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公开(公告)号：US08198162B2
公开(公告)日：2012-06-12
申请号：US12351266
申请日：2009-01-09
申请人： Kazuya Sekiguchi , Yoshio Fukayama , Yuji Takahashi , Tomokuni Chino , Tsuyoshi Kachi , Katsuhiro Mitsui , Daisuke Ono , Tatsuhiko Miura
发明人： Kazuya Sekiguchi , Yoshio Fukayama , Yuji Takahashi , Tomokuni Chino , Tsuyoshi Kachi , Katsuhiro Mitsui , Daisuke Ono , Tatsuhiko Miura
IPC分类号： H01L21/336
CPC分类号： H01L29/7813 , H01L21/2855 , H01L21/67069 , H01L23/53223 , H01L29/456 , H01L29/66719 , H01L29/66727 , H01L29/66734 , H01L2924/0002 , H01L2924/00
摘要： Provided is a manufacturing method of a semiconductor device wherein the generation of voids is prevented in aluminum-based electrodes or the like. The method is suitable for manufacturing a semiconductor device adapted for vehicles, which is required to have a high reliability. However, it is very difficult that power semiconductor devices such as power MOSFETs, in particular, trench gate type power MOS devices are formed without having any void since the thickness of aluminum-based electrodes thereof is as large as about 3500 to 5500 nm (2.5 μm or more). In the present invention, a method is provided wherein at the time of forming an aluminum-based electrode metal film positioned over a wafer and having a thickness of 2.5 μm or more over a highland/lowland-repeated region in a line and space form by sputtering, the temperature of the wafer is set to 400° C. or higher and lower than 500° C.
摘要翻译： 提供一种半导体器件的制造方法，其中在铝基电极等中防止空隙的产生。 该方法适用于制造适于车辆的半导体装置，其需要具有高的可靠性。 然而，功率MOSFET特别是沟槽栅型功率MOS器件等功率半导体器件由于铝基电极的厚度大到3500〜5500nm（2.5 μm以上）。 在本发明中，提供了一种方法，其中在形成位于晶片上方的铝基电极金属膜上，并且在线和空间形式的高地/低地重复区域中具有2.5μm或更大的厚度时，通过 溅射时，将晶片的温度设定为400℃以上且低于500℃
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公开(公告)号：US4861559A
公开(公告)日：1989-08-29
申请号：US942376
申请日：1986-12-16
申请人： Ko Sugisawa , Kazuya Sekiguchi , Kiyoaki Tuji , Akinobu Ono
发明人： Ko Sugisawa , Kazuya Sekiguchi , Kiyoaki Tuji , Akinobu Ono
摘要： An apparatus for continuously sterilizes and fills food and medicines containing solids. In this apparatus, a filler nozzle is disposed downstream of a back-pressure tank, and a control valve is interposed between the back-pressure tank and the filler nozzle for controlling the flow rate of the products which are delivered from the sterilizer to the back-pressure tank. The control valve avoids a remarkable pressure loss which might otherwise be invited in the series passages of the apparatus. The outflow of air from the back pressure tank to the filler nozzle is minimized so that the back pressure can be applied to the sterilizer as stably as possible. At the same time, the sterilized products are continuously fed to the filler nozzle so that they can be packed simultaneously with their upstream sterilization.
