公开(公告)号：US08833165B2

公开(公告)日：2014-09-16

申请号：US13202091

申请日：2009-09-04

Applicant: Kui Yao ,  Saravanan Shanmugavel ,  Trung Dung Luong ,  Ajit S. Gaunekar ,  Hon Yu Peter Ng

Inventor： Kui Yao ,  Saravanan Shanmugavel ,  Trung Dung Luong ,  Ajit S. Gaunekar ,  Hon Yu Peter Ng

IPC: G01P15/09 ,  G01P15/18 ,  G01P15/08

CPC classification number: G01P15/0922 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/084

Abstract: The miniaturized piezoelectric accelerometer includes a support frame (102) having a cavity (104) and a seismic mass (108) supported by a plurality of suspension beams (110) extending from the support frame (102). Each of the suspension beams (110) has a piezoelectric thin film coated on a top surface thereof, with a pair of inter-digital electrodes (114) deposited on an upper surface of each piezoelectric thin film. The presence of acceleration excites bending and thus strain in the piezoelectric thin film, which in turn causes electrical signals to be generated over terminals of the electrodes (114). To collect constructively the output of the electrodes (114), one terminal of each of the electrodes (114) is routed to and electrically connected at a top surface (308) of the seismic mass (108).

Abstract translation: 小型压电加速度计包括具有空腔（104）的支撑框架（102）和由从支撑框架（102）延伸的多个悬挂梁（110）支撑的地震块体（108）。 每个悬架梁（110）具有涂覆在其顶表面上的压电薄膜，其中沉积在每个压电薄膜的上表面上的一对数字间电极（114）。 加速度的存在激发弯曲并因此在压电薄膜中变形，这又导致在电极（114）的端子上产生电信号。 为了积累地收集电极（114）的输出，每个电极（114）的一个端子被路由到电气连接在地震质量块（108）的顶表面（308）处。

公开(公告)号：US20130026382A1

公开(公告)日：2013-01-31

申请号：US13639504

申请日：2011-04-12

Applicant: Kui Yao ,  Bee Keen Gan ,  Szu Cheng Lai

Inventor： Kui Yao ,  Bee Keen Gan ,  Szu Cheng Lai

IPC: H01L31/101 ,  H01L31/11 ,  H01L31/18 ,  H01L31/108 ,  H01L31/102

CPC classification number: H01L31/022466 ,  H01L31/108

Abstract: A photovoltaic UV detector configured to generate an electrical output under UV irradiation. The photovoltaic UV detector comprises a first layer comprising an electrically polarized dielectric thin layer configured to generate a first electrical output under the UV irradiation; and a second, layer configured to form an electrical energy barrier at an interface between the second layer and the first layer so as to generate a second electrical output under the UV irradiation, the second electrical output having a same polarity as the first electrical output, the electrical output of the photovoltaic UV detector being a sum of at least the first electrical output and the second electrical output. The electrically polarized dielectric thin layer may be a ferroelectric thin film, which may comprise PZT or PZLT. The second layer may be a metal and the electrical energy barrier may be a Schottky barrier.

Abstract translation: 一种光伏紫外检测器，被配置为在UV照射下产生电输出。 光伏UV检测器包括第一层，其包括被配置为在UV照射下产生第一电输出的电极化电介质薄层; 以及第二层，被配置为在所述第二层和所述第一层之间的界面处形成电能势垒，以在所述UV照射下产生第二电输出，所述第二电输出具有与所述第一电输出相同的极性， 光伏UV检测器的电输出是至少第一电输出和第二电输出的和。 电极化电介质薄层可以是铁电薄膜，其可以包括PZT或PZLT。 第二层可以是金属，并且电能势垒可以是肖特基势垒。

