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公开(公告)号：US20120170009A1
公开(公告)日：2012-07-05
申请号：US13338750
申请日：2011-12-28
CPC分类号： B01D53/0415 , B01D53/40 , B01D53/42 , B01D2253/102 , B01D2253/206 , B01D2253/25 , B01D2257/40 , B01D2257/406 , B01D2257/70 , B01D2258/0216 , B01D2258/06 , B01D2259/4508 , B01D2259/4591 , G03F7/70908
摘要： A plurality of filter boxes which hold chemical filters include: a first filter box having a frame which holds a chemical filter and which has a guide groove provided on a side surface of the frame; and a second filter box having a frame which holds a chemical filter and which has a guide groove provided on a side surface of the frame; wherein the guide groove of the first filter box and the guide groove of the second filter box are different from each other at least in one of a width and a depth thereof. A plurality of filters can be installed or exchanged efficiently or in such a manner that the filters are positioned easily.
摘要翻译： 保持化学过滤器的多个过滤箱包括：第一过滤箱，其具有保持化学过滤器的框架，并且具有设置在框架的侧表面上的引导槽; 以及第二过滤箱，其具有保持化学过滤器的框架，并且具有设置在所述框架的侧表面上的引导槽; 其特征在于，所述第一过滤箱的引导槽和所述第二过滤器箱的所述引导槽的宽度和深度的至少一个彼此不同。 可以有效地或以这样的方式安装或交换多个过滤器，使得过滤器容易定位。
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2.发明申请FILTER HOLDING APPARATUS, EXPOSURE APPARATUS, AND METHOD FOR PRODUCING DEVICE 审中-公开过滤器装置，曝光装置及其制造方法公开(公告)号：US20110122379A1
公开(公告)日：2011-05-26
申请号：US12945042
申请日：2010-11-12
CPC分类号： F24F13/28 , B01D53/40 , B01D53/44 , B01D53/58 , B01D2257/406 , F24F1/0071 , G03F7/70916
摘要： A filter holding apparatus holding a first chemical filter and a second chemical filter, includes a first frame which holds the first chemical filter and which has a first guide groove provided on a side surface of the first frame; a second frame which holds the second chemical filter and which has a second guide groove provided on a side surface of the second frame and which is arranged while being overlapped with the first frame; and each of the first and second guide grooves has a first groove which is communicated with a back surface of one of the first and second frames, and a second groove which is communicated with the first groove and which extends toward an upper end of one of the first and second frames; wherein a distance between the second groove and the back surface in the first frame is different from a distance between the second groove and the back surface in the second frame. A plurality of filters can be installed or exchanged efficiently and in such a manner that the filters are positioned easily.
摘要翻译： 保持第一化学过滤器和第二化学过滤器的过滤器保持装置包括：第一框架，其保持第一化学过滤器并且具有设置在第一框架的侧表面上的第一引导槽; 第二框架，其保持所述第二化学过滤器，并且具有设置在所述第二框架的侧表面上并且与所述第一框架重叠配置的第二引导槽; 并且所述第一和第二引导槽中的每一个具有与所述第一和第二框架中的一个的后表面连通的第一凹槽和与所述第一凹槽连通并且朝向所述第一凹槽中的一个的上端延伸的第二凹槽 第一和第二帧; 其中所述第一框架中的所述第二槽和所述后表面之间的距离与所述第二框架中的所述第二槽和所述后表面之间的距离不同。 可以有效地安装或交换多个过滤器，并且以使得过滤器容易定位的方式。
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3.发明授权Exposure apparatus, device manufacturing method and environmental control method of exposure apparatus 失效曝光装置，装置制造方法和曝光装置的环境控制方法公开(公告)号：US06784972B2
公开(公告)日：2004-08-31
申请号：US09994053
申请日：2001-11-27
IPC分类号： G03B2752
CPC分类号： G03F7/70858 , G03F7/70875 , G03F7/70883 , G03F7/70891
摘要： An air conditioner arranged in a machine chamber supplies gas for air conditioning into an exposure chamber via a supply path, and performs air conditioning of the exposure chamber. Then, the gas for air conditioning that has performed air conditioning returns to the machine chamber via an exhaust path. A chemical filter is provided in part of the exhaust path returning to the machine chamber from the exposure chamber. This filter securely removes contaminants that are introduced by outgassing and the like in an exposure apparatus main body and that are contained in the gas for air conditioning returning to the machine chamber from the exposure chamber. Accordingly, the inside of the exposure chamber can be kept chemically clean. Therefore, highly accurate exposure quantity control and thus highly accurate exposure can be performed for a long period of time, and high throughput can be maintained for a long period of time.
