公开(公告)号：US08064045B2

公开(公告)日：2011-11-22

申请号：US12248284

申请日：2008-10-09

申请人： Jozef Augustinus Maria Alberti ,  Gerardus Petrus Matthijs Van Nunen ,  Frans Erik Groensmit ,  Rene Theodorus Petrus Compen

发明人： Jozef Augustinus Maria Alberti ,  Gerardus Petrus Matthijs Van Nunen ,  Frans Erik Groensmit ,  Rene Theodorus Petrus Compen

IPC分类号： G03B27/58 ,  G03B27/62

CPC分类号： G03F7/70725 ,  G03F7/70633 ,  G03F7/70775 ,  G03F7/70783 ,  G03F9/7011

摘要： The invention relates to a method of transferring a substrate from a first substrate holder to a second substrate holder in a lithographic projection apparatus by using a transfer unit on the basis of transfer data available thereto. The second substrate holder has a surface provided with a first plurality of burls. In the method, a memory encoded with burl position data and substrate position data is provided. Subsequently, a substrate is provided on the first substrate holder. The position error and orientation of the substrate is then measured. On the basis of the burl position data, substrate position data and orientation as measured orientation adjustment data are calculated. The orientation of the substrate is subsequently adjusted in accordance with the orientation adjustment data. The substrate is then transferred from the first substrate holder to the second substrate holder by the transfer unit and placed on the second substrate holder.

摘要翻译： 本发明涉及一种通过使用转印单元基于可用的转印数据将基板从第一基板保持器转移到光刻投影设备中的第二基板保持器的方法。 第二基板保持器具有设置有第一多个毛刺的表面。 在该方法中，提供了编码有放大位置数据和衬底位置数据的存储器。 随后，在第一衬底保持器上设置衬底。 然后测量衬底的位置误差和取向。 基于钻头位置数据，计算作为测量取向调整数据的基板位置数据和取向。 随后根据取向调整数据调整基板的取向。 然后通过转印单元将衬底从第一衬底保持器转移到第二衬底保持器，并放置在第二衬底保持器上。

公开(公告)号：US08086348B2

公开(公告)日：2011-12-27

申请号：US12248290

申请日：2008-10-09

申请人： Jozef Augustinus Maria Alberti ,  Gerardus Petrus Matthijs Van Nunen ,  Frans Erik Groensmit ,  Rene Theodorus Petrus Compen

发明人： Jozef Augustinus Maria Alberti ,  Gerardus Petrus Matthijs Van Nunen ,  Frans Erik Groensmit ,  Rene Theodorus Petrus Compen

IPC分类号： G06F7/00

CPC分类号： G03F7/70725 ,  G03F7/70633 ,  G03F7/70775 ,  G03F7/70783 ,  G03F9/7011 ,  H01L21/67265 ,  H01L21/67745

摘要： A method is provided for transferring a substrate from a first substrate holder, e.g., a pre-alignment unit, to a second substrate holder, e.g., a substrate table in a lithographic apparatus, by means of a transfer unit on the basis of transfer data available thereto. First, the substrate is provided on the first substrate holder. Subsequently, a position error of the substrate is measured, and positioning adjustment data are calculated based on the position error as measured. Then, the second substrate holder is moved relative to a reference position thereof in accordance with the positioning adjustment data. Finally, the substrate is transferred by means of the transfer unit from the first substrate holder to the second substrate holder in accordance with the transfer data, and placed on the second substrate holder as moved.

摘要翻译： 提供了一种用于将基板从第一基板保持器（例如，预对准单元）传送到第二基板保持器（例如光刻设备中的基板台）的方法，借助于基于转印数据的转印单元 可用。 首先，将基板设置在第一基板支架上。 随后，测量基板的位置误差，并根据所测量的位置误差来计算定位调整数据。 然后，第二基板支架根据定位调整数据相对于其基准位置移动。 最后，根据传送数据，将基板通过传送单元从第一基板保持器传送到第二基板保持器，并且移动时放置在第二基板保持器上。

公开(公告)号：US20090153816A1

公开(公告)日：2009-06-18

申请号：US12248284

申请日：2008-10-09

申请人： Jozef Augustinus Maria ALBERTI ,  Gerardus Petrus Matthijs VAN NUNEN ,  Frans Erik GROENSMIT ,  Rene Theodorus Petrus COMPEN

发明人： Jozef Augustinus Maria ALBERTI ,  Gerardus Petrus Matthijs VAN NUNEN ,  Frans Erik GROENSMIT ,  Rene Theodorus Petrus COMPEN

IPC分类号： G03B27/68

CPC分类号： G03F7/70725 ,  G03F7/70633 ,  G03F7/70775 ,  G03F7/70783 ,  G03F9/7011

摘要： The invention relates to a method of transferring a substrate from a first substrate holder to a second substrate holder in a lithographic projection apparatus by means of a transfer unit on the basis of transfer data available thereto. The second substrate holder has a surface provided with a first plurality of burls. In the method, a memory encoded with burl position data and substrate position data is provided. Subsequently, a substrate is provided on the first substrate holder. The position error and orientation of the substrate is then measured. On the basis of the burl position data, substrate position data and orientation as measured orientation adjustment data are calculated. The orientation of the substrate is subsequently adjusted in accordance with the orientation adjustment data. The substrate is then transferred from the first substrate holder to the second substrate holder by the transfer unit and placed on the second substrate holder.