公开(公告)号：US07851697B2

公开(公告)日：2010-12-14

申请号：US11386295

申请日：2006-03-21

Applicant: Kui Yao ,  Santiranjan Shannigrahi ,  Mei M. Chen ,  Bee K. Gan

Inventor： Kui Yao ,  Santiranjan Shannigrahi ,  Mei M. Chen ,  Bee K. Gan

IPC: H01L31/0392

CPC classification number: H01L31/0264 ,  H01L37/02 ,  H02S99/00

Abstract: The present invention provides a thin film photovoltaic device and a method of forming a thin film photovoltaic device. The thin film photovoltaic device has a substrate, a thin film layer formed on the substrate and first and second electrodes formed on one side of the thin film layer. By applying an electric field over the first and second electrodes, the thin film layer is polarized in a direction parallel to the surface plane of the film. Upon exposure to light, the thin film layer converts light energy into electricity. According to the method, a thin film layer is formed on a substrate. A first electrode and a second electrode are formed on one side of the thin film layer. By applying an electric field over the first and second electrodes, the thin film layer is polarized in a direction parallel to the surface plane of the film.

Abstract translation: 本发明提供薄膜光伏器件和形成薄膜光伏器件的方法。 薄膜光电器件具有基板，形成在基板上的薄膜层和形成在薄膜层的一侧上的第一和第二电极。 通过在第一和第二电极上施加电场，薄膜层在平行于膜的表面平面的方向上被极化。 在曝光时，薄膜层将光能转换成电能。 根据该方法，在基板上形成薄膜层。 第一电极和第二电极形成在薄膜层的一侧上。 通过在第一和第二电极上施加电场，薄膜层在平行于膜的表面平面的方向上被极化。

公开(公告)号：US07713576B2

公开(公告)日：2010-05-11

申请号：US10680229

申请日：2003-10-08

Applicant: Kui Yao ,  Xu Jiang He ,  Yuan Xu ,  Eng Hock Francis Tay

Inventor： Kui Yao ,  Xu Jiang He ,  Yuan Xu ,  Eng Hock Francis Tay

IPC: B05D5/12 ,  H01L41/22

CPC classification number: C23C18/1208 ,  C04B35/491 ,  C04B35/62805 ,  C04B35/62886 ,  C04B35/6303 ,  C04B2235/3201 ,  C04B2235/3203 ,  C04B2235/3249 ,  C04B2235/3296 ,  C04B2235/3298 ,  C04B2235/449 ,  C04B2235/5445 ,  C04B2235/80 ,  H01L41/1876 ,  H01L41/314 ,  H01L41/43 ,  Y10T29/42

Abstract: A method of producing a piezoelectric ceramic thick film on a substrate, said method comprising: providing a piezoelectric ceramic material in powder form; forming a liquid mixture by mixing the powdered material with a liquid phase precursor of a metal oxide of low-melting point, said precursor being adapted to decompose, upon subsequent annealing, into the metal oxide; drying the liquid mixture to form a precipitate; milling the precipitate to form a powdered precipitate; adding an organic carrier to the powdered precipitate; further milling the precipitate to form a paste; depositing a layer of the paste, as a wet film, onto the substrate; and annealing the layered substrate at a temperature and for a time sufficient to cause transformation of the paste into the thick film.

Abstract translation: 一种在基板上制造压电陶瓷厚膜的方法，所述方法包括：提供粉末形式的压电陶瓷材料; 通过将粉末材料与低熔点金属氧化物的液相前体混合而形成液体混合物，所述前体适于在随后退火时分解成金属氧化物; 干燥液体混合物形成沉淀物; 研磨沉淀物以形成粉末状沉淀物; 向粉末沉淀物中加入有机载体; 进一步研磨沉淀以形成糊状物; 将一层糊状物作为湿膜沉积到基底上; 并在足以使糊料变形成厚膜的温度和时间下退火分层基板。

公开(公告)号：US20090263671A1

公开(公告)日：2009-10-22

申请号：US12106685

申请日：2008-04-21

Applicant: Kui Yao ,  Shuting Chen ,  Francis Eng Hock Tay

Inventor： Kui Yao ,  Shuting Chen ,  Francis Eng Hock Tay

IPC: B32B15/082 ,  B05D3/02

CPC classification number: C23C26/02 ,  B05D3/0254 ,  H01L41/317 ,  H01L41/45 ,  Y10T428/31678

