公开(公告)号：US09945554B2

公开(公告)日：2018-04-17

申请号：US13651985

申请日：2012-10-15

Applicant: Laurie Davies

Inventor： Theodore S. Weigold ,  Shane M. Touchette

IPC: F22B27/16 ,  F22B37/60 ,  F28D7/10 ,  F01K23/06 ,  F22G7/14 ,  F28F1/40 ,  B01B1/06 ,  F01K23/10 ,  F28D21/00 ,  F01N5/02

CPC classification number: F22G7/14 ,  B01B1/06 ,  F01K23/065 ,  F01K23/10 ,  F01N5/02 ,  F22B27/16 ,  F22B37/60 ,  F28D7/10 ,  F28D21/001 ,  F28F1/40

Abstract: Liquid is flash evaporated in a series of cells along and surrounding an exhaust duct to generate a pressurized vapor where at least one of the surfaces is in communication with the source of heat sufficient to maintain the surface at a temperature such that the liquid injected into the chamber is substantially instantly converted to a superheated vapor with no liquid pooling within the chamber. The liquid is introduced by controlled injectors operating at a required rate. Each of the cells is periodically discharged by a pressure controlled relief valve and the vapor from the cells combined to form a continuous stream feeding a turbine or other energy conversion device. The outer wall of the cell is offset so that it contacts the inner wall at one point around the periphery. Heat transfer ribs and bars can be provided in the duct to provide increased heat transfer where necessary.

公开(公告)号：US08854923B1

公开(公告)日：2014-10-07

申请号：US13242366

申请日：2011-09-23

Applicant: Kurt G. Eyster

Inventor： Kurt G. Eyster

IPC: H04R17/00 ,  B01B1/06

CPC classification number: H04R17/00 ,  B01B1/06 ,  H04R17/10

Abstract: A transducer assembly is provided for projecting acoustic signals into a medium. The assembly includes a support member having first and second layers of piezoelectric material mechanically linked to the support member. The first and second layers are joined to electrical drive circuitry such that one layer receives a driving voltage signal while the other layer receives the driving voltage with a stiffening voltage. The transducer assembly can use both the 3-1 and 3-3 drive modes. Multiple configurations are supported, and both bender bar and slotted cylinder configurations are shown.

Abstract translation: 提供用于将声信号投影到介质中的换能器组件。 该组件包括具有机械地连接到支撑构件的第一和第二层压电材料的支撑构件。 第一层和第二层连接到电驱动电路，使得一层接收驱动电压信号，而另一层接收具有加强电压的驱动电压。 传感器组件可以同时使用3-1和3-3驱动模式。 支持多种配置，并显示弯曲杆和开槽圆柱体配置。

公开(公告)号：US08590338B2

公开(公告)日：2013-11-26

申请号：US12650586

申请日：2009-12-31

Applicant: Damien Boesch ,  Martin Rosenblum

Inventor： Damien Boesch ,  Martin Rosenblum

IPC: F25B41/06 ,  F25B39/02 ,  F16L5/00 ,  F24C7/10 ,  A21B1/00 ,  A62C31/02

CPC classification number: C23C16/45563 ,  B01B1/06 ,  B05B17/06 ,  C23C14/243 ,  C23C16/4485 ,  Y10S165/911

Abstract: An evaporator includes a vaporization chamber having a monomer inlet and a vapor outlet. There is a vapor nozzle in the vapor outlet. The evaporator also includes a collar positioned between the vaporization chamber and the vapor nozzle which increases the pressure in the evaporation chamber while the conductance through the nozzle is substantially unchanged.

Abstract translation: 蒸发器包括具有单体入口和蒸气出口的蒸发室。 蒸气出口有一个蒸气喷嘴。 蒸发器还包括位于蒸发室和蒸汽喷嘴之间的套环，其增加蒸发室中的压力，同时通过喷嘴的电导基本上不变。

公开(公告)号：US20100044461A1

公开(公告)日：2010-02-25

申请号：US12444348

申请日：2007-10-05

Applicant: Ichiro Nishikawa ,  Takeshi Kawano

Inventor： Ichiro Nishikawa ,  Takeshi Kawano

IPC: B01J7/02

CPC classification number: C23C16/4486 ,  B01B1/005 ,  B01B1/06

Abstract: This invention provides a vaporizer that prevents deterioration of a precursor while reducing a residue, reducing risk of clogging, and easily increasing vaporization flow. The vaporizer comprises an inlet port (P1) for introducing a precursor in a liquid phase or a gas-liquid mixture phase, a vaporizing section (3) for vaporizing the precursor arranged on the downstream side of the inlet port (P1), and an outlet port (P2) for delivering the precursor vaporized at the vaporizing section (3), wherein the vaporizing section (3) is of a flow channel type comprising a nozzle (31) for spraying the precursor and a heating channel (32) arranged on the downstream side of the nozzle (31) continuously thereto. A plurality of vaporizing sections (3) are arranged in parallel between the inlet port (P1) and the outlet port (P2), and arranged such that each vaporizing section (3) can distribute the precursor independently of each other.

