公开(公告)号：US20060214221A1

公开(公告)日：2006-09-28

申请号：US11445020

申请日：2006-05-31

申请人： Ashok Challa ,  Alan Elbanhawy ,  Thomas Grebs ,  Nathan Kraft ,  Dean Probst ,  Rodney Ridley ,  Steven Sapp ,  Qi Wang ,  Chongman Yun ,  J.G. Lee ,  Peter Wilson ,  Joseph Yedinak ,  J.Y. Jung ,  H.C. Jang ,  Babak Sani ,  Richard Stokes ,  Gary Dolny ,  John Mytych ,  Becky Losee ,  Adam Selsley ,  Robert Herrick ,  James Murphy ,  Gordon Madson ,  Bruce Marchant ,  Christopher Rexer ,  Christopher Kocon ,  Debra Woolsey

发明人： Ashok Challa ,  Alan Elbanhawy ,  Thomas Grebs ,  Nathan Kraft ,  Dean Probst ,  Rodney Ridley ,  Steven Sapp ,  Qi Wang ,  Chongman Yun ,  J.G. Lee ,  Peter Wilson ,  Joseph Yedinak ,  J.Y. Jung ,  H.C. Jang ,  Babak Sani ,  Richard Stokes ,  Gary Dolny ,  John Mytych ,  Becky Losee ,  Adam Selsley ,  Robert Herrick ,  James Murphy ,  Gordon Madson ,  Bruce Marchant ,  Christopher Rexer ,  Christopher Kocon ,  Debra Woolsey

IPC分类号： H01L29/76

CPC分类号： H01L29/407 ,  H01L21/26586 ,  H01L21/3065 ,  H01L21/30655 ,  H01L21/31116 ,  H01L21/6835 ,  H01L23/4952 ,  H01L23/49816 ,  H01L29/0623 ,  H01L29/0634 ,  H01L29/0653 ,  H01L29/0661 ,  H01L29/0696 ,  H01L29/1095 ,  H01L29/165 ,  H01L29/402 ,  H01L29/41766 ,  H01L29/4236 ,  H01L29/42368 ,  H01L29/4238 ,  H01L29/4933 ,  H01L29/495 ,  H01L29/66348 ,  H01L29/66734 ,  H01L29/7396 ,  H01L29/7802 ,  H01L29/7804 ,  H01L29/7805 ,  H01L29/7806 ,  H01L29/7811 ,  H01L29/7813 ,  H01L29/7815 ,  H01L29/7828 ,  H01L29/7831 ,  H01L2221/6834 ,  H01L2221/68363 ,  H01L2224/16 ,  H01L2924/01012 ,  H01L2924/01019 ,  H01L2924/01078 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/1301 ,  H01L2924/13034 ,  H01L2924/1305 ,  H01L2924/13055 ,  H01L2924/13091 ,  H01L2924/15311 ,  H01L2924/1532 ,  H01L2924/19041 ,  H01L2924/30105 ,  H01L2924/3011 ,  H01L2924/3025 ,  H02M3/00 ,  H02M3/33592 ,  H02M7/48 ,  Y02B70/1475 ,  H01L2924/00 ,  H01L2924/00014

摘要： Various embodiments for improved power devices as well as their methods of manufacture, packaging and circuitry incorporating the same for use in a wide variety of power electronic applications are disclosed. One aspect of the invention combines a number of charge balancing techniques and other techniques for reducing parasitic capacitance to arrive at different embodiments for power devices with improved voltage performance, higher switching speed, and lower on-resistance. Another aspect of the invention provides improved termination structures for low, medium and high voltage devices. Improved methods of fabrication for power devices are provided according to other aspects of the invention. Improvements to specific processing steps, such as formation of trenches, formation of dielectric layers inside trenches, formation of mesa structures and processes for reducing substrate thickness, among others, are presented. According to another aspect of the invention, charge balanced power devices incorporate temperature and current sensing elements such as diodes on the same die. Other aspects of the invention improve equivalent series resistance (ESR) for power devices, incorporate additional circuitry on the same chip as the power device and provide improvements to the packaging of charge balanced power devices.