Abstract: Ferroelectric Poly(vinylidene fluoride) Film on a Substrate and Method for its Formation A method of producing a poly(vinylidene fluoride) (“PVDF”) film on a substrate from a precursor solution is disclosed. The method comprises preparing the precursor solution for the PVDF film and dissolving an additive in the precursor solution, the additive being selected from the group consisting of: a hydrate salt, and a hygroscopic chemical. The PVDF is added to the precursor solution. The PVDF solution is coated on a substrate to form an as-deposited PVDF film which is dried and crystallized at an elevated temperature. The dried and crystallized as-deposited PVDF film is annealed at a further elevated temperature. The further elevated temperature is greater than the elevated temperature but less than a melting point of the as-deposited PVDF film. The additive dehydrates at the further elevated temperature. A corresponding product is also disclosed.

Abstract translation: 基板上的铁电性聚（偏二氟乙烯）膜及其形成方法公开了从前体溶液在基材上制备聚（偏二氟乙烯）（“PVDF”）膜的方法。 该方法包括制备用于PVDF膜的前体溶液并将添加剂溶解在前体溶液中，添加剂选自：水合物盐和吸湿性化合物。 将PVDF加入到前体溶液中。 将PVDF溶液涂覆在基材上以形成沉积的PVDF膜，其在高温下干燥并结晶。 干燥并结晶沉积的PVDF膜在进一步升高的温度下退火。 进一步升高的温度大于升高的温度但小于沉积的PVDF膜的熔点。 添加剂在进一步升高的温度下脱水。 还公开了相应的产品。

公开(公告)号：US07018862B2

公开(公告)日：2006-03-28

申请号：US10619923

申请日：2003-07-15

Applicant: Kui Yao ,  Xujiang He ,  Jian Zhang ,  Santiranjan Shannigrahi

Inventor： Kui Yao ,  Xujiang He ,  Jian Zhang ,  Santiranjan Shannigrahi

IPC: H01L21/46

CPC classification number: B81C1/00587 ,  B81B3/0035

Abstract: A method for fabricating a MEMS device comprises providing a substrate having a back side, a front side opposite to the back side and a periphery portion. A desired microstructure is formed on the back side of the substrate. The substrate is then supported for rotation. A precursor solution is deposited on the front side of the substrate during rotation so that a thin film layer may be formed thereon. During formation of the thin film layer, the substrate is supported and rotated that the microstructure formed on the back side is protected.

Abstract translation: 一种制造MEMS器件的方法包括提供具有背面，与背侧相对的正面和周边部分的基板。 在衬底的背面形成所需的微结构。 然后支撑基板旋转。 在旋转期间，前体溶液沉积在基板的前侧，从而可以在其上形成薄膜层。 在形成薄膜层的过程中，基板被支撑并旋转，使得在背面形成的微结构被保护。

公开(公告)号：US20110084669A1

公开(公告)日：2011-04-14

申请号：US12438121

申请日：2007-08-22

Applicant: Kui Yao ,  Yee Yuan Tan

Inventor： Kui Yao ,  Yee Yuan Tan

IPC: H02J15/00

CPC classification number: H02J15/00 ,  G06K19/0707 ,  G06K19/0723 ,  H02J5/00 ,  H02J17/00

Abstract: A power supply device and system have an electrically polarized element in which a remnant electrical polarization is formed and retained. Electrodes are formed on the electrically polarized elements and the remnant electrical polarization generates an electrical potential on the electrodes. Electrical circuits are coupled to the electrically polarized element to control the external electric charges attracted and distributed on the electrodes, for establishing the electrical potential on the electrodes. The electrodes can output electric currents by controlling the external electric charges distribution. The electrically polarized element may be made of ferroelectric material, including a ferroelectric bulk ceramic, ferroelectric multilayer ceramic, ferroelectric single crystal, ferroelectric thin film, ferroelectric thick film and ferroelectric polymer, and all the other materials with electric polarization retained therein. Power supply devices and systems made according to the present invention have very long standby time, small in size and efficient for many applications including RF systems.