摘要翻译： 布置在机器室中的空调机通过供给路径将用于空调的气体供给到曝光室，并进行曝光室的空调。 然后，进行空调的空调用气体经由排气路返回到机械室。 在从曝光室返回到机器室的排气路径的一部分中设置有化学过滤器。 该过滤器可靠地清除在曝光装置主体中通过除气等引入的污染物，并且被包含在从曝光室返回机器室的用于空调的气体中。 因此，可以使曝光室的内部保持化学清洁。 因此，可以长时间地进行高精度的曝光量控制，从而高度准确的曝光，并且可以长时间保持高通量。
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4.发明申请FILTER APPARATUS, FILTER ACCOMMODATING METHOD, EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE 审中-公开过滤装置，过滤器容纳方法，曝光装置及其制造方法公开(公告)号：US20110122378A1
公开(公告)日：2011-05-26
申请号：US12945041
申请日：2010-11-12
CPC分类号： F24F13/28 , B01D53/40 , B01D53/44 , B01D53/58 , B01D2257/406 , F24F1/0071 , G03F7/70916 , Y10T29/49826
摘要： A filter apparatus which holds a chemical filter includes a frame which holds the chemical filter and which has a guide groove provided on a side surface of the frame; and a casing which accommodates the frame. The guide groove has a first groove which is communicated with a back surface of the frame, and a second groove which is communicated with the first groove and which extends from a front surface of the frame toward an upper end thereof. The casing has a shaft member which is engageable with the first groove to support the frame and which is engageable with the second groove to release the frame from being supported. It is possible to install the filter efficiently so that the filter can be positioned with ease, and to unload the filter efficiently.
摘要翻译： 保持化学过滤器的过滤器装置包括保持化学过滤器的框架，并且具有设置在框架的侧表面上的引导槽; 以及容纳框架的壳体。 引导槽具有与框架的后表面连通的第一凹槽和与第一凹槽连通且从框架的前表面向其上端延伸的第二凹槽。 壳体具有轴构件，其可与第一凹槽接合以支撑框架，并且其可与第二凹槽接合以使框架不被支撑。 可以有效地安装过滤器，以便过滤器可以轻松定位，并有效地卸载过滤器。
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公开(公告)号：US20110116059A1
公开(公告)日：2011-05-19
申请号：US12944824
申请日：2010-11-12
CPC分类号： H01L21/67017 , G03F7/70916
摘要： A filter box which holds a chemical filter includes a box-shaped frame which holds the chemical filter and a guide groove which is provided on a side surface of the frame. The guide groove includes a first recess which is arranged between an upper end and a lower end of the side surface of the frame and which is communicated with a side end of the side surface; and a second recess which is communicated with the first recess and which extends toward the upper end of the frame. With the guide grooves, it is possible to exchange the filter efficiently and with high positioning precision.
摘要翻译： 保持化学过滤器的过滤箱包括保持化学过滤器的箱形框架和设置在框架的侧表面上的引导槽。 引导槽包括：第一凹部，其布置在框架的侧表面的上端和下端之间，并与侧面的侧端连通; 以及与所述第一凹部连通且朝向所述框架的上端延伸的第二凹部。 通过引导槽，可以有效地以高定位精度更换过滤器。
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