公开(公告)号：US20050167742A1

公开(公告)日：2005-08-04

申请号：US11026276

申请日：2004-12-29

申请人： Ashok Challa ,  Alan Elbanhawy ,  Thomas Grebs ,  Nathan Kraft ,  Dean Probst ,  Rodney Ridley ,  Steven Sapp ,  Qi Wang ,  Chongman Yun ,  J.G. Lee ,  Peter Wilson ,  Joseph Yedinak ,  J.Y. Jung ,  H.C. Jang ,  Babak Sani ,  Richard Stokes ,  Gary Dolny ,  John Mytych ,  Becky Losee ,  Adam Selsley ,  Robert Herrick ,  James Murphy ,  Gordon Madson ,  Bruce Marchant ,  Christopher Rexer ,  Christopher Kocon ,  Debra Woolsey

发明人： Ashok Challa ,  Alan Elbanhawy ,  Thomas Grebs ,  Nathan Kraft ,  Dean Probst ,  Rodney Ridley ,  Steven Sapp ,  Qi Wang ,  Chongman Yun ,  J.G. Lee ,  Peter Wilson ,  Joseph Yedinak ,  J.Y. Jung ,  H.C. Jang ,  Babak Sani ,  Richard Stokes ,  Gary Dolny ,  John Mytych ,  Becky Losee ,  Adam Selsley ,  Robert Herrick ,  James Murphy ,  Gordon Madson ,  Bruce Marchant ,  Christopher Rexer ,  Christopher Kocon ,  Debra Woolsey

IPC分类号： G06F1/26 ,  H01L21/265 ,  H01L21/3065 ,  H01L21/311 ,  H01L21/336 ,  H01L21/68 ,  H01L23/495 ,  H01L23/498 ,  H01L29/06 ,  H01L29/165 ,  H01L29/40 ,  H01L29/417 ,  H01L29/423 ,  H01L29/49 ,  H01L29/78 ,  H02M3/00 ,  H02M3/335

CPC分类号： H01L29/7802 ,  H01L21/26586 ,  H01L21/3065 ,  H01L21/30655 ,  H01L21/31116 ,  H01L21/6835 ,  H01L23/4952 ,  H01L23/49816 ,  H01L29/0623 ,  H01L29/0634 ,  H01L29/0653 ,  H01L29/0696 ,  H01L29/1095 ,  H01L29/165 ,  H01L29/402 ,  H01L29/407 ,  H01L29/41766 ,  H01L29/42368 ,  H01L29/4238 ,  H01L29/4933 ,  H01L29/495 ,  H01L29/66734 ,  H01L29/7804 ,  H01L29/7805 ,  H01L29/7806 ,  H01L29/7811 ,  H01L29/7813 ,  H01L29/7815 ,  H01L29/7828 ,  H01L29/7831 ,  H01L2221/6834 ,  H01L2221/68363 ,  H01L2224/16 ,  H01L2224/16245 ,  H01L2924/01012 ,  H01L2924/01019 ,  H01L2924/01078 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/1301 ,  H01L2924/13034 ,  H01L2924/1305 ,  H01L2924/13055 ,  H01L2924/13091 ,  H01L2924/15311 ,  H01L2924/1532 ,  H01L2924/19041 ,  H01L2924/30105 ,  H01L2924/3011 ,  H01L2924/3025 ,  H02M3/00 ,  H02M3/33592 ,  H02M7/48 ,  Y02B70/1475 ,  H01L2924/00 ,  H01L2924/00014

摘要： Various embodiments for improved power devices as well as their methods of manufacture, packaging and circuitry incorporating the same for use in a wide variety of power electronic applications are disclosed. One aspect of the invention combines a number of charge balancing techniques and other techniques for reducing parasitic capacitance to arrive at different embodiments for power devices with improved voltage performance, higher switching speed, and lower on-resistance. Another aspect of the invention provides improved termination structures for low, medium and high voltage devices. Improved methods of fabrication for power devices are provided according to other aspects of the invention. Improvements to specific processing steps, such as formation of trenches, formation of dielectric layers inside trenches, formation of mesa structures and processes for reducing substrate thickness, among others, are presented. According to another aspect of the invention, charge balanced power devices incorporate temperature and current sensing elements such as diodes on the same die. Other aspects of the invention improve equivalent series resistance (ESR) for power devices, incorporate additional circuitry on the same chip as the power device and provide improvements to the packaging of charge balanced power devices.

