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公开(公告)号：US20130001405A1
公开(公告)日：2013-01-03
申请号：US13539782
申请日：2012-07-02
申请人： James Albert Walker
发明人： James Albert Walker
CPC分类号： G01J1/0425 , G01J1/0411 , G01J1/0451 , G01J2001/4247
摘要： A probe card for wafer-level testing a plurality of optoelectronic devices on a wafer is provided. The probe card has both electrical and optical functionality. The probe card comprises a plurality of lenslets aligned with the plurality of optoelectronic devices to improve the optical coupling efficiency between each of the plurality of optoelectronic devices and a plurality of optical waveguides located on a probe head.
摘要翻译： 提供了用于在晶片上晶圆级测试多个光电器件的探针卡。 探针卡具有电气和光学功能。 探针卡包括与多个光电子器件对准的多个小透镜，以改善多个光电器件中的每一个与位于探头上的多个光波导之间的光耦合效率。
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公开(公告)号：US06751377B2
公开(公告)日：2004-06-15
申请号：US09861840
申请日：2001-05-21
IPC分类号： G02B642
CPC分类号： G02B6/12007 , G02B6/3502 , G02B6/3536 , G02B6/357 , G02B6/3596 , G02F1/0118 , G02F2201/063 , G02F2201/16 , G02F2203/15 , G02F2203/585
摘要： In accordance with the invention, a tunable, reconfigurable optical add-drop filter comprises a pair of optical waveguides optically coupled by a microring or microdisk resonator wherein the coupling distance between the resonator and at least one of the waveguides is micromechanically controllable. With this arrangement, the degree of coupling can be tuned after fabrication to provide high level extinction of dropped wavelengths and the filter can be dynamically reconfigured. Advantageously, laser radiation is provided to tune the resonant wavelength.
摘要翻译： 根据本发明，可调谐可重构的光分插滤波器包括由微环谐振器或微盘谐振器光学耦合的一对光波导，其中谐振器与至少一个波导之间的耦合距离是微机械可控的。 通过这种布置，可以在制造之后调整耦合度，以提供掉落波长的高电平消光，并且可以动态地重新配置滤波器。 有利地，提供激光辐射以调谐谐振波长。
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公开(公告)号：US5963684A
公开(公告)日：1999-10-05
申请号：US800732
申请日：1997-02-13
CPC分类号： G02B6/12007 , G02B6/29311 , G02B6/2938 , G02B6/4246 , G02B6/4204 , G02B6/4292 , Y10S372/703
摘要： An optical demultiplexing apparatus is capable of spatially separating a multiplexed optical signal into two or more optical wavelength signals thereof. An input multiplexed optical signal present on a first plane is imaged through a color-selective grating plane to a second plane. The color-selective grating has a nonlinear change of diffraction characteristics as a function of incident wavelength to provide substantial spatial separation in the second plane between bands of wavelengths proximate to the two or more optical wavelength signals. In another embodiment, the apparatus uses a polarization-selective grating to spatially separate a polarization-multiplexed optical signal into two substantial spatially separated optical polarization signals. In other embodiments, the optical apparatus may be used as an optical signal multiplexer, splitter, or combiner.
摘要翻译： 光解复用装置能够将复用的光信号空间分离成两个或多个光波长信号。 存在于第一平面上的输入复用光信号通过颜色选择光栅平面成像到第二平面。 色选择光栅具有作为入射波长的函数的衍射特性的非线性变化，以在靠近两个或更多个光波长信号的波长带之间的第二平面中提供实质的空间分隔。 在另一个实施例中，该装置使用偏振选择光栅将偏振复用光信号空间分离成两个基本空间上分离的光偏振信号。 在其他实施例中，光学装置可以用作光信号多路复用器，分离器或组合器。
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公开(公告)号：US09040896B2
公开(公告)日：2015-05-26
申请号：US13539782
申请日：2012-07-02
申请人： James Albert Walker
发明人： James Albert Walker
CPC分类号： G01J1/0425 , G01J1/0411 , G01J1/0451 , G01J2001/4247
摘要： A probe card for wafer-level testing a plurality of optoelectronic devices on a wafer is provided. The probe card has both electrical and optical functionality. The probe card comprises a plurality of lenslets aligned with the plurality of optoelectronic devices to improve the optical coupling efficiency between each of the plurality of optoelectronic devices and a plurality of optical waveguides located on a probe head.
