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    Apparatus and method for thermal processing of semiconductor substrates
    2.
    发明授权
    Apparatus and method for thermal processing of semiconductor substrates 失效
    半导体衬底的热处理装置和方法

    公开(公告)号：US06342691B1

    公开(公告)日：2002-01-29

    申请号：US09439833

    申请日：1999-11-12

    申请人： Kristian E. Johnsgard ,  Jean-François Daviet ,  James A. Givens ,  Stephen E. Savas ,  Brad S. Mattson ,  Ashur J. Atanos

    发明人： Kristian E. Johnsgard ,  Jean-François Daviet ,  James A. Givens ,  Stephen E. Savas ,  Brad S. Mattson ,  Ashur J. Atanos

    IPC分类号： F27B514

    CPC分类号： H01L21/67115 ,  C30B31/12

    摘要： A semiconductor substrate processing system and method of using a stable heating source with a large thermal mass relative to conventional lamp heating systems. The system dimensions and processing parameters are selected to provide a substantial heat flux to the substrate while reducing the potential of heat loss to the surrounding environment, particularly from the edges of the heat source and substrate. Aspects of the present invention include a dual resistive heater system comprising a base or primary heater, surrounded by a peripheral or edge heater. The impedance of the edge heater may be substantially matched to that of the primary heater such that a single power supply may be used to supply power to both heaters. Both resistive heaters deliver heat to a heated block, and the heaters and heated block are substantially enclosed within an insulated cavity. The walls of the insulated cavity may include multiple layers of insulation, and these layers may be substantially concentrically arranged. The innermost layers may comprise silicon carbide coated graphite; the outer layers may comprise opaque quartz. An embodiment of the invention includes a vacuum spool having a large conduction pathway for exhausting gases from the region of the chamber containing the resistive heaters, and a small conduction pathway for removing gases from other regions of the chamber. Temperature measurement sensors include thermocouples and optical pyrometers, with the advantage that a thermocouple may be used to calibrate an optical pyrometer in situ. An insulating shutter may be used to insulate the port through which substrates are inserted into the insulated and heated cavity. Support posts and gas injectors may include ports for optical pyrometers.

    摘要翻译： 相对于传统的灯加热系统，半导体衬底处理系统和使用具有大热质量的稳定的热源的方法。 选择系统尺寸和处理参数以向基板提供实质的热通量，同时减少对周围环境，特别是从热源和基板的边缘的热损失的潜力。 本发明的方面包括双电阻加热器系统，其包括被周边或边缘加热器包围的基座或主加热器。 边缘加热器的阻抗可以与初级加热器的阻抗基本匹配，使得单个电源可以用于向两个加热器供电。 两个电阻加热器将热量传递到加热块，并且加热器和加热块基本上封闭在绝缘腔内。 绝缘腔的壁可以包括多层绝缘体，并且这些层可以基本上同心地布置。 最内层可包括碳化硅涂覆的石墨; 外层可以包括不透明的石英。 本发明的实施例包括具有用于从包含电阻加热器的室的区域排出气体的大的传导路径的真空阀芯，以及用于从腔室的其它区域去除气体的小的传导路径。 温度测量传感器包括热电偶和光学高温计，其优点是热电偶可用于原位校准光学高温计。 可以使用绝缘快门来将通过哪个基板插入绝缘和加热腔的端口绝缘。 支撑柱和气体注入器可以包括用于光学高温计的端口。

    Life raft
    7.
    发明授权
    Life raft 失效
    救生筏

    公开(公告)号：US4890569A

    公开(公告)日：1990-01-02

    申请号：US200453

    申请日：1988-05-31

    申请人： James A. Givens

    发明人： James A. Givens

    IPC分类号： B63B13/00 ,  B63C9/06

    CPC分类号： B63C9/24 ,  B63B13/00 ,  B63C2009/042 ,  B63C2009/044

    摘要： A self-bailing stabilized life raft includes a bailing chamber located between a stabilization chamber and a flotation platform. Water received from a flexible floor of the flotation platform is exhausted from the bailing chamber in response to wave and/or occupant interaction with the life raft. A raft inflation apparatus includes a pump chamber actuated by raft motion.

    摘要翻译： 自救式稳定的救生筏包括位于稳定室和浮选平台之间的吊舱。 响应于与救生筏的波浪和/或乘员的相互作用，从浮选平台的柔性地板接收的水从吊舱中排出。 筏式充气装置包括由木筏运动致动的泵室。

    Stabilized survival raft
    8.
    再颁专利
    Stabilized survival raft 失效
    稳定的救生筏

    公开(公告)号：USRE32560E

    公开(公告)日：1987-12-15

    申请号：US284200

    申请日：1981-07-17

    申请人： James A. Givens

    发明人： James A. Givens

    IPC分类号： B63C9/06

    CPC分类号： B63C9/06 ,  B63C2009/023 ,  B63C2009/042 ,  B63C2009/044

    摘要： A stabilized life raft utilizing a fluid filled depending buoy chamber for overall stabilization and including as improved features thereon a peripheral skirt chamber which fills with the raft supporting fluid upon deployment of the raft and serves as a temporary stabilizer while the buoy chamber becomes filled. The buoy chamber includes baffles to impede the flow of the stabilizing fluid from one portion of the chamber to another in the event of a sudden weight shift within the raft. An improved valve permits a more rapid inward flow of fluid upon deployment of the raft and yet prevents outward flow in instances where the buoyant raft is suddenly thrust upwardly by elements such as waves. The raft, because of the particular placement of the various structural elements in conjunction with the placement of the survival gear and inflation system, is automatically self-righting.