摘要翻译： 公开了用于改进的功率器件的各种实施例及其制造方法，封装和结合其的用于各种功率电子应用的电路。 本发明的一个方面结合了许多电荷平衡技术和用于减小寄生电容的其它技术，以获得具有改进的电压性能，较高开关速度和较低导通电阻的功率器件的不同实施例。 本发明的另一方面提供了用于低，中和高电压装置的改进的端接结构。 根据本发明的其它方面提供了改进的功率器件制造方法。 提出了具体的处理步骤的改进，例如沟槽的形成，沟槽内的电介质层的形成，台面结构的形成以及用于降低衬底厚度的工艺等。 根据本发明的另一方面，电荷平衡功率器件在同一管芯上并入温度和电流检测元件，例如二极管。 本发明的其它方面改进了用于功率器件的等效串联电阻（ESR），在与功率器件相同的芯片上并入附加电路，并提供对电荷平衡功率器件的封装的改进。

公开(公告)号：US20120220091A1

公开(公告)日：2012-08-30

申请号：US13418128

申请日：2012-03-12

申请人： Ashok Challa ,  Alan Elbanhawy ,  Thomas E. Grebs ,  Nathan L. Kraft ,  Dean E. Probst ,  Rodney S. Ridley ,  Steven P. Sapp ,  Qi Wang ,  Chongman Yun ,  J.G. Lee ,  Peter H. Wilson ,  Joseph A. Yedinak ,  J.Y. Jung ,  H.C. Jang ,  Babak S. Sani ,  Richard Stokes ,  Gary M. Dolny ,  John Mytych ,  Becky Losee ,  Adam Selsley ,  Robert Herrick ,  James J. Murphy ,  Gordon K. Madson ,  Bruce D. Marchant ,  Christopher L. Rexer ,  Christopher B. Kocon ,  Debra S. Woolsey

发明人： Ashok Challa ,  Alan Elbanhawy ,  Thomas E. Grebs ,  Nathan L. Kraft ,  Dean E. Probst ,  Rodney S. Ridley ,  Steven P. Sapp ,  Qi Wang ,  Chongman Yun ,  J.G. Lee ,  Peter H. Wilson ,  Joseph A. Yedinak ,  J.Y. Jung ,  H.C. Jang ,  Babak S. Sani ,  Richard Stokes ,  Gary M. Dolny ,  John Mytych ,  Becky Losee ,  Adam Selsley ,  Robert Herrick ,  James J. Murphy ,  Gordon K. Madson ,  Bruce D. Marchant ,  Christopher L. Rexer ,  Christopher B. Kocon ,  Debra S. Woolsey

IPC分类号： H01L21/336 ,  H01L21/311

CPC分类号： H01L29/407 ,  H01L21/26586 ,  H01L21/3065 ,  H01L21/30655 ,  H01L21/31116 ,  H01L21/6835 ,  H01L23/4952 ,  H01L23/49816 ,  H01L29/0623 ,  H01L29/0634 ,  H01L29/0653 ,  H01L29/0661 ,  H01L29/0696 ,  H01L29/1095 ,  H01L29/165 ,  H01L29/402 ,  H01L29/41766 ,  H01L29/4236 ,  H01L29/42368 ,  H01L29/4238 ,  H01L29/4933 ,  H01L29/495 ,  H01L29/66348 ,  H01L29/66734 ,  H01L29/7396 ,  H01L29/7802 ,  H01L29/7804 ,  H01L29/7805 ,  H01L29/7806 ,  H01L29/7811 ,  H01L29/7813 ,  H01L29/7815 ,  H01L29/7828 ,  H01L29/7831 ,  H01L2221/6834 ,  H01L2221/68363 ,  H01L2224/16 ,  H01L2924/01012 ,  H01L2924/01019 ,  H01L2924/01078 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/1301 ,  H01L2924/13034 ,  H01L2924/1305 ,  H01L2924/13055 ,  H01L2924/13091 ,  H01L2924/15311 ,  H01L2924/1532 ,  H01L2924/19041 ,  H01L2924/30105 ,  H01L2924/3011 ,  H01L2924/3025 ,  H02M3/00 ,  H02M3/33592 ,  H02M7/48 ,  Y02B70/1475 ,  H01L2924/00 ,  H01L2924/00014

摘要： A method for forming thick oxide at the bottom of a trench formed in a semiconductor substrate includes forming a conformal oxide film by a sub-atmospheric chemical vapor deposition process that fills the trench and covers a top surface of the substrate. The method also includes etching the oxide film off the top surface of the substrate and inside the trench to leave a substantially flat layer of oxide having a target thickness at the bottom of the trench.