摘要翻译： 提供了用于在晶片上晶圆级测试多个光电器件的探针卡。 探头卡具有电气和光学功能。 探针卡包括与多个光电子器件对准的多个小透镜，以改善多个光电器件中的每一个与位于探头上的多个光波导之间的光耦合效率。
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公开(公告)号：US06444491B1
公开(公告)日：2002-09-03
申请号：US09547122
申请日：2000-04-11
申请人： Lucian Arthur D'Asaro , Keith Wayne Goossen , Sanghee Park Hui , Betty J. Tseng , James Albert Walker
发明人： Lucian Arthur D'Asaro , Keith Wayne Goossen , Sanghee Park Hui , Betty J. Tseng , James Albert Walker
IPC分类号： H01L2144
CPC分类号： H01L25/167 , H01L31/125 , H01L2221/68359 , H01L2221/68363 , H01L2224/16225 , H01L2924/00014 , H01L2924/10253 , H01L2924/00 , H01L2224/0401
摘要： An integrated semiconductor device is formed from two fabricated semiconductor devices each having a substrate by placing an etch-resist on the substrate of the one semiconductor device, by bonding the conductors of one of the fabricated semiconductor devices to the conductors of the other fabricated semiconductor device, flowing an uncured cement (e.g. epoxy) between the etch-resist and the other substrate, allowing the cement to solidify, and removing the substrate from the one of the semiconductor devices. More specifically, a hybrid semiconductor device is formed from a GaAs/AlGaAs multiple quantum well modulator having a substrate and an IC chip having a substrate by placing an etch resist on the modulator substrate, bonding the conductors of the modulator to the conductors of the chip, wicking an uncured epoxy between the modulators and the chip, allowing the epoxy to cure, and removing the substrate from the modulator.
摘要翻译： 由两个制造的半导体器件形成集成半导体器件，每个半导体器件通过将所制造的半导体器件中的一个的导体连接到另一个制造的半导体器件的导体而在一个半导体器件的衬底上放置抗蚀剂而具有衬底 使未固化的水泥（例如环氧树脂）在抗蚀剂和另一个基底之间流动，从而允许水泥固化，并从半导体器件中的一个去除衬底。 更具体地说，混合半导体器件由GaAs / AlGaAs多量子阱调制器形成，该GaAs / AlGaAs多量子阱调制器具有衬底和具有衬底的IC芯片，通过在调制器衬底上放置蚀刻抗蚀剂，将调制器的导体与芯片的导体 在调制器和芯片之间吸收未固化的环氧树脂，允许环氧树脂固化，并从调制器中除去衬底。
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公开(公告)号：US6034431A
公开(公告)日：2000-03-07
申请号：US695496
申请日：1996-08-12
申请人： Keith Wayne Goosen , Fouad E. Kiamilev , Ashok V. Krishnamoorthy , David Andrew Barclay Miller , James Albert Walker
发明人： Keith Wayne Goosen , Fouad E. Kiamilev , Ashok V. Krishnamoorthy , David Andrew Barclay Miller , James Albert Walker
IPC分类号： H01L27/04 , H01L21/822 , H01L27/02 , H01L27/144 , H01L27/15 , H01L31/10 , H01L31/12 , H01L33/00
CPC分类号： H01L27/1443 , H01L27/0207
摘要： A method for designing an integrated circuit having optical inputs and outputs includes the step of selecting an integrated circuit design which includes at least one circuit cell design for processing electric signals. The circuit cell design has a predetermined number of electric inputs and electric outputs. The integrated circuit design also includes a plurality of layers of metalization for providing electric coupling. After the electronic integrated circuit design is selected, a predetermined number of optical input devices are located on the circuit cell design in a first prearranged orientation. The predetermined number of optical input devices is no greater than the predetermined number of electric inputs to the circuit cell. Also after the electronic circuit design is selected, a predetermined number of optical output devices are located on the circuit cell design in a second prearranged orientation. The predetermined number of optical output devices is no greater than the predetermined number of electric outputs to the circuit cell. At least a topmost layer of metalization is selected for electrically coupling each optical input device to a distinct one of the electric inputs of the circuit cell and for electrically coupling each optical output device to a distinct one of the electric outputs of the circuit cell. Finally, the completed design for the integrated circuit with optical inputs and outputs is recorded in a memory such as an electronic storage medium.