摘要翻译： 用于连续消毒和填充含有固体的食品和药物的装置。 在该装置中，在背压罐的下游配置有填充喷嘴，并且在背压罐和填充喷嘴之间配置有控制阀，用于控制从灭菌器向背部输送的产品的流量 压力罐。 控制阀避免了可能会在设备的串联通道中引起明显的压力损失。 将空气从背压罐流出到填充喷嘴的流量最小化，使得背压可以尽可能稳定地施加到灭菌器。 同时，将灭菌的产品连续地供给到填充喷嘴，使得它们可以与其上游灭菌同时进行包装。
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公开(公告)号：US4597945A
公开(公告)日：1986-07-01
申请号：US587368
申请日：1984-03-08
申请人： Ko Sugisawa , Kazuya Sekiguchi , Kiyoaki Tsuzi , Akinobu Ono
发明人： Ko Sugisawa , Kazuya Sekiguchi , Kiyoaki Tsuzi , Akinobu Ono
摘要： A sterilization apparatus suitable for sterilizing food and medicines containing solid particles, which comprises a forcing device, a sterilizer, a backpressure tank and a backpressure device. The sterilization apparatus is sterilized beforehand under application of a backpressure by employing the forcing device and the backpressure device. The products are sterilized in the sterilizer under pressure by the forcing device and the backpressure tank, and then the sterilized products are collected in the backpressure tank.
摘要翻译： 一种灭菌装置，适用于对包含强制装置，灭菌器，背压罐和背压装置的含有固体颗粒的食品和药物进行杀菌。 通过使用强制装置和背压装置，在应用背压下预先对灭菌装置进行灭菌。 产品在压力下通过强制装置和背压罐在灭菌器中灭菌，然后将无菌产品收集在背压罐中。
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公开(公告)号：US4539903A
公开(公告)日：1985-09-10
申请号：US601492
申请日：1984-04-18
CPC分类号： B65B37/00 , A23L3/0155
摘要： A filling apparatus for charging a liquid or highly viscous product into containers. The apparatus has a pressurizing tank, buffer tank, filling tank and a filling machine. The tanks have controllable pneumatic internal pressure. The product is fed at a high pressure from the pressurizing tank to the buffer tank and, after decreasing the pressure in the buffer tank, the product is transferred at the normal or low pressure from the buffer tank to the filling tank and filling machine.
摘要翻译： 一种用于将液体或高粘度产品装入容器的填充装置。 该装置具有加压槽，缓冲罐，填充槽和灌装机。 坦克具有可控的气动内部压力。 该产品以高压从加压罐进入缓冲罐，并且在减缓缓冲罐中的压力之后，将产物以正常或低压从缓冲罐转移至填充罐和灌装机。
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5.发明申请Cleaning apparatus for cleaning component part of magnetic disk drive and cleaning method of cleaning component part of magnetic disk drive 审中-公开用于清洁磁盘驱动器的部件的清洁装置和清洁磁盘驱动器的组成部分的清洁方法公开(公告)号：US20090165824A1
公开(公告)日：2009-07-02
申请号：US12316749
申请日：2008-12-15
申请人： Kazuya Sekiguchi , Hiroyuki Sugimoto , Hirokazu Yamamoto , Akiko Hashi , Katsuhiro Ota , Mieko Kashi , Toshinori Jinoka , Takuya Kambayashi
发明人： Kazuya Sekiguchi , Hiroyuki Sugimoto , Hirokazu Yamamoto , Akiko Hashi , Katsuhiro Ota , Mieko Kashi , Toshinori Jinoka , Takuya Kambayashi
CPC分类号： G11B5/41 , G11B5/3173
摘要： Embodiments of the present invention improve the efficiency of a cleaning process for cleaning a component part of a magnetic disk drive in a magnetic disk drive manufacturing line. According to one embodiment, a magnetic disk part cleaning apparatus is included in a head stack assembly (HSA) cleaning line for cleaning head stack assemblies of magnetic disk drives included in a magnetic disk drive manufacturing line. The magnetic disk part cleaning apparatus is disposed between a HSA assembly line for assembling a head stack assembly, and head disk assembly (HDA) assembly line for assembling a head disk assembly including the head stack assembly and is connected directly to at least either of the HSA assembly line and the HDA assembly line.
