurality of tilted planar sections, each of the tilted planar sections having a surface normal angled with respect to a surface normal of the substrate is also provided. The method includes depositing a magnetoresistive layered structure positioned at each of the tilted planar sections of the substrate, wherein the tilted planar sections are oriented such that a direction of an applied magnetic field in at least one of an x-, y- and z-direction relative to the substrate is detectable based on field-induced resistance changes of the magnetoresistive layered structures.

    摘要翻译： 在一个实施例中制造磁场传感器装置的方法包括在衬底上施加掩模，在衬底上执行湿蚀刻工艺，以产生至少具有倾斜侧壁的第一凹槽，并且将至少一层磁阻材料沉积到 凹槽的至少第一倾斜侧壁的表面的一部分。 还提供了一种在具有多个倾斜平面部分的基板上制造磁场传感器装置的方法，每个倾斜平面部分具有相对于基板的表面法线成一定角度的表面。 该方法包括沉积位于基板的每个倾斜平面部分处的磁阻分层结构，其中倾斜的平面部分被定向成使得x，y和z轴中的至少一个中施加的磁场的方向， 基于磁阻分层结构的场致电阻变化可以检测相对于衬底的方向。