公开(公告)号：US08763928B2

公开(公告)日：2014-07-01

申请号：US12444348

申请日：2007-10-05

Applicant: Ichiro Nishikawa ,  Takeshi Kawano

Inventor： Ichiro Nishikawa ,  Takeshi Kawano

IPC: B05B1/24 ,  B01B1/00 ,  B01B1/06 ,  C23C16/448

CPC classification number: C23C16/4486 ,  B01B1/005 ,  B01B1/06

Abstract: This invention provides a vaporizer that prevents deterioration of a precursor while reducing a residue, that can expect reduction in risk of clogging, and that can increase vaporization flow easily. The vaporizer comprises an inlet port for introducing a precursor in a liquid phase or a gas-liquid mixture phase, a vaporizing section for vaporizing the precursor arranged on the downstream side of the inlet port, and an outlet port for delivering the precursor vaporized at the vaporizing section, wherein the vaporizing section is of a flow channel type comprising a nozzle for spraying the precursor and a heating channel arranged on the downstream side of the nozzle continuously thereto. A plurality of vaporizing sections are arranged in parallel between the inlet port and the outlet port, and arranged such that each vaporizing section can distribute the precursor independently of each other.

Abstract translation: 本发明提供一种防止前体劣化的蒸发器，同时减少残留物，可以预期堵塞风险降低，并且可以容易地增加蒸发流动。 蒸发器包括用于将前体引入液相或气 - 液混合物相的入口端口，用于使配置在入口下游侧的前体蒸发的蒸发部分，以及用于输送在该入口端口蒸发的前体的出口 蒸发部，其特征在于，所述蒸发部为流动通道型，包括用于喷射前体的喷嘴和连续配置在所述喷嘴的下游侧的加热通道。 多个蒸发部分平行地布置在入口和出口之间，并且布置成使得每个蒸发部分可以彼此独立地分配前体。

公开(公告)号：US08280235B2

公开(公告)日：2012-10-02

申请号：US12295862

申请日：2007-04-04

Applicant: Ichiro Nishikawa ,  Takeshi Kawano

Inventor： Ichiro Nishikawa ,  Takeshi Kawano

IPC: F24H1/18

CPC classification number: C23C16/4481

Abstract: A liquid material vaporizer comprises a gas-liquid mixing section for mixing a liquid material and a carrier gas to generate a gas-liquid mixture; a heating type vaporizing section for vaporizing the gas-liquid mixture from the gas-liquid mixing section and exhausting outside with an assistance of the carrier gas a gas generated by the vaporization; a connecting section for making a connection between the gas-liquid mixing section and the vaporizing section, the connecting section having inside a flow path for the gas-liquid mixture; and a connecting section cooling section for cooling the connecting section. Thus, the liquid material vaporizer which performs suitable vaporization by preventing residue from being generated even in the case of vaporizing a liquid material composed of a plurality of materials having different boiling points.

Abstract translation: 液体蒸发器包括用于混合液体材料和载气以产生气液混合物的气液混合部分; 加热型蒸发部，用于从气液混合部蒸发气液混合物，并借助载气气化汽化产生的气体; 连接部，其在气液混合部与汽化部之间进行连接，连接部具有用于气液混合物的流路内部; 以及用于冷却连接部的连接部冷却部。 因此，即使在蒸发由具有不同沸点的多种材料构成的液体材料的情况下也能够防止残留物产生适当蒸发的液体材料蒸发器。

公开(公告)号：US20090097831A1

公开(公告)日：2009-04-16

申请号：US12295862

申请日：2007-04-04

Applicant: Ichiro Nishikawa ,  Takeshi Kawano

Inventor： Ichiro Nishikawa ,  Takeshi Kawano

IPC: C23C16/448

CPC classification number: C23C16/4481

Abstract: A liquid material vaporizer comprises a gas-liquid mixing section (1) for mixing a liquid material (LM) and a carrier gas (CG) to generate a gas-liquid mixture (GL); a heating type vaporizing section (2) for vaporizing the gas-liquid mixture (GL) from the gas-liquid mixing section (1) and exhausting outside with an assistance of the carrier gas (CG) a gas generated by the vaporization; a connecting section (3) for making a connection between the gas-liquid mixing section (1) and the vaporizing section (2), the connecting section (3) having inside a flow path for the gas-liquid mixture (GL); and a connecting section cooling section (4) for cooling the connecting section (3). Thus, the liquid material vaporizer which performs suitable vaporization by preventing residue from being generated even in the case of vaporizing a liquid material composed of a plurality of materials having different boiling points.

