DAMASCENE PROCESS FOR USE IN FABRICATING SEMICONDUCTOR STRUCTURES HAVING MICRO/NANO GAPS
    1.
    发明申请
    DAMASCENE PROCESS FOR USE IN FABRICATING SEMICONDUCTOR STRUCTURES HAVING MICRO/NANO GAPS 有权
    用于制造具有微米/纳米GAPS的半导体结构的大分子方法

    公开(公告)号:US20120171798A1

    公开(公告)日:2012-07-05

    申请号:US11737545

    申请日:2007-04-19

    IPC分类号: H01L21/02

    摘要: In fabricating a microelectromechanical structure (MEMS), a method of forming a narrow gap in the MEMS includes a) depositing a layer of sacrificial material on the surface of a supporting substrate, b) photoresist masking and at least partially etching the sacrificial material to form at least one blade of sacrificial material, c) depositing a structural layer over the sacrificial layer, and d) removing the sacrificial layer including the blade of the sacrificial material with a narrow gap remaining in the structural layer where the blade of sacrificial material was removed.

    摘要翻译: 在制造微机电结构(MEMS)中,在MEMS中形成窄间隙的方法包括:a)在支撑衬底的表面上沉积牺牲材料层,b)光致抗蚀剂掩模并且至少部分蚀刻牺牲材料以形成 至少一个牺牲材料刀片,c)在所述牺牲层上沉积结构层,以及d)去除包括所述牺牲材料刀片的所述牺牲层,其中所述牺牲材料刀片被去除的所述结构层中残留有窄间隙 。

    Ultrasound diagnosis apparatus
    3.
    发明授权
    Ultrasound diagnosis apparatus 有权
    超声诊断仪

    公开(公告)号:US07217243B2

    公开(公告)日:2007-05-15

    申请号:US10869152

    申请日:2004-06-16

    申请人: Hideki Takeuchi

    发明人: Hideki Takeuchi

    IPC分类号: A61B8/00

    摘要: A plurality of 2D sub arrays are defined on a 2D array transducer for effecting transmission and reception of ultrasound. For each sub array, a plurality of groups are set. More specifically, a plurality of (16, for example) transducer elements forming a sub array are grouped or divided into a plurality of (4, for example) groups. A multiplexer sums a plurality of receiving signals output from the plurality of transducer elements for each group, and generates a group receiving signal. A plurality of group receiving signals thus generated are then subjected to a sub phase adjusting and summing process to form a sub phase adjusted and summed signal. A plurality of sub phase adjusted and summed signals corresponding to the plurality of sub arrays are then subjected to a main phase adjusting and summing process. A sub phase adjusting and summing processing section is provided within a probe head, a cable connector, or an apparatus body. During transmission, the multiplexer supplies a transmitting signal to a plurality of transducer elements forming a group in parallel.

    摘要翻译: 在2D阵列换能器上定义多个2D子阵列以实现超声波的发射和接收。 对于每个子阵列,设置多个组。 更具体地,形成子阵列的多个(16个例如)换能器元件被分组或分成多个(例如)4个组。 多路复用器对从每个组的多个换能器元件输出的多个接收信号相加,并产生组接收信号。 然后,如此生成的多个组接收信号经过子相位调整和求和处理,以形成子相位调整和求和信号。 然后,对应于多个子阵列的多个子相位调整和求和信号进行主相位调整和求和处理。 在探针头,电缆连接器或装置主体内设置有副相位调整和求和处理部。 在传输期间,多路复用器将发送信号提供给并联形成组的多个换能器元件。

    Semiconductor storage device including short circuit avoiding structure and method of fabricating thereof
    6.
    发明授权
    Semiconductor storage device including short circuit avoiding structure and method of fabricating thereof 失效
    包括短路避免结构的半导体存储装置及其制造方法

    公开(公告)号:US06255686B1

    公开(公告)日:2001-07-03

    申请号:US09124852

    申请日:1998-07-30

    IPC分类号: H01L27108

    摘要: In a semiconductor storage device, an access transistor, which has a gate electrode and a pair of impurity diffusion layers, is formed at a device activation region defined by a device isolation structure of a semiconductor substrate. A first insulating film, which has a first contact hole for exposing a portion of the surface of one of the pair of impurity diffusion layers, is formed over the access transistor. A protective film, which has a second contact hole formed on the first contact hole, is formed on the first insulating film. A second insulating film is formed on the side wall faces of the first and second contact holes. A memory capacitor has a lower electrode and an upper part electrode which are opposed each other and are capacitive-coupled through a dielectric film. The lower electrode is filled inside the first and second contact holes to be formed in an island-like shape on the first insulating film through the protective film so as to be electrically connected with the one of the pair of impurity diffusion layers. Each of the first and second contact holes has a diameter which is made smaller by an existence of the second insulating film than a minimum dimension determined by an exposure limit in a photolithography.