Abstract translation: 电源装置和系统具有形成并保持残余电极化的电极化元件。 电极形成在电极化元件上，剩余的电极化在电极上产生电位。 电路耦合到电极化元件以控制吸引并分布在电极上的外部电荷，以在电极上建立电位。 电极可以通过控制外部电荷分布来输出电流。 电极化元件可以由铁电体块陶瓷，铁电多层陶瓷，铁电单晶，铁电薄膜，铁电厚膜和铁电聚合物等铁电体材料，以及其中保留有电极化性的所有其他材料制成。 根据本发明制造的电源设备和系统具有非常长的待机时间，尺寸小且对于包括RF系统的许多应用来说是有效的。

公开(公告)号：US20110081733A1

公开(公告)日：2011-04-07

申请号：US12928092

申请日：2010-12-03

Applicant: Kui Yao ,  Santiranjan Shannigrahi ,  Mei M. Chen ,  Bee K. Gan

Inventor： Kui Yao ,  Santiranjan Shannigrahi ,  Mei M. Chen ,  Bee K. Gan

IPC: H01L31/18

CPC classification number: H01L31/0264 ,  H01L37/02 ,  H02S99/00

Abstract: The present invention provides a thin film photovoltaic device and a method of forming a thin film photovoltaic device. The thin film photovoltaic device has a substrate, a thin film layer formed on the substrate and first and second electrodes formed on one side of the thin film layer. By applying an electric field over the first and second electrodes, the thin film layer is polarized in a direction parallel to the surface plane of the film. Upon exposure to light, the thin film layer converts light energy into electricity. According to the method, a thin film layer is formed on a substrate. A first electrode and a second electrode are formed on one side of the thin film layer. By applying an electric field over the first and second electrodes, the thin film layer is polarized in a direction parallel to the surface plane of the film.

Abstract translation: 本发明提供薄膜光伏器件和形成薄膜光伏器件的方法。 薄膜光电器件具有基板，形成在基板上的薄膜层和形成在薄膜层的一侧上的第一和第二电极。 通过在第一和第二电极上施加电场，薄膜层在平行于膜的表面平面的方向上被极化。 在曝光时，薄膜层将光能转换成电能。 根据该方法，在基板上形成薄膜层。 第一电极和第二电极形成在薄膜层的一侧上。 通过在第一和第二电极上施加电场，薄膜层在平行于膜的表面平面的方向上被极化。

公开(公告)号：US20070241304A1

公开(公告)日：2007-10-18

申请号：US11404195

申请日：2006-04-13

Applicant: Kui Yao ,  Bee Gan

Inventor： Kui Yao ,  Bee Gan

IPC: C04B35/00

CPC classification number: C04B35/62675 ,  C04B35/493 ,  C04B35/499 ,  C04B35/6262 ,  C04B2235/3206 ,  C04B2235/3244 ,  C04B2235/3248 ,  C04B2235/3251 ,  C04B2235/3255 ,  C04B2235/3279 ,  C04B2235/3284 ,  C04B2235/656 ,  C04B2235/768 ,  C04B2235/77 ,  C04B2235/81

Abstract: The present invention provides new ferroelectric ceramic materials which can be sintered at a temperature lower than that of the conventional ferroelectric ceramic materials and upon sintering, devices formed of the new ferroelectric ceramic materials possesses excellent piezoelectric properties which are suitable for many industrial applications. The ferroelectric ceramic material includes a composition with a general formula of wPb(Ni1/3Nb2/3)O3−xPb(Zn1/3Nb2/3)O3−yPb(Mg1/3Nb2/3)O3−zPbZrO3−(1−w−x−y−z)PbTiO3, in which 0

Abstract translation: 本发明提供新的铁电陶瓷材料，其可以在比常规铁电陶瓷材料低的温度下烧结，并且在烧结时，由新的铁电陶瓷材料形成的器件具有优异的压电性能，其适用于许多工业应用。 铁电陶瓷材料包括具有通式wPb（Ni 1/3 N 2 Nb 3/3）O 3 -xPb（Zn 3 / 3Nb 2/3 3）O 3 -yPb（Mg 1/3 Nb 2） 其中0 3 0