摘要翻译： 本发明的实施例提高了用于清洁磁盘驱动器生产线中的磁盘驱动器的部件的清洁处理的效率。 根据一个实施例，磁盘部件清洁装置被包括在用于清洁包括在磁盘驱动器生产线中的磁盘驱动器的磁头堆叠组件的磁头堆叠组件（HSA）清洁线中。 磁盘部件清洁装置设置在用于组装磁头堆叠组件的HSA组装线和用于组装包括磁头组组件的磁头组件的磁头盘组件（HDA）组装线之间，并且直接连接至磁头组件 HSA装配线和HDA装配线。
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公开(公告)号：US20080068746A1
公开(公告)日：2008-03-20
申请号：US11903010
申请日：2007-09-19
申请人： Jiro Kaneko , Masaki Ootsuka , Yuuichi Ootani , Kazuya Sekiguchi
发明人： Jiro Kaneko , Masaki Ootsuka , Yuuichi Ootani , Kazuya Sekiguchi
IPC分类号： G11B33/14
CPC分类号： G11B25/043 , G11B33/148
摘要： Embodiments of the present invention effectively control utilizing a spoiler, the windage vibration of a magnetic head caused by the airflow generated in accordance with rotation of a magnetic disk, while reducing the dust flowing in on the downstream side of the spoiler. According to one embodiment, a spoiler is provided with wings facing a plurality of magnetic disks and a supporting section for the wings is disposed on the upstream side of a head stack assembly in the airflow direction in accordance with the rotation of the magnetic disks. Further, the wings each extend in a direction from the outer circumferences of the magnetic disks towards the spindle shaft while reducing the width of the wing, and is formed to have the width of the wing in a range of 2.7% through 2.9% of the circumferential length of the magnetic disks in a range of two thirds of the length of the wing in a direction towards the spindle shaft from a region located at the outer circumferences of the magnetic disks.
摘要翻译： 本发明的实施例有效地控制利用扰流器，由根据磁盘的旋转产生的气流引起的磁头的风阻振动，同时减少在扰流器的下游侧流动的灰尘。 根据一个实施例，扰流器设置有面向多个磁盘的翼，并且用于翼的支撑部分根据磁盘的旋转设置在气缸组件的上游侧。 此外，翼片各自从磁盘的外周朝向主轴的方向延伸，同时减小翼的宽度，并且形成为具有翼的宽度在2.7％至2.9％的范围内 在位于磁盘的外圆周的区域中，在朝向主轴的方向上的翼的长度的三分之二的范围内的磁盘的圆周长度。
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公开(公告)号：US5388879A
公开(公告)日：1995-02-14
申请号：US128256
申请日：1993-09-28
申请人： Kazuya Sekiguchi , Masao Taguchi , Hitoshi Iwata
发明人： Kazuya Sekiguchi , Masao Taguchi , Hitoshi Iwata
CPC分类号： B25J15/0616 , Y10S294/907
摘要： A suction-type metering robot hand comprising (a) a hollow suction pad having a gas-permeable obstacle at an opening of the suction pad; and (b) a main body of the robot hand supporting the suction pad and having a vacuum passage communicating with the suction pad. According to the robot hand of the present invention, the provision of the net on the opening of the suction pad makes it possible to suck fragile articles such as a fried cutlet, roasted bean curd, a piece of bread and the like to a desired place.
摘要翻译： 一种吸式计量机器人手，包括：（a）在所述吸盘的开口处具有透气障碍物的中空吸盘; 和（b）机器人手的主体，其支撑吸盘并具有与吸盘连通的真空通道。 根据本发明的机器人手，通过在吸盘的开口部上设置网，能够将脆性物品如油炸的小食，烤豆腐，一块面包等吸到想要的地方 。
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公开(公告)号：US5165219A
公开(公告)日：1992-11-24
申请号：US799286
申请日：1991-11-27
申请人： Kazuya Sekiguchi , Masao Taguchi , Hitoshi Iwata
发明人： Kazuya Sekiguchi , Masao Taguchi , Hitoshi Iwata
IPC分类号： B65B35/58
CPC分类号： B65B35/58
摘要： A packing device for articles having directionality that includes imaging means for taking an image of the articles, means for recognizing the direction of the articles, first memory means for storing the direction of the articles, second memory means for storing the direction of the articles to be packed into a container, and means for calculating the difference in angle between the directions stored in the first and second memory means. The direction of the robot hand for grasping the articles is controlled by the output of the calculating means.