Abstract translation: 本发明提供了一种防止前体劣化的蒸发器，同时减少残留物，降低堵塞的风险，并容易地增加蒸发流。 蒸发器包括用于将前体引入液相或气液混合物相的入口（P1），用于蒸发设置在入口（P1）的下游侧的前体的蒸发部分（3），以及 用于输送在蒸发部分（3）蒸发的前体的出口（P2），其中蒸发部分（3）是流动通道类型，其包括用于喷射前体的喷嘴（31）和布置在 喷嘴（31）的下游侧与其连续。 多个蒸发部分（3）平行布置在入口（P1）和出口（P2）之间，并且布置成使得每个蒸发部分（3）可以彼此独立地分配前体。

公开(公告)号：US20080307825A1

公开(公告)日：2008-12-18

申请号：US11918172

申请日：2006-04-06

Applicant: Gunther Kolb ,  David Tiemann

Inventor： Gunther Kolb ,  David Tiemann

IPC: F25B39/02

CPC classification number: B01J19/0093 ,  B01B1/005 ,  B01B1/06 ,  B01J2219/0081 ,  B01J2219/00822 ,  B01J2219/00835 ,  B01J2219/0086 ,  B01J2219/00873 ,  F28D9/0037 ,  F28D2021/0064 ,  F28D2021/0071 ,  F28F3/048 ,  F28F2260/02 ,  H01M8/0612

Abstract: A micro-evaporator is disclosed which is easy to manipulate and can be operated problem-free over a large temperature range. The micro-evaporator has micro-evaporator channels in a trapezoidal region, comprising an inlet region opening in the liquid feed chamber with a small diameter, and an outlet region opening into the vapor collecting chamber with a large diameter.

Abstract translation: 公开了一种易于操作并可在大温度范围内无问题地操作的微型蒸发器。 微型蒸发器具有梯形区域中的微蒸发器通道，包括在具有小直径的液体进料室中开口的入口区域和通向具有大直径的蒸气收集室的出口区域。

公开(公告)号：US20150203962A1

公开(公告)日：2015-07-23

申请号：US14567292

申请日：2014-12-11

Applicant: Rohm and Haas Electronic Materials LLC

Inventor： Egbert Woelk ,  Ronald L. DiCarlo ,  Deodatta Vinayak Shenai-Khatkhate

IPC: C23C16/448 ,  C23C16/44 ,  C23C16/455

CPC classification number: C23C16/4482 ,  B01B1/005 ,  B01B1/06 ,  B01D1/14 ,  B01J4/002 ,  B01J4/004 ,  B01J4/02 ,  C23C16/4407 ,  C23C16/45561 ,  Y10T137/0391 ,  Y10T137/2076

Abstract: Disclosed herein is a delivery device comprising a chamber; a gas inlet; a gas outlet; and a dip tube contained within the chamber and having an upper portion and a lower portion, the upper portion of the dip tube being in fluid communication with the gas inlet and being operative to permit the entry of a carrier gas; the lower portion of the dip tube extending into the chamber, the lower portion of the dip tube terminating in an outlet end; and a sleeve; where the sleeve has a first end and a second end; the first end being in an interference fit with the lower portion of the dip tube; and where the sleeve vibrates upon being subjected to a disturbance.

Abstract translation: 本文公开了一种包括腔室的输送装置; 气体入口 气体出口 以及容纳在所述室内并具有上部和下部的汲取管，所述汲取管的上部与所述气体入口流体连通并且可操作以允许载气的进入; 浸入管的下部延伸到室中，浸入管的下部终止于出口端; 和袖子; 其中套筒具有第一端和第二端; 第一端与汲取管的下部过盈配合; 并且套筒在受到干扰时发生振动。

公开(公告)号：US08763928B2

公开(公告)日：2014-07-01

申请号：US12444348

申请日：2007-10-05

Applicant: Ichiro Nishikawa ,  Takeshi Kawano

Inventor： Ichiro Nishikawa ,  Takeshi Kawano

IPC: B05B1/24 ,  B01B1/00 ,  B01B1/06 ,  C23C16/448

CPC classification number: C23C16/4486 ,  B01B1/005 ,  B01B1/06

Abstract: This invention provides a vaporizer that prevents deterioration of a precursor while reducing a residue, that can expect reduction in risk of clogging, and that can increase vaporization flow easily. The vaporizer comprises an inlet port for introducing a precursor in a liquid phase or a gas-liquid mixture phase, a vaporizing section for vaporizing the precursor arranged on the downstream side of the inlet port, and an outlet port for delivering the precursor vaporized at the vaporizing section, wherein the vaporizing section is of a flow channel type comprising a nozzle for spraying the precursor and a heating channel arranged on the downstream side of the nozzle continuously thereto. A plurality of vaporizing sections are arranged in parallel between the inlet port and the outlet port, and arranged such that each vaporizing section can distribute the precursor independently of each other.