摘要翻译： 在半导体衬底中形成的沟槽的底部形成厚氧化物的方法包括通过填充沟槽并覆盖衬底顶表面的亚大气压化学气相沉积工艺形成共形氧化膜。 该方法还包括将氧化膜从衬底的顶表面和沟槽内部蚀刻，以留下在沟槽底部具有目标厚度的基本平坦的氧化物层。

公开(公告)号：US20080135931A1

公开(公告)日：2008-06-12

申请号：US12032123

申请日：2008-02-15

申请人： Ashok Challa ,  Alan Elbanhawy ,  Thomas E. Grebs ,  Nathan L. Kraft ,  Dean E. Probst ,  Rodney S. Ridlay ,  Steven P. Sapp ,  Qi Wang ,  Chongman Yun ,  J.G. Lee ,  Peter H. Wilson ,  Joseph A. Yedinak ,  J.Y. Jung ,  H.C. Jang ,  Babak S. Sanl ,  Richard Stokes ,  Gary M. Dolny ,  John Mytych ,  Becky Losee ,  Adam Selsley ,  Robert Herrick ,  James J. Murphy ,  Gordon K. Madson ,  Bruce D. Marchant ,  Christopher L. Rexer ,  Christopher B. Kocon ,  Debra S. Woolsey

发明人： Ashok Challa ,  Alan Elbanhawy ,  Thomas E. Grebs ,  Nathan L. Kraft ,  Dean E. Probst ,  Rodney S. Ridlay ,  Steven P. Sapp ,  Qi Wang ,  Chongman Yun ,  J.G. Lee ,  Peter H. Wilson ,  Joseph A. Yedinak ,  J.Y. Jung ,  H.C. Jang ,  Babak S. Sanl ,  Richard Stokes ,  Gary M. Dolny ,  John Mytych ,  Becky Losee ,  Adam Selsley ,  Robert Herrick ,  James J. Murphy ,  Gordon K. Madson ,  Bruce D. Marchant ,  Christopher L. Rexer ,  Christopher B. Kocon ,  Debra S. Woolsey

IPC分类号： H01L29/78 ,  H01L21/336

CPC分类号： H01L29/407 ,  H01L21/26586 ,  H01L21/3065 ,  H01L21/30655 ,  H01L21/31116 ,  H01L21/6835 ,  H01L23/4952 ,  H01L23/49816 ,  H01L29/0623 ,  H01L29/0634 ,  H01L29/0653 ,  H01L29/0661 ,  H01L29/0696 ,  H01L29/1095 ,  H01L29/165 ,  H01L29/402 ,  H01L29/41766 ,  H01L29/4236 ,  H01L29/42368 ,  H01L29/4238 ,  H01L29/4933 ,  H01L29/495 ,  H01L29/66348 ,  H01L29/66734 ,  H01L29/7396 ,  H01L29/7802 ,  H01L29/7804 ,  H01L29/7805 ,  H01L29/7806 ,  H01L29/7811 ,  H01L29/7813 ,  H01L29/7815 ,  H01L29/7828 ,  H01L29/7831 ,  H01L2221/6834 ,  H01L2221/68363 ,  H01L2224/16 ,  H01L2924/01012 ,  H01L2924/01019 ,  H01L2924/01078 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/1301 ,  H01L2924/13034 ,  H01L2924/1305 ,  H01L2924/13055 ,  H01L2924/13091 ,  H01L2924/15311 ,  H01L2924/1532 ,  H01L2924/19041 ,  H01L2924/30105 ,  H01L2924/3011 ,  H01L2924/3025 ,  H02M3/00 ,  H02M3/33592 ,  H02M7/48 ,  Y02B70/1475 ,  H01L2924/00 ,  H01L2924/00014

摘要： A semiconductor power device includes a drift region of a first conductivity type, a well region extending above the drift region and having a second conductivity type opposite the first conductivity type, an active trench extending through the well region and into the drift region, source regions having the first conductivity type formed in the well region adjacent the active trench, and a first termination trench extending below the well region and disposed at an outer edge of an active region of the device. The sidewalls and bottom of the active trench are lined with dielectric material, and substantially filled with a first conductive layer forming an upper electrode and a second conductive layer forming a lower electrode, the upper electrode being disposed above the lower electrode and separated therefrom by inter-electrode dielectric material. The first termination trench can be lined with a layer of dielectric material that is thicker than the dielectric material lining the sidewalls of the active trench, and is substantially filled with conductive material.

摘要翻译： 半导体功率器件包括第一导电类型的漂移区域，在漂移区域上方延伸并且具有与第一导电类型相反的第二导电类型的阱区域，延伸穿过阱区域并进入漂移区域的有源沟槽，源极区域 具有形成在邻近有源沟槽的阱区中的第一导电类型，以及在阱区下延伸并设置在器件的有源区的外边缘处的第一端接沟槽。 有源沟槽的侧壁和底部衬有介电材料，并且基本上填充有形成上电极的第一导电层和形成下电极的第二导电层，上电极设置在下电极之上， 电介质材料。 第一端接沟槽可以衬有一层电介质材料，其比在有源沟槽侧壁上的电介质材料更厚，并且基本上填充有导电材料。