Abstract:
A semiconductor memory device includes a plurality of N and P channel MOS transistors. The plurality of MOS transistors are formed on an SOI (Silicon On Insulator) substrate. Each MOS transistor includes a source region, a drain region, and a body region located between the source region and the drain region. The body region of at least one N channel MOS transistor is electrically fixed. The body region of at least one P channel MOS transistor is rendered floating.
Abstract:
In etching a polysilicon layer above a gate electrode layer, a portion of the gate electrode layer is left thereunder. The etching process of that polysilicon layer and that gate electrode layer is carried out in two steps of etching the polysilicon layer and an interlayer insulating layer, and etching the gate electrode layer and the gate oxide film. Therefore, the amount that is removed from an SOI layer can be suppressed in the manufacturing process thereof.
Abstract:
A semiconductor memory device includes a plurality of N and P channel MOS transistors. The plurality of MOS transistors are formed on an SOI (Silicon On Insulator) substrate. Each MOS transistor includes a source region, a drain region, and a body region located between the source region and the drain region. The body region of at least one N channel MOS transistor is electrically fixed. The body region of at least one P channel MOS transistor is rendered floating.
Abstract:
A semiconductor memory device includes a plurality of N and P channel MOS transistors. The plurality of MOS transistors are formed on an SOI (Silicon On Insulator) substrate. Each MOS transistor includes a source region, a drain region, and a body region located between the source region and the drain region. The body region of at least one N channel MOS transistor is electrically fixed. The body region of at least one P channel MOS transistor is rendered floating.
Abstract:
A semiconductor memory device includes an SOI substrate, a plurality of word lines, a plurality of bit line pairs, a plurality of memory cells and a plurality of body fixing lines. The plurality of word lines are disposed in the row direction on the SOI substrate. The plurality of bit line pairs are disposed in the column direction on the SOI substrate. The plurality of memory cells are located on the SOI substrate and each are disposed correspondingly to one of crossings between the plurality of word lines and the plurality of bit line pairs. Each of the plurality of memory cells includes a capacitor and a transistor. The transistor is connected between the capacitor and one bit line in the corresponding bit line pair. The transistor is turned on in response to the potential of the corresponding word line. The plurality of body fixing lines are disposed on the SOI substrate. The plurality of body fixing lines are supplied with a predetermined potential. The transistors in the plurality of memory cells have source regions, drain regions and body regions located between the source and drain regions. The body regions of the transistors in the plurality of memory cells are connected to the plurality of body fixing lines.
Abstract:
A clamp circuit for clamping potential of an internal node electrically connected to an external terminal has its clamping function activated and inactivated selectively in accordance with a control signal generated by a control circuit in response to a forced monitor mode activating signal. An output portion of a substrate potential generating circuit generating a prescribed internal voltage is selectively connected to the internal node in response to a control signal generated from a second control circuit in response to the forced monitor mode activating signal. In a semiconductor device having the clamp circuit for absorbing surge current, pin contact test, external monitoring of an internal potential and external application of the internal potential can be realized.
Abstract:
A semiconductor memory device includes a plurality of N and P channel MOS transistors. The plurality of MOS transistors are formed on an SOI (Silicon On Insulator) substrate. Each MOS transistor includes a source region, a drain region, and a body region located between the source region and the drain region. The body region of at least one N channel MOS transistor is electrically fixed. The body region of at least one P channel MOS transistor is rendered floating.
Abstract:
A semiconductor memory device includes a plurality of N and P channel MOS transistors. The plurality of MOS transistors are formed on an SOI (Silicon On Insulator) substrate. Each MOS transistor includes a source region, a drain region, and a body region located between the source region and the drain region. The body region of at least one N channel MOS transistor is electrically fixed. The body region of at least one P channel MOS transistor is rendered floating.
Abstract:
A semiconductor device includes an SOI substrate, trench memory cells including trench capacitors formed in the SOI substrate and a mesa or trench isolation region for isolating the trench memory cells. As a result, the trench memory cells are isolated more completely and soft errors are reduced.
Abstract:
A semiconductor memory device includes a plurality of N and P channel MOS transistors. The plurality of MOS transistors are formed on an SOI (Silicon On Insulator) substrate. Each MOS transistor includes a source region, a drain region, and a body region located between the source region and the drain region. The body region of at least one N channel MOS transistor is electrically fixed. The body region of at least one P channel MOS transistor is rendered floating.