Abstract translation: 液体蒸发器包括用于混合液体材料（LM）和载气（CG）的气液混合部分（1）以产生气液混合物（GL）; 用于从气液混合部分（1）蒸发气液混合物（GL）并借助载气（CG）排出由气化产生的气体的加热型蒸发部分（2）; 用于在气液混合部分（1）和蒸发部分（2）之间形成连接的连接部分（3），在气液混合物（GL）的流路内部的连接部分（3） 以及用于冷却连接部（3）的连接部冷却部（4）。 因此，即使在蒸发由具有不同沸点的多种材料构成的液体材料的情况下也能够防止残留物产生适当蒸发的液体材料蒸发器。

公开(公告)号：US08544828B2

公开(公告)日：2013-10-01

申请号：US12809051

申请日：2008-12-05

Applicant: Hideaki Miyamoto ,  Ichiro Nishikawa

Inventor： Hideaki Miyamoto ,  Ichiro Nishikawa

IPC: B01F3/04

CPC classification number: C23C16/4481 ,  B01B1/005 ,  B01D1/0082 ,  B01D1/16

Abstract: An object of this invention is to provide a liquid material vaporization apparatus that is capable of increasing the flow rate of a carrier gas without changing the shape of a nozzle. The liquid material vaporization apparatus comprises a gas-liquid mixing chamber in which a liquid material and the carrier gas are mixed, a liquid material introduction path that introduces the liquid material into the gas-liquid mixing chamber, a carrier gas introduction path that introduces the carrier gas into the gas-liquid mixing chamber, a vaporization nozzle section that is communicated with the gas-liquid mixing chamber to subject a mixture of the liquid material and the carrier gas to flash boiling, and a mixed gas derivation path that is communicated with the vaporization nozzle section to derive the mixed gas vaporized by the vaporization nozzle section.

Abstract translation: 本发明的目的是提供一种液体材料蒸发装置，其能够增加载气的流量而不改变喷嘴的形状。 液体材料蒸发装置包括混合有液体材料和载气的气液混合室，将液体材料引入气液混合室的液体材料导入路径，导入 载气进入气液混合室，蒸气喷嘴部与气液混合室连通以使液体材料和载气混合物闪蒸，以及与气液混合室连通的混合气体导出路径 所述蒸发喷嘴部分导出由蒸发喷嘴部分蒸发的混合气体。

公开(公告)号：US20110115104A1

公开(公告)日：2011-05-19

申请号：US12809051

申请日：2008-12-05

Applicant: Hideaki Miyamoto ,  Ichiro Nishikawa

Inventor： Hideaki Miyamoto ,  Ichiro Nishikawa

IPC: B01F3/04

CPC classification number: C23C16/4481 ,  B01B1/005 ,  B01D1/0082 ,  B01D1/16

Abstract: An object of this invention is to provide a liquid material vaporization apparatus that is capable of increasing the flow rate of a carrier gas without changing the shape of a nozzle. The liquid material vaporization apparatus comprises a gas-liquid mixing chamber in which a liquid material and the carrier gas are mixed, a liquid material introduction path that introduces the liquid material into the gas-liquid mixing chamber, a carrier gas introduction path that introduces the carrier gas into the gas-liquid mixing chamber, a vaporization nozzle section that is communicated with the gas-liquid mixing chamber to subject a mixture of the liquid material and the carrier gas to flash boiling, and a mixed gas derivation path that is communicated with the vaporization nozzle section to derive the mixed gas vaporized by the vaporization nozzle section.

Abstract translation: 本发明的目的是提供一种液体材料蒸发装置，其能够增加载气的流量而不改变喷嘴的形状。 液体材料蒸发装置包括混合有液体材料和载气的气液混合室，将液体材料引入气液混合室的液体材料导入路径，导入 载气进入气液混合室，蒸气喷嘴部与气液混合室连通以使液体材料和载气混合物闪蒸，以及与气液混合室连通的混合气体导出路径 所述蒸发喷嘴部分导出由蒸发喷嘴部分蒸发的混合气体。

公开(公告)号：US20100044461A1

公开(公告)日：2010-02-25

申请号：US12444348

申请日：2007-10-05

Applicant: Ichiro Nishikawa ,  Takeshi Kawano

Inventor： Ichiro Nishikawa ,  Takeshi Kawano

IPC: B01J7/02

CPC classification number: C23C16/4486 ,  B01B1/005 ,  B01B1/06

Abstract: This invention provides a vaporizer that prevents deterioration of a precursor while reducing a residue, reducing risk of clogging, and easily increasing vaporization flow. The vaporizer comprises an inlet port (P1) for introducing a precursor in a liquid phase or a gas-liquid mixture phase, a vaporizing section (3) for vaporizing the precursor arranged on the downstream side of the inlet port (P1), and an outlet port (P2) for delivering the precursor vaporized at the vaporizing section (3), wherein the vaporizing section (3) is of a flow channel type comprising a nozzle (31) for spraying the precursor and a heating channel (32) arranged on the downstream side of the nozzle (31) continuously thereto. A plurality of vaporizing sections (3) are arranged in parallel between the inlet port (P1) and the outlet port (P2), and arranged such that each vaporizing section (3) can distribute the precursor independently of each other.

Abstract translation: 本发明提供了一种防止前体劣化的蒸发器，同时减少残留物，降低堵塞的风险，并容易地增加蒸发流。 蒸发器包括用于将前体引入液相或气液混合物相的入口（P1），用于蒸发设置在入口（P1）的下游侧的前体的蒸发部分（3），以及 用于输送在蒸发部分（3）蒸发的前体的出口（P2），其中蒸发部分（3）是流动通道类型，其包括用于喷射前体的喷嘴（31）和布置在 喷嘴（31）的下游侧与其连续。 多个蒸发部分（3）平行布置在入口（P1）和出口（P2）之间，并且布置成使得每个蒸发部分（3）可以彼此独立地分配前体。