摘要翻译： 本发明涉及一种基于可用的转印数据，通过转印单元将基板从第一基板支架转移到光刻投影装置中的第二基板支架的方法。 第二基板保持器具有设置有第一多个毛刺的表面。 在该方法中，提供了编码有放大位置数据和衬底位置数据的存储器。 随后，在第一衬底保持器上设置衬底。 然后测量衬底的位置误差和取向。 基于钻头位置数据，计算作为测量取向调整数据的基板位置数据和取向。 随后根据取向调整数据调整基板的取向。 然后通过转印单元将衬底从第一衬底保持器转移到第二衬底保持器，并放置在第二衬底保持器上。

公开(公告)号：US08154709B2

公开(公告)日：2012-04-10

申请号：US12784763

申请日：2010-05-21

申请人： Jozef Augustinus Maria Alberti ,  Gerardus Petrus Matthijs Van Nunen ,  Frans Erik Groensmit ,  Rene Theodorus Petrus Compen ,  Marco Adrianus Peter Van Den Heuvel

发明人： Jozef Augustinus Maria Alberti ,  Gerardus Petrus Matthijs Van Nunen ,  Frans Erik Groensmit ,  Rene Theodorus Petrus Compen ,  Marco Adrianus Peter Van Den Heuvel

IPC分类号： G03B27/58 ,  G03B27/62

CPC分类号： G03F7/70783 ,  G03F7/70633 ,  G03F7/707

摘要： A method of placing a substrate onto a surface of a substrate holder, in which the surface is provided with a plurality of burls. Substrate placement data for allowing placement of the substrate at a certain position with respect to a position of the plurality of burls on the surface of the substrate holder is calculated. The substrate is placed at the certain position in accordance with the substrate placement data. The certain position may be based on the position at which placement would result in a minimized overlay error or may be based on the position at which placement would result in minimized substrate deformation.

摘要翻译： 将衬底放置在衬底保持器的表面上的方法，其中表面设置有多个毛刺。 计算用于允许将衬底相对于衬底保持器表面上的多个毛刺的位置放置在特定位置的衬底放置数据。 根据衬底放置数据将衬底放置在特定位置。 该位置可以基于放置将导致最小重叠误差的位置，或者可以基于放置将导致最小化的基板变形的位置。

公开(公告)号：US20090155026A1

公开(公告)日：2009-06-18

申请号：US12248290

申请日：2008-10-09

申请人： Jozef Augustinus Maria ALBERTI ,  Gerardus Petrus Matthijs Van Nunen ,  Frans Erik Groensmit ,  Rene Theodorus Petrus Compen

发明人： Jozef Augustinus Maria ALBERTI ,  Gerardus Petrus Matthijs Van Nunen ,  Frans Erik Groensmit ,  Rene Theodorus Petrus Compen

IPC分类号： H01L21/66 ,  H01L21/68 ,  G05B19/19

CPC分类号： G03F7/70725 ,  G03F7/70633 ,  G03F7/70775 ,  G03F7/70783 ,  G03F9/7011 ,  H01L21/67265 ,  H01L21/67745

摘要： A method is provided for transferring a substrate from a first substrate holder, e.g., a pre-alignment unit, to a second substrate holder, e.g., a substrate table in a lithographic apparatus, by means of a transfer unit on the basis of transfer data available thereto. First, the substrate is provided on the first substrate holder. Subsequently, a position error of the substrate is measured, and positioning adjustment data are calculated based on the position error as measured. Then, the second substrate holder is moved relative to a reference position thereof in accordance with the positioning adjustment data. Finally, the substrate is transferred by means of the transfer unit from the first substrate holder to the second substrate holder in accordance with the transfer data, and placed on the second substrate holder as moved.