Abstract translation: 本发明提供一种防止前体劣化的蒸发器，同时减少残留物，可以预期堵塞风险降低，并且可以容易地增加蒸发流动。 蒸发器包括用于将前体引入液相或气 - 液混合物相的入口端口，用于使配置在入口下游侧的前体蒸发的蒸发部分，以及用于输送在该入口端口蒸发的前体的出口 蒸发部，其特征在于，所述蒸发部为流动通道型，包括用于喷射前体的喷嘴和连续配置在所述喷嘴的下游侧的加热通道。 多个蒸发部分平行地布置在入口和出口之间，并且布置成使得每个蒸发部分可以彼此独立地分配前体。

公开(公告)号：US08661919B2

公开(公告)日：2014-03-04

申请号：US13182401

申请日：2011-07-13

Applicant: Hidenori Oba ,  Tadayuki Nagano

Inventor： Hidenori Oba ,  Tadayuki Nagano

IPC: G01N1/44 ,  B01F3/04

CPC classification number: H01L21/67109 ,  B01B1/06 ,  G01K1/18

Abstract: The present invention is intended to improve response property and accuracy of temperature control of a liquid sample, and is provided with a vaporization tank that retains the liquid sample, one or more heaters that are provided in the vaporization tank and respectively have heating parts that come into contact with the liquid sample to heat the liquid sample, a temperature detection part that is provided in contact with an outer surface including the heating part of any of the heaters and detects a temperature of the outer surface, and a control part that receives a temperature detection signal from the temperature detection part to control electric power supplied to the heaters.

Abstract translation: 本发明旨在提高液体样品的温度控制的响应特性和精度，并且设置有保持液体样品的蒸发槽，设置在蒸发箱中的一个或多个加热器，并且分别具有来自的加热部件 与液体样品接触以加热液体样品;温度检测部分，其设置成与包括任何加热器的加热部分的外表面接触并检测外表面的温度;以及控制部件，其接收 来自温度检测部的温度检测信号，以控制提供给加热器的电力。

公开(公告)号：US20140050863A1

公开(公告)日：2014-02-20

申请号：US14070854

申请日：2013-11-04

Applicant: Samsung Display Co., Ltd.

Inventor： Damien Boesch ,  Martin Rosenblum

IPC: B05B17/06

CPC classification number: C23C16/45563 ,  B01B1/06 ,  B05B17/06 ,  C23C14/243 ,  C23C16/4485 ,  Y10S165/911

Abstract: An evaporator includes a vaporization chamber having a monomer inlet and a vapor outlet. There is a vapor nozzle in the vapor outlet. The evaporator also includes a collar positioned between the vaporization chamber and the vapor nozzle which increases the pressure in the evaporation chamber while the conductance through the nozzle is substantially unchanged.

Abstract translation: 蒸发器包括具有单体入口和蒸气出口的蒸发室。 蒸气出口有一个蒸气喷嘴。 蒸发器还包括位于蒸发室和蒸汽喷嘴之间的套环，其增加蒸发室中的压力，同时通过喷嘴的电导基本上不变。

公开(公告)号：US20110154854A1

公开(公告)日：2011-06-30

申请号：US12650586

申请日：2009-12-31

Applicant: Damien Boesch ,  Martin Rosenblum

Inventor： Damien Boesch ,  Martin Rosenblum

IPC: F25B39/02 ,  F25B41/06

CPC classification number: C23C16/45563 ,  B01B1/06 ,  B05B17/06 ,  C23C14/243 ,  C23C16/4485 ,  Y10S165/911

Abstract: An evaporator includes a vaporization chamber having a monomer inlet and a vapor outlet. There is a vapor nozzle in the vapor outlet. The evaporator also includes a collar positioned between the vaporization chamber and the vapor nozzle which increases the pressure in the evaporation chamber while the conductance through the nozzle is substantially unchanged.

Abstract translation: 蒸发器包括具有单体入口和蒸气出口的蒸发室。 蒸气出口有一个蒸气喷嘴。 蒸发器还包括位于蒸发室和蒸汽喷嘴之间的套环，其增加蒸发室中的压力，同时通过喷嘴的电导基本上不变。