摘要翻译： 一种用于具有指向性的物品的包装装置，包括用于拍摄物品的图像的成像装置，用于识别物品的方向的装置，用于存储物品的方向的第一存储装置，用于存储物品的方向的第二存储装置 被包装在容器中，以及用于计算存储在第一和第二存储装置中的方向之间的角度差的装置。 用于抓取物品的机器人手的方向由计算装置的输出控制。
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公开(公告)号：US4516596A
公开(公告)日：1985-05-14
申请号：US623374
申请日：1984-06-22
IPC分类号： A23L3/16 , B08B9/02 , B08B9/027 , F16K11/02 , F16K11/044 , F16K11/087 , F16K25/00 , B08B9/06
CPC分类号： B08B9/0323 , F16K11/044 , F16K11/0873 , Y10T137/4259 , Y10T137/86863 , Y10T137/86895
摘要： A system having first, second and third pipes connected respectively to first, second and third ports of a three-way valve. A by-pass pipe is connected at its one end to one of the second and third ports after disconnecting the associated one of the second and third pipes therefrom and at the other end to the other of the second and third pipes prior to the cleaning operation of the system.
摘要翻译： 一种具有分别连接到三通阀的第一，第二和第三端口的第一，第二和第三管道的系统。 在清洁操作之前，将第二和第三管之间的相关联的一个从另一端连接到第二和第三管中的另一端，旁通管在其一端连接到第二和第三端口中的一个端口 的系统。
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公开(公告)号：US20090179261A1
公开(公告)日：2009-07-16
申请号：US12351266
申请日：2009-01-09
申请人： Kazuya SEKIGUCHI , Yoshio Fukayama , Yuji Takahashi , Tomokuni Chino , Tsuyoshi Kachi , Katsuhiro Mitsui , Daisuke Ono , Tatsuhiko Miura
发明人： Kazuya SEKIGUCHI , Yoshio Fukayama , Yuji Takahashi , Tomokuni Chino , Tsuyoshi Kachi , Katsuhiro Mitsui , Daisuke Ono , Tatsuhiko Miura
IPC分类号： H01L29/78 , H01L21/441
CPC分类号： H01L29/7813 , H01L21/2855 , H01L21/67069 , H01L23/53223 , H01L29/456 , H01L29/66719 , H01L29/66727 , H01L29/66734 , H01L2924/0002 , H01L2924/00
摘要： Provided is a manufacturing method of a semiconductor device wherein the generation of voids is prevented in aluminum-based electrodes or the like. The method is suitable for manufacturing a semiconductor device adapted for vehicles, which is required to have a high reliability. However, it is very difficult that power semiconductor devices such as power MOSFETs, in particular, trench gate type power MOS devices are formed without having any void since the thickness of aluminum-based electrodes thereof is as large as about 3500 to 5500 nm (2.5 μm or more). In the present invention, a method is provided wherein at the time of forming an aluminum-based electrode metal film positioned over a wafer and having a thickness of 2.5 μm or more over a highland/lowland-repeated region in a line and space form by sputtering, the temperature of the wafer is set to 400° C. or higher and lower than 500° C.
摘要翻译： 提供一种半导体器件的制造方法，其中在铝基电极等中防止空隙的产生。 该方法适用于制造适于车辆的半导体装置，其需要具有高的可靠性。 然而，功率MOSFET特别是沟槽栅型功率MOS器件等功率半导体器件由于铝基电极的厚度大到3500〜5500nm（2.5 妈妈或更多）。 在本发明中，提供了一种方法，其中在通过在线和空间形式的高原/低地重复区域上形成位于晶片上并具有2.5μm或更大的厚度的铝基电极金属膜时，由 溅射时，将晶片的温度设定为400℃以上且低于500℃
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