    摘要翻译: 在半导体存储装置中,在由半导体衬底的器件隔离结构限定的器件激活区域处形成具有栅电极和一对杂质扩散层的存取晶体管。 在该存取晶体管的上方形成第一绝缘膜,该第一绝缘膜具有用于暴露该对杂质扩散层之一的表面的一部分的第一接触孔。 在第一绝缘膜上形成有形成在第一接触孔上的第二接触孔的保护膜。 第二绝缘膜形成在第一和第二接触孔的侧壁面上。 记忆电容器具有彼此相对并且通过电介质膜电容耦合的下部电极和上部电极。 下部电极填充在第一和第二接触孔的内部,以通过保护膜在第一绝缘膜上形成为岛状,以便与一对杂质扩散层电连接。 第一和第二接触孔中的每一个具有通过第二绝缘膜的存在使得比通过光刻中的曝光极限确定的最小尺寸更小的直径。

    Salt of fused heterocyclic derivative and crystal thereof
    7.
    发明授权
    Salt of fused heterocyclic derivative and crystal thereof 有权
    稠合杂环衍生物的盐及其结晶

    公开(公告)号:US09169266B2

    公开(公告)日:2015-10-27

    申请号:US13577832

    申请日:2011-02-09

    摘要: An objective of the present invention is to improve the solubility of 3-[2-fluoro-5-(2,3-difluoro-6-methoxybenzyloxy)-4-methoxyphenyl]-2,4-dioxo-1,2,3,4-tetrahydrothieno[3,4-d]pyrimidine-5-carboxylic acid.The present invention provides 3-[2-fluoro-5-(2,3-difluoro-6-methoxybenzyl-oxy)-4-methoxyphenyl]-2,4-dioxo-1,2,3,4-tetrahydrothieno[3,4-d]pyrimidine-5-carboxylic acid choline salt has excellent solubility and storage stability.

    摘要翻译: 本发明的目的是提高3- [2-氟-5-(2,3-二氟-6-甲氧基苄氧基)-4-甲氧基苯基] -2,4-二氧代-1,2,3,4-四氢 - 4-四氢噻吩并[3,4-d]嘧啶-5-甲酸。 本发明提供3- [2-氟-5-(2,3-二氟-6-甲氧基苄氧基)-4-甲氧基苯基] -2,4-二氧代-1,2,3,4-四氢噻吩并[ 4-d]嘧啶-5-羧酸胆碱盐具有优异的溶解性和储存稳定性。

    Hemifumarate of a pyrazole derivative
    8.
    发明授权
    Hemifumarate of a pyrazole derivative 有权
    吡唑衍生物的半富马酸盐

    公开(公告)号:US08354382B2

    公开(公告)日:2013-01-15

    申请号:US12988273

    申请日:2009-04-13

    CPC分类号: C07H17/02

    摘要: The present invention provides a novel form of 3-(3-{4-[3-(β-D-glucopyranosyloxy)-5-isopropyl-1H-pyrazol-4-ylmethyl]-3-methylphenoxy}propylamino)-2,2-dimethylpropionamide with improved storage stability. Since 3-(3-{4-[3-(β-D-glucopyranosyloxy)-5-isopropyl-1H-pyrazol-4-ylmethyl]-3-methylphenoxy}-propylamino)-2,2-dimethylpropionamide hemifumarate dihydrate has extremely excellent storage stability, it is useful as a drug substance. Furthermore, it shows an extremely good crystalline property and can be purified by a convenient method, and therefore is suitable for the industrial preparation.

    摘要翻译: 本发明提供3-(3- {4- [3-(&bgr。-D-吡喃葡萄糖氧基)-5-异丙基-1H-吡唑-4-基甲基] -3-甲基苯氧基}丙基氨基) 具有改善的储存稳定性的2-二甲基丙酰胺。 由于3-(3- {4- [3-(&bgr。-D-吡喃葡萄糖氧基)-5-异丙基-1H-吡唑-4-基甲基] -3-甲基苯氧基} - 丙基氨基)-2,2-二甲基丙酰胺半富马酸盐二水合物具有 极好的储存稳定性,作为药物有用。 此外,其显示出非常好的结晶性,并且可以通过方便的方法进行纯化,因此适用于工业制备。

    Damascene process for use in fabricating semiconductor structures having micro/nano gaps
    9.
    发明授权
    Damascene process for use in fabricating semiconductor structures having micro/nano gaps 有权
    用于制造具有微/纳米间隙的半导体结构的镶嵌工艺

    公开(公告)号:US08329559B2

    公开(公告)日:2012-12-11

    申请号:US11737545

    申请日:2007-04-19

    摘要: In fabricating a microelectromechanical structure (MEMS), a method of forming a narrow gap in the MEMS includes a) depositing a layer of sacrificial material on the surface of a supporting substrate, b) photoresist masking and at least partially etching the sacrificial material to form at least one blade of sacrificial material, c) depositing a structural layer over the sacrificial layer, and d) removing the sacrificial layer including the blade of the sacrificial material with a narrow gap remaining in the structural layer where the blade of sacrificial material was removed.

    摘要翻译: 在制造微机电结构(MEMS)中,在MEMS中形成窄间隙的方法包括:a)在支撑衬底的表面上沉积牺牲材料层,b)光致抗蚀剂掩模并且至少部分蚀刻牺牲材料以形成 至少一个牺牲材料刀片,c)在所述牺牲层上沉积结构层,以及d)去除包括所述牺牲材料刀片的所述牺牲层,其中所述牺牲材料刀片被去除的所述结构层中残留有窄间隙 。