发明申请
- 专利标题: FILTER HOLDING APPARATUS, EXPOSURE APPARATUS, AND METHOD FOR PRODUCING DEVICE
- 专利标题(中): 过滤器装置,曝光装置及其制造方法
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申请号: US12945042申请日: 2010-11-12
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公开(公告)号: US20110122379A1公开(公告)日: 2011-05-26
- 发明人: Koichi KATSURA , Tsukasa OGIWARA , Keiji MATSUURA , Yoshinari HORITA , Takashi MASUKAWA
- 申请人: Koichi KATSURA , Tsukasa OGIWARA , Keiji MATSUURA , Yoshinari HORITA , Takashi MASUKAWA
- 申请人地址: JP Tokyo
- 专利权人: NIKON CORPORATION
- 当前专利权人: NIKON CORPORATION
- 当前专利权人地址: JP Tokyo
- 主分类号: G03B27/52
- IPC分类号: G03B27/52 ; B01D46/12
摘要:
A filter holding apparatus holding a first chemical filter and a second chemical filter, includes a first frame which holds the first chemical filter and which has a first guide groove provided on a side surface of the first frame; a second frame which holds the second chemical filter and which has a second guide groove provided on a side surface of the second frame and which is arranged while being overlapped with the first frame; and each of the first and second guide grooves has a first groove which is communicated with a back surface of one of the first and second frames, and a second groove which is communicated with the first groove and which extends toward an upper end of one of the first and second frames; wherein a distance between the second groove and the back surface in the first frame is different from a distance between the second groove and the back surface in the second frame. A plurality of filters can be installed or exchanged efficiently and in such a manner that the filters are positioned easily.
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