摘要翻译： 提供了一种用于将基板从第一基板保持器（例如，预对准单元）传送到第二基板保持器（例如光刻设备中的基板台）的方法，借助于基于转印数据的转印单元 可用。 首先，将基板设置在第一基板支架上。 随后，测量基板的位置误差，并根据所测量的位置误差来计算定位调整数据。 然后，第二基板支架根据定位调整数据相对于其基准位置移动。 最后，根据传送数据，将基板通过传送单元从第一基板保持器传送到第二基板保持器，并且移动时放置在第二基板保持器上。

公开(公告)号：US08149387B2

公开(公告)日：2012-04-03

申请号：US12248586

申请日：2008-10-09

申请人： Jozef Augustinus Maria Alberti ,  Gerardus Petrus Matthijs Van Nunen ,  Frans Erik Groensmit ,  Rene Theodorus Petrus Compen ,  Abraham Alexander Soethoudt

发明人： Jozef Augustinus Maria Alberti ,  Gerardus Petrus Matthijs Van Nunen ,  Frans Erik Groensmit ,  Rene Theodorus Petrus Compen ,  Abraham Alexander Soethoudt

IPC分类号： G03B27/58 ,  G03B27/62

CPC分类号： G03F7/70783 ,  G03F7/70633

摘要： A method is provided for placing a substrate onto a surface of a substrate holder, the surface having a plurality of burls. First substrate placement data is calculated. This data enables placement of the substrate at a certain position with respect to a position of the plurality of burls on the surface of the substrate holder. Then, the substrate is placed at the certain position in accordance with the substrate placement data. The certain position may be based on the position at which placement would result in a minimized overlay error or may be based on the position at which placement would result in minimized substrate deformation.

摘要翻译： 提供了一种将衬底放置在衬底保持器的表面上的方法，该表面具有多个毛刺。 计算第一衬底放置数据。 该数据使得能够将衬底相对于衬底保持器表面上的多个毛刺的位置放置在特定位置。 然后，根据基板放置数据将基板放置在特定位置。 该位置可以基于放置将导致最小重叠误差的位置，或者可以基于放置将导致最小化的基板变形的位置。

公开(公告)号：US20100265488A1

公开(公告)日：2010-10-21

申请号：US12784763

申请日：2010-05-21

申请人： Jozef Augustinus Maria Alberti ,  Gerardus Petrus Matthijs Van Nunen ,  Frans Erik Groensmit ,  Rene Theodorus Petrus Compen ,  Marco Adrianus Peter Van Den Heuvel

发明人： Jozef Augustinus Maria Alberti ,  Gerardus Petrus Matthijs Van Nunen ,  Frans Erik Groensmit ,  Rene Theodorus Petrus Compen ,  Marco Adrianus Peter Van Den Heuvel

IPC分类号： G03B27/58

CPC分类号： G03F7/70783 ,  G03F7/70633 ,  G03F7/707

摘要： A method of placing a substrate onto a surface of a substrate holder, in which the surface is provided with a plurality of burls. Substrate placement data for allowing placement of the substrate at a certain position with respect to a position of the plurality of burls on the surface of the substrate holder is calculated. The substrate is placed at the certain position in accordance with the substrate placement data. The certain position may be based on the position at which placement would result in a minimized overlay error or may be based on the position at which placement would result in minimized substrate deformation.

摘要翻译： 将衬底放置在衬底保持器的表面上的方法，其中表面设置有多个毛刺。 计算用于允许将衬底相对于衬底保持器表面上的多个毛刺的位置放置在特定位置的衬底放置数据。 根据衬底放置数据将衬底放置在特定位置。 该位置可以基于放置将导致最小重叠误差的位置，或者可以基于放置将导致最小化的基板变形的位置。

公开(公告)号：US20090180095A1

公开(公告)日：2009-07-16

申请号：US12248586

申请日：2008-10-09

申请人： Jozef Augustinus Maria ALBERTI ,  Gerardus Petrus Matthijs VAN NUNEN ,  Frans ERIK GROENSMIT ,  Rene Theodorous Petrus COMPEN ,  Abraham Alexander SOETHOUDT

发明人： Jozef Augustinus Maria ALBERTI ,  Gerardus Petrus Matthijs VAN NUNEN ,  Frans ERIK GROENSMIT ,  Rene Theodorous Petrus COMPEN ,  Abraham Alexander SOETHOUDT

IPC分类号： G03B27/32

CPC分类号： G03F7/70783 ,  G03F7/70633

摘要： A method is provided for placing a substrate onto a surface of a substrate holder, the surface having a plurality of burls. First substrate placement data is calculated. This data enables placement of the substrate at a certain position with respect to a position of the plurality of burls on the surface of the substrate holder. Then, the substrate is placed at the certain position in accordance with the substrate placement data. The certain position may be based on the position at which placement would result in a minimized overlay error or may be based on the position at which placement would result in minimized substrate deformation.

摘要翻译： 提供了一种将衬底放置在衬底保持器的表面上的方法，该表面具有多个毛刺。 计算第一衬底放置数据。 该数据使得能够将衬底相对于衬底保持器表面上的多个毛刺的位置放置在特定位置。 然后，根据基板放置数据将基板放置在特定位置。 该位置可以基于放置将导致最小重叠误差的位置，或者可以基于放置将导致最小化的基板变形的位置。