摘要翻译： 一种用于设计具有光输入和输出的集成电路的方法包括选择包括用于处理电信号的至少一个电路单元设计的集成电路设计的步骤。 电路单元设计具有预定数量的电输入和电输出。 集成电路设计还包括用于提供电耦合的多层金属化。 在选择了电子集成电路设计之后，预定数量的光输入装置以第一预先排列的方向位于电路单元设计上。 预定数量的光输入装置不大于电路单元的预定数量的电输入。 此外，在选择电子电路设计之后，预定数量的光输出装置以第二预定方向位于电路单元设计上。 预定数量的光输出装置不大于电路单元的预定数量的电输出。 选择至少最上层的金属化用于将每个光输入装置电耦合到电路单元的电输入的不同一个，并且将每个光输出装置电耦合到电路单元的不同一个电输出端。 最后，将具有光输入和输出的集成电路的完成设计记录在诸如电子存储介质的存储器中。
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公开(公告)号：US06704130B1
公开(公告)日：2004-03-09
申请号：US09415581
申请日：1999-10-08
申请人： Joseph Earl Ford , John VanAtta Gates, II , Gerard Edmond Henein , David Andrew Ramsey , James Albert Walker
发明人： Joseph Earl Ford , John VanAtta Gates, II , Gerard Edmond Henein , David Andrew Ramsey , James Albert Walker
IPC分类号： G02B2710
CPC分类号： G02B26/001 , G02B6/4214
摘要： In accordance with the invention, a electromechanical optical modulator comprising an optical membrane, a substrate and Fabry-Perot air gap between them is provided with an improved structure for controlling light transmitted into the substrate. Specifically, an etched and coated cavity is formed in the backwall of the substrate underlying the air gap to receive transmitted light and redirect it onto controllable paths within the substrate. Advantageously the substrate is silicon, and the cavity is produced by anisotropic etching.
摘要翻译： 根据本发明，包括光学膜，基底和它们之间的法布里 - 珀罗气隙的机电光学调制器具有改进的结构，用于控制透射到基底中的光。 具体来说，蚀刻和涂覆的空腔形成在气隙下面的基板的后壁中以接收透射光并将其重定向到基板内的可控路径上。 有利地，衬底是硅，并且通过各向异性蚀刻产生空腔。
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公开(公告)号：US06066844A
公开(公告)日：2000-05-23
申请号：US36189
申请日：1998-03-07
CPC分类号： G01J1/42
摘要： An optical assembly for detecting an optical signal from a signal source in systems where the intensity of the optical signal may surpass the operational range of the optical detector being used. The optical assembly includes an optical detector for converting the optical input signal into a corresponding electrical output signal. The optical detector has a set operational range of input signal intensities. An attenuator is disposed between the optical detector and the signal source. The attenuator is capable of reducing the signal intensity of the optical signal if required so that the optical signal falls within the operational range of the optical detector. A controller is electronically coupled to both the optical detector and the attenuator. The controller controls the attenuator as a function of the output signal of the optical detector, wherein the attenuator attenuates the optical signal to fall within the operational range of the optical detector.
摘要翻译： 一种光学组件，用于在其中光信号的强度可能超过所使用的光学检测器的操作范围的系统中检测来自信号源的光信号。 光学组件包括用于将光输入信号转换成对应的电输出信号的光检测器。 光检测器具有输入信号强度的设定操作范围。 衰减器设置在光学检测器和信号源之间。 如果需要，衰减器能够降低光信号的信号强度，使得光信号落入光检测器的操作范围内。 控制器电耦合到光学检测器和衰减器两者。 控制器根据光学检测器的输出信号控制衰减器，其中衰减器衰减光信号落在光学检测器的工作范围内。
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公开(公告)号：US5949571A
公开(公告)日：1999-09-07
申请号：US126352
申请日：1998-07-30
CPC分类号： G02B26/001 , G02B26/02
摘要： The specification describes a double poly Mechanical Anti-Reflection Switch (MARS) device in which shorting between the lower poly metallization and the silicon substrate is prevented by providing an insulating layer on the surface of the silicon substrate.
摘要翻译： 本说明书描述了一种双重多机械防反射开关（MARS）器件，其中通过在硅衬底的表面上提供绝缘层来防止下部聚金属化和硅衬底之间的短路。
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公开(公告)号：US5796880A
公开(公告)日：1998-08-18
申请号：US751833
申请日：1996-11-18
CPC分类号： G02B26/0841 , G02B26/0825 , G02B6/264 , G02B6/3833
摘要： In an optical transmitter, an input optical fiber delivers an optical signal to a fiber coupling modulator whose reflective surface is transformable in response to the data to be transmitted. In a first state of the modulator corresponding to a first data value, the reflective surface is flat and smooth. The optical signal, which may be a continuous-wave light, is reflected from the surface and efficiently coupled to an output fiber. In a second state of the modulator corresponding to a second data value, the reflective surface is controllably deformed to cause an aberration in reflecting the optical signal. As a result, a much reduced amount of light energy is coupled to the output fiber.
摘要翻译： 在光发射机中，输入光纤将光信号传送到光纤耦合调制器，该光纤耦合调制器的反射表面可响应待传输的数据进行变换。 在对应于第一数据值的调制器的第一状态中，反射表面是平坦和平滑的。 可以是连续波光的光信号从表面反射并且有效地耦合到输出光纤。 在对应于第二数据值的调制器的第二状态中，反射表面被可控地变形，从而引起反射光信号的像差。 结果，大量减少的光能量被耦合